The module comprises a pendular unit with an elastically deformable piezoelectric beam having a clamped end and an opposite, free end, coupled to an inertial mass. The beam produces an oscillating electrical signal collected by electrodes, which is rectified and regulated to output a voltage for charging a battery. The number and configuration of the electrodes (T1, T2, B1, B2, N) carried by the piezoelectric beam define a plurality of pairs of electrodes between which a corresponding plurality of said oscillating signals can be simultaneously collected. A switching matrix, as a function of an input command, selectively switches the plurality of pairs of electrodes between each other according to a plurality of different series (S), parallel (P) and/or series-parallel (SP) configurations, the selected configuration being that which maximizes the power sent to the battery as a function of the voltage level (VBAT) present at the terminals of the latter.

Described herein is an energy harvesting system comprising a transducer and a processor. The transducer generates an electric signal from ambient energy. The processor is configured to process the electric signal to perform pattern recognition of the electric signal so as to determine and output a characteristic of a source of the ambient energy. The pattern recognition comprises statistical analysis and frequency domain analysis.

A method for making a piezoelectric microelectromechanical systems (MEMS) microphone is provided, comprising depositing a piezoelectric film layer onto a substrate; selectively etching the piezoelectric film layer to define lines; removing the substrate to define a cavity; and breaking the piezoelectric film layer along the lines, such that the microphone has at least two cantilevered beams. The piezoelectric microelectromechanical systems (MEMS) microphone is also provided.

A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first cantilever beam element.

An energy harvesting system is disclosed that is especially well-suited for use on aerodynamic systems such as guided projectiles or other aerobodies. A series of piezoelectric cantilevers are arranged to capture vibrations from the ambient environment and transduce the mechanical motion from the vibrations into useful electrical energy. The piezoelectric cantilevers can be arranged along different planes from one another to capture different vibrational modes and directions. A power conditioning circuit is included to receive the electrical energy produced by the piezoelectric cantilevers. A storage element coupled to the power conditioning circuit is configured to store charge based on the electrical energy produced by the plurality of piezoelectric cantilever structures. The stored charge can be used to provide low levels of power to certain electrical components on board the aerodynamic system before it has been launched.

According to one embodiment, a cantilever array includes a plurality of cantilever pairs. Each of the cantilever pairs includes a first cantilever and a second cantilever facing the first cantilever while having a gap, and which are arrayed in a direction orthogonal to a facing direction. Positions of the gaps of the cantilever pairs shift from each other when viewing in an array direction.

A smart ring is configured harvest mechanical energy using piezoelectricity. The smart ring includes a ring-shaped housing, a power source disposed within the ring-shaped housing, and a charging circuit. The charging circuit includes a piezoelectric harvesting element, and is configured to charge the power source when user motion causes a mechanical deformation in the piezoelectric harvesting element. The smart ring further includes a component, disposed within the ring-shaped housing and configured to draw energy from the power source, and further configured to perform at least one of: i) sense a physical phenomenon external to the ring-shaped housing, ii) send communication signals to a communication device external to the ring-shaped housing, or iii) implement a user interface.

A method of making a piezoelectric sensor includes forming piezoelectric layer(s) to define a beam extending between a proximal portion and a distal end. The method also includes modeling a strain distribution on the beam based on a force applied to the beam, and defining an outer boundary with a shape substantially corresponding to a contour line of the strain distribution on the beam. The method also includes forming an electrode having said outer boundary shape, and attaching the electrode to the beam. The method also includes attaching the beam to a substrate in cantilever form so that the proximal portion of the beam is anchored to the substrate and the distal end of the beam is unsupported.

A micro-electromechanical system (MEMS) device comprises a fixed portion and a proofmass suspended by at least one composite beam. The composite beam is cantilevered relative to the fixed portion and extends between a first end that is integrally formed with the fixed portion and a second distal end. The composite beam comprises an insulator having a top surface and at least two side surfaces; a conductor extending away from the fixed portion and surrounding at least a portion of the insulator; and a second conductor positioned adjacent to the top surface of the conductor and extending parallel with the insulator away from the fixed portion. The second conductor is separated from the first conductor to provide a low parasitic conductance of the composite beam.

A smart ring is configured harvest mechanical energy using piezoelectricity. The smart ring includes a ring-shaped housing, a power source disposed within the ring-shaped housing, and a charging circuit. The charging circuit includes a piezoelectric harvesting element, and is configured to charge the power source when user motion causes a mechanical deformation in the piezoelectric harvesting element. The smart ring further includes a component, disposed within the ring-shaped housing and configured to draw energy from the power source, and further configured to perform at least one of: i) sense a physical phenomenon external to the ring-shaped housing, ii) send communication signals to a communication device external to the ring-shaped housing, or iii) implement a user interface.