In at least one illustrative embodiment, a microelectromechanical system (MEMS) includes a composable piezoelectric actuator electrically coupled to a terminal. In response to a voltage applied across electrodes of the actuator, a piezoelectric rod moves from an initial position to a displaced position. In an embodiment, the MEMS includes two terminals, a resistive element is coupled between the terminals, and when in the displaced position the rod contacts one of the terminals. In an embodiment, the MEMS includes three terminals, and when a threshold voltage is applied to one of the terminals, the rod moves to the displaced position and allows current to flow between the other two terminals. In an embodiment, the MEMS includes a primary set of actuators that are mechanically but not electrically connected to a secondary set of actuators. An output terminal is coupled to the second set of actuators. Other embodiments are described and claimed.

A nanopositioner 10 including a base 12 including a base plate 18 carrying a set of base bearings 22, a carrier 14 movably carried with respect to the base 12 and including a carrier plate 56 carrying a set of carrier bearings 58 operatively coupled to the set of base bearings 22. The nanopositioner 10 may include a variable area capacitive position sensor, and/or an actuator 16 operatively coupling the carrier 14 to the base 12 and including an armature 100 fixed with respect to the carrier 14 and a stator 98 removably coupled to the base 12 to facilitate removal and replacement of at least a portion of the stator 98. Also disclosed are a method of producing a nanopositioner, and a piezoelectric actuator 16 that may be used with a nanopositioner.

A piezoelectric element, a piezoelectric vibrator and a manufacturing method and a driving method thereof, and an electronic device, and relates to field of piezoelectric technologies. According to the application, a piezoelectric structure is disposed on a first electrode and has an opening allowing the first electrode to penetrate through to be partially exposed, and a heat conducting structure is disposed in the opening. The opening penetrating through the piezoelectric structure is formed in the piezoelectric structure, such that the heating area is decreased when the piezoelectric structure vibrates, and heat generated by the piezoelectric structure is reduced, correspondingly; and the heat conducting structure is additionally disposed in the piezoelectric element to dissipate heat generated when the piezoelectric structure vibrates.

A liquid discharge head includes: a nozzle plate including a nozzle; a liquid chamber substrate having an individual chamber; a diaphragm; a piezoelectric actuator including a piezoelectric body, a wiring portion covering a first region of the piezoelectric actuator; and a protective film covering a second region of the piezoelectric actuator other than the first region. A first outer periphery of the piezoelectric body in the second region is interior of a second outer periphery of the individual chamber in the second region. A gap region between the first outer periphery and the second outer periphery has: a first gap region having a first width in the longitudinal direction; and a second gap region having a second width in a transverse direction orthogonal to the longitudinal direction, the second width larger than the first width. The protective film covers a part of the first gap region in the second region.

A haptic actuator and a display device including the same are provided. The haptic actuator includes a reinforcing component where a supporter extends downwardly from a long side of a body with a rectangular plane shape arranged on a piezoelectric element. A cavity is positioned along the relatively long side of the reinforcing component. Vibrations generated in the piezoelectric element can be transferred efficiently to the cavity positioned along the long side of the reinforcing component.

An apparatus may include a vibration member and a vibration device configured to vibrate the vibration member. The vibration device may be configured to comprise a first vibration portion and a second vibration portion which is different from the first vibration portion.