The present invention provides a process for the fabrication of a flexible strain and pressure sensor using a synergistic composition of ZnO nanoparticle and graphene nanoplatelets. The substrate used is PDMS, a polymer that imparts the desired properties of flexibility and durability to the sensor. The invention also discloses a simple and facile process of sensor fabrication, wherein the sensing element is embedded in the substrate material, and thereby prevents any deformation or peeling even after repeated stretch/release cycles. The reported flexible sensors can replace the conventional stiff sensors due to their ability to be contoured on curved surfaces, such as body parts. These sensors can find applications in wearable electronics and can have myriad of uses in healthcare monitoring, human-machine interface, electronic skin on prosthetics, and so on.

The present invention provides a process for the fabrication of a flexible strain and pressure sensor using a synergistic composition of ZnO nanoparticle and graphene nanoplatelets. The substrate used is PDMS, a polymer that imparts the desired properties of flexibility and durability to the sensor. The invention also discloses a simple and facile process of sensor fabrication, wherein the sensing element is embedded in the substrate material, and thereby prevents any deformation or peeling even after repeated stretch/release cycles. The reported flexible sensors can replace the conventional stiff sensors due to their ability to be contoured on curved surfaces, such as body parts. These sensors can find applications in wearable electronics and can have myriad of uses in healthcare monitoring, human-machine interface, electronic skin on prosthetics, and so on.

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and a method of manufacturing an electroacoustic conversion film web in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step.

A method of making a thin film based structure. The method includes (a): forming an electrically conductive layer on a substrate such that the electrically conductive layer is releasably attached to the substrate. The method also includes (b): forming a ceramic or metallic thin film on the electrically conductive layer, on a side opposite the substrate. The electrically conductive layer and the substrate are arranged such that when an interface between them contacts a water-based liquid, the water-based liquid facilitates or causes release of the electrically conductive layer from the substrate, substantially without damaging the substrate.

A method of making a thin film based structure. The method includes (a): forming an electrically conductive layer on a substrate such that the electrically conductive layer is releasably attached to the substrate. The method also includes (b): forming a ceramic or metallic thin film on the electrically conductive layer, on a side opposite the substrate. The electrically conductive layer and the substrate are arranged such that when an interface between them contacts a water-based liquid, the water-based liquid facilitates or causes release of the electrically conductive layer from the substrate, substantially without damaging the substrate.

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and a method of manufacturing an electroacoustic conversion film web in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step.

An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

A method is provided for fabricating piezoelectric plates. A sacrificial layer is formed overlying a growth substrate. A template layer, with openings exposing sacrificial layer surfaces, is formed over the sacrificial layer. An adhesion layer/first electrode stack is selectively deposited in the openings overlying the sacrificial layer surfaces, and a piezoelectric material formed in the openings overlying the stack. Then, a second electrode is formed overlying the piezoelectric material. Using the second electrode as a hardmask, the piezoelectric material is etched to form polygon-shaped structures, such as disks, attached to the sacrificial layer surfaces. After removing the template layer and annealing, the polygon-shaped structures are separated from the sacrificial layer. With the proper choice of growth substrate material, the annealing can be performed at a relatively high temperature.

A method of manufacturing a gyro element as a vibration element is a manufacturing method of processing a quartz crystal substrate to form an outward shape of a gyro element including a vibrating arm and form recessed portions in a vibrating arm. The method includes forming the outward shape of a gyro element from one surface of the quartz crystal substrate using dry etching and forming the recessed portions using wet etching.

The actuator device according to the present invention comprises an actuator and an AC power supply capable of applying a high-frequency voltage to the actuator. The actuator comprises a flexible tube formed of a polymer, an inner electrode, and an outer electrode. In a cross section perpendicular to a longitudinal direction of the flexible tube, the inner electrode is in contact with at least a part of an inner periphery of the flexible tube. In the cross section, a part of an outer periphery of the flexible tube is coated with the outer electrode. In operation, the AC power supply applies a high-frequency voltage having a frequency of not less than 1 MHz to the actuator to deform the actuator in a direction from the inner electrode toward the outer electrode in the cross section. The AC power supply stops the application of the high-frequency voltage to the actuator to return the actuator to the original position thereof.