A piezoelectric actuator includes two substrates, piezoelectric elements that are arranged between the two substrates, and a cladding portion that covers at least a part of a surrounding area of the piezoelectric elements.

An optical scanning actuator (1) includes an optical fiber (2) having a tip (2a) supported to allow vibration and includes a piezoelectric element (4) that generates a driving force by expanding and contracting in the direction of the optical axis of the optical fiber (2), the driving force driving the tip (2a) of the optical fiber (2) in a direction perpendicular to the optical axis. The optical scanning actuator (1) has rotational asymmetry or two-fold rotational symmetry about the optical axis of the optical fiber (2), and the resonance direction of the tip (2a) of the optical fiber (2) and the direction of the driving force of the piezoelectric element (4) are substantially parallel.

A piezoelectric driving apparatus including a substrate; a piezoelectric element which has a first electrode provided on the substrate, a piezoelectric body layer provided on the first electrode, and a second electrode provided on the first piezoelectric body layer, a layer including copper provided along an outer periphery of the substrate in plan view and electrically connected to the first electrode; and a conductive layer including nickel and phosphorus provided so as to cover the layer including copper.

The present invention relates to an actuator including: a first ionic polymer layer disposed on underside of a first electrode layer; a second ionic polymer layer disposed on top of a second electrode layer; and a porous conducting interlayer disposed between the first ionic polymer layer and the second ionic polymer layer.

A resonator includes: a resonator element including a quartz crystal substrate that includes a first area performing a thickness-shear vibration and a second area with a thickness thinner than the first area and located around the first area; and a base substrate to which the second area of the resonator element on one edge side thereof is attached via a bonding material. The quartz crystal substrate has a major surface that is a surface including an X-axis and a Z-axis, and has a thickness in a direction along a Y-axis. The resonator satisfies the relation: 1.5Xp where Xp is the maximum length of an area of the second area where the bonding material is bonded along the X-axis in a plan view and is the wavelength of a flexural vibration occurring in the quartz crystal substrate.

A system having improved trapping force for acoustophoresis is described where the trapping force is improved by manipulation of the frequency of the ultrasonic transducer. The transducer includes a ceramic crystal. The crystal may be directly exposed to fluid flow. The crystal may be air backed, resulting in a higher Q factor.

Provided is a vibration-type actuator in which electric contact between a piezoelectric element and an elastic member is sufficiently ensured. In the vibration-type actuator solving the above-described issue, a plate-like piezoelectric material included in the piezoelectric element has a through-hole penetrating in a thickness direction of the piezoelectric material and includes a through-hole electrode filling the through-hole, the through-hole electrode has a protruding portion protruding from a first opening portion of the through-hole that opens on an elastic member side, a ground electrode electrically connected to the through-hole electrode is provided on a surface on the first opening portion side of the piezoelectric material, and the through-hole electrode and the elastic member are electrically connected.

An actuator in the form of a stack is described, wherein the stack includes multiple first pairs of layers of a polarized electromechanical material and multiple second pairs of layers of a polarized electromechanical material, and the first and second pairs of layers are disposed, one behind the other, wherein at each pair of layers on each of its terminal surfaces electrically conductive layers are disposed, and, between the layers of each pair of layers, an electrically conductive layer for connection to at least one connection electrode of a second polarity is disposed, and the polarization directions of the electromechanical material of the layers of each pair are aligned opposite to one another, and the directions of polarization of the material of the layers of each pair of layers are aligned perpendicular to the directions of polarization of the material of the layers of each adjacent pair of layers.

An inkjet print head includes an actuator substrate that has an ink flow passage including a pressure chamber, a movable film formation layer that includes a movable film disposed on the pressure chamber and demarcating a top surface portion of the pressure chamber, a piezoelectric element that includes a lower electrode disposed on the movable film, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, a hydrogen barrier film that covers at least entire side surfaces of the upper electrode and the piezoelectric film among surfaces of the piezoelectric element, an interlayer insulating film that is formed on the movable film formation layer such as to cover the hydrogen barrier film, and a wiring that is formed on the interlayer insulating film and is connected to the piezoelectric element and a fuse is inserted in an intermediate portion of the wiring.

A metal substrate supported by a wiring substrate includes a first extending portion and a first connection portion connected to the first extending portion. The first connection portion includes a first region facing a portion of a wiring substrate in a Z-axis direction, a second region being continuous from the first region, and a third region being continuous from the second region. When viewed in the Z-axis direction, in a direction perpendicular to a connection direction in which the third region is connected to the second region, a width of the second region is larger than a width of the third region. A first bonding member bonding the wiring substrate and the metal substrate includes a first portion disposed between the portion and the first region, and a second portion being continuous from the first portion. The second portion reaches the second region but does not reach the third region.