Methods, systems, and devices for techniques for forming memory structures are described. Forming a memory structure may include etching a stack of material including a conductive line, a first electrode and a sacrificial material to divide the stack of material into multiple sections. The process may further include depositing an oxide material in each of the first quantity of channels to form multiple oxide materials. The sacrificial material may be etched to form a second channel between two oxide materials of the multiple oxide materials. Memory material may be deposited over the two oxide materials and the second channel, which may create a void in the second channel between the memory material and the first electrode. The memory material may be heated to fill the void in the second channel.

Disclosed are a memory device including a vertical stack structure, a method of manufacturing the same, and/or an electronic device including the memory device. The memory device including a vertical stack structure includes an oxygen scavenger layer on a base substrate, a recording material layer on the oxygen scavenger layer and in direct contact with the oxygen scavenger layer, a channel layer on the recording material layer, a gate insulating layer on the channel layer, and a gate electrode on the gate insulating layer. The oxygen scavenger layer includes an element that forms oxygen vacancies in the recording material layer and does not include oxygen.

A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewall spacer, wherein the upper metal line wraps around the conductive cap, sidewall spacer, and memory stack.

Methods, systems, and devices for decoding for a memory device are described. A decoder may include a first vertical n-type transistor and a second vertical n-type transistor that extends in a third direction relative to a die of a memory array. The first vertical n-type transistor may be configured to selectively couple an access line with a source node and the second n-type transistor may be configured to selectively couple the access line with a ground node. To activate the access line coupled with the first and second vertical n-type transistors, the first vertical n-type transistor may be activated, the second vertical n-type transistor may be deactivated, and the source node coupled with the first vertical n-type transistor may have a voltage applied that differs from a ground voltage.

A memory device includes the following items. A substrate. A bottom electrode disposed over the substrate. An insulating layer disposed over the bottom electrode, the insulating layer having a through hole defined in the insulating layer. A heater disposed in the through hole. A phase change material layer disposed over the heater. A selector layer disposed over the phase change material layer. An intermediate layer disposed over the through hole. Also, a metal layer disposed over the selector layer. The metal layer is wider than the phase change material layer.

A memory device includes: a first conductor extending in parallel with a first axis; a first selector material comprising a first portion that extends along a first sidewall of the first conductor; a second selector material comprising a first portion that extends along the first sidewall of the first conductor; a first variable resistive material comprising a portion that extends along the first sidewall of the first conductor; and a second conductor extending in parallel with a second axis substantially perpendicular to the first axis, wherein the first portion of the first selector material, the first portion of the second selector material, and the portion of the first variable resistive material are arranged along a first direction in parallel with a third axis substantially perpendicular to the first axis and second axis.

A resistive random access memory (RRAM) device and a method for constructing the device is described. A capping layer structure is provided over a bottom contact where the capping layer includes a recess situated over the bottom contact. A first portion of the recess is filled with a lower electrode such that the width of the recess defines the width of the lower electrode. A second portion of the recess is filled with a high-K layer so that a bottom surface of the high-K layer has a stepped profile. A top electrode is formed on the high-K layer and a top contact is formed on the top electrode. The width of the high-K layer is greater than the width of the lower electrode to prevent shorting between the top contact and the lower electrode of the RRAM device.

A resistive random access memory cell includes a first electrode layer, an oxygen reservoir layer, a variable resistance layer, and a second electrode. The first electrode layer is located on a dielectric layer, and includes a body part extending in a first direction and multiple extension parts connected to a sidewall of the body part and extending in a second direction. The second direction is perpendicular to the first direction. The oxygen reservoir layer covers the first electrode layer. The variable resistance layer is located between the first electrode layer and the oxygen reservoir layer. The second electrode is located above a top surface of the oxygen reservoir layer and around an upper sidewall of the oxygen reservoir layer.

A memory cell includes a dielectric structure, a storage element structure, and a top electrode. The storage element structure is disposed in the dielectric structure, and the storage element structure includes a first portion and a second portion. The first portion includes a first side and a second side opposite to the first side, where a width of the first side is less than a width of the second side. The second portion is connected to the second side of the first portion, where a width of the second portion is greater than the width of the first side. The top electrode is disposed on the storage element structure, where the second portion is disposed between the first portion and the top electrode.

Various embodiments of the present application are directed towards a resistive random-access memory (RRAM) cell comprising a barrier layer to constrain the movement of metal cations during operation of the RRAM cell. In some embodiments, the RRAM cell further comprises a bottom electrode, a top electrode, a switching layer, and an active metal layer. The switching layer, the barrier layer, and the active metal layer are stacked between the bottom and top electrodes, and the barrier layer is between the switching and active metal layers. The barrier layer is conductive and between has a lattice constant less than that of the active metal layer.