A layered solid element includes a ferroelectric layer of a crystalline material Li.sub.1−x(Nb.sub.1−yTa.sub.y).sub.1+xO.sub.3+2x−z which has X- or 33° Y-orientation with respect to a substrate of the layered solid element. The ferroelectric layer is grown epitaxially from a buffer layer having of one of the chemical formulae L.sub.kNi.sub.rO.sub.1.5.Math.(k+r)+w or L.sub.n+1Ni.sub.nO.sub.3n+1+δ, where L is a lanthanide element. Such layered solid element may form a thin-film bulk acoustic resonator and be useful for integrated electronic circuits such as RF-filters, or guided optical devices such as integrated optical modulators.

A method for preparing a static/dynamic three-dimensional (3D) microcrack propagation sensor, a sensor and equipment, belongs to the field of sensor technology. The preparation method includes: preparing a piezoresistive/piezoelectric sensing functional component dispersed material, and then coating the dispersed material to the surface of a fiber cloth substrate to obtain a piezoresistive/piezoelectric sensing fiber cloth; performing a pre-stretching treatment on the piezoresistive/piezoelectric sensing fiber cloth to obtain a piezoresistive/piezoelectric sensing 3D microcrack fiber cloth; ablating the piezoresistive/piezoelectric sensing 3D microcrack fiber cloth by microwave to remove the fiber cloth substrate, then obtaining a piezoresistive/piezoelectric sensing 3D microcrack functional skeleton; coating a conductive layer on both surfaces of the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton, thereby forming an electrode; polarizing the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton with the formed electrodes on the surfaces; and, encapsulating the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton to obtain a static/dynamic 3D microcrack propagation sensor.

A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

A method for depolarization suppression of in rhombohedral relaxor-based ferroelectric single crystal. The purpose of the present invention is to address the problem that the rhombohedral relaxor-based ferroelectric single crystals would depolarize when driven to sufficiently electric field due to their low coercive field. In the present invention, the crystal cut, poling direction and compressive stress application direction of the crystal is selected based on the domain structure and anisotropic nature of the crystal such that the spontaneous direction(s) of the crystal would rotate towards the poling direction in response to the applied compressive stress. Through application of appropriate compressive stress, the magnitude of depolarization field of the rhombohedral relaxor-based ferroelectric single crystals can be effectively increased.

To perform poling treatment in a simple procedure by dry process. A magnetic field poling device includes a first holding part configured to hold a film-to-be-poled (2); a second holding part configured to hold a magnet generating a magnetic field B to the film-to-be-poled (2); and a moving mechanism configured to move the first holding part or the second holding part in a direction perpendicular to the direction of the magnetic field B.

The present invention relates to a piezoelectric fiber having excellent flexibility, the piezoelectric fiber employs a conductive fiber member as an inner electrode, on which a piezoelectric polymer layer, an outer electrode and a coating layer are sequentially formed, thereby having excellent flexibility and sufficient elasticity to be sewed, woven, knotted or braided. Therefore, the piezoelectric fiber can be applied in power supplies for a variety of sizes and types of wearable electronic devices, portable devices, clothing, etc. In addition, since the piezoelectric fiber has excellent piezoelectricity and durability because of the above-described structure, it can effectively convert deformation or vibration caused by external physical force into electric energy, and thus can replace existing ceramic-based and polymer piezoelectric bodies, etc. Furthermore, an economical and simple method of manufacturing a piezoelectric fiber having excellent piezoelectricity is provided.

Provided are an electroacoustic transduction film in which conversion between a vibration and a voltage is able to be appropriately performed without the occurrence of dielectric breakdown of the air between upper and lower thin film electrodes even when a high voltage is applied therebetween, a user is able to be prevented from coming into contact with a piezoelectric layer, and high productivity is achieved, and a manufacturing method of an electroacoustic transduction film. A piezoelectric layer which stretches and contracts in response to a state of an electric field, an upper thin film electrode formed on one principal surface of the piezoelectric layer, a lower thin film electrode formed on the other principal surface of the piezoelectric layer, an upper protective layer formed on the upper thin film electrode, and a lower protective layer formed on the lower thin film electrode are included, and a groove which penetrates the thin film electrode and the protective layer is formed in at least a portion of an outer peripheral portion in a surface direction of at least one of the upper thin film electrode and the upper protective layer, or the lower thin film electrode and the lower protective layer.

A microactuator for a suspension is described. The microactuator includes a multi-layer PZT device having a first face and an opposite second face. Each layer of the multi-layer PZT device is configured to operate in its d15 mode when actuated by an actuation voltage. The layers are configured as a stack such that each layer is configured to act in the same direction when actuated such that the first face moves in shear relative to the second face.

An artificially oriented piezoelectric films for integrated filters and methods of manufacture. The method includes: forming a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited piezoelectric films; and forming electrodes on a planar surface of the piezoelectric film. The piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the electrodes, and an effective crystalline orientation of the polar axis in a vertical direction adjacent to an underlying substrate.