An on-chip miniature X-ray source, comprising: an on-chip miniature electron source (10); a first insulating spacer (11) located on one side of the on-chip miniature electron source (10) emitting electrons, the first insulating spacer (11) being of a cavity structure; and an anode (12) located on the first insulating spacer (11), a closed vacuum cavity being formed between the on-chip miniature electron source (10) and the anode (12). The on-chip miniature electron source can be obtained by means of a micromachining technique, further reducing the size thereof, and reducing the manufacturing costs. The on-chip miniature X-ray source has the advantages of stable X-ray dose, low operation vacuum requirement, fast switch response, integrated and mass processing, etc. and can be used in various types of small and portable X-ray detection, analysis and treatment devices.

Described herein is a medical linear accelerator including an accelerator target structure constructed of a material having a thickness of less than 0.2 radiation lengths, and an accelerator structure to receive an electromagnetic wave and generate an output therapy dose rate of electrons having a beam energy between 4-25 mega-electronvolts (MeV).

An X-ray module includes a housing in which an opening portion is formed; an electron gun that emits an electron beam; a target that transmits an X-ray generated when the electron beam is incident on the target and emits the X-ray from an X-ray-emitting surface; an X-ray-emitting window that seals the opening portion, and that transmits the X-ray and emits the X-ray to a first side in an axial direction; and a heat radiating unit disposed outside the housing. The housing includes a surface on which a protrusion protruding to the first side is formed, the opening portion is formed in the protrusion, and the target is disposed in the opening portion. The heat radiating unit includes a first portion extending along the surface and thermally connected to the surface, and a second portion extending from the first portion to a second side opposite the first side.

An X-ray module includes a housing; an electron gun that emits an electron beam inside the housing; a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; and a deflection unit including a permanent magnet and disposed outside the housing, to deflect the electron beam by means of a magnetic force of the permanent magnet. The deflection unit includes a heat insulating member disposed at least between the permanent magnet and the housing. A thermal conductivity of the heat insulating member is lower than a thermal conductivity of the permanent magnet.

According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removeably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.

X-ray transparent insulation can be sandwiched between an x-ray window and a ground plate. The x-ray transparent insulation can include aluminum nitride, boron nitride, or polyetherimide. The x-ray transparent insulation can include a curved side. The x-ray transparent insulation can be transparent to x-rays and resistant to x-ray damage, and can have high thermal conductivity. An x-ray window can have high thermal conductivity, high electrical conductivity, high melting point, low cost, and matched coefficient of thermal conductivity with the anode. The x-ray window can be made of tungsten. For consistent x-ray spot size and location, a focusing plate and a filament can be attached to a cathode with an open channel of the focusing plate aligned with a longitudinal dimension of the filament. Tabs of the focusing plate bordering the open channel can be bent to align with a location of the filament.

An x-ray tube can include an x-ray window sealed to a mount. An inner-collimator can be adjacent to, but not sealed to, the x-ray window. The inner-collimator can be sandwiched between the x-ray window and an insulating-layer. The insulating-layer can span an inner-collimator-aperture of the inner-collimator, forming an isolated cavity at the inner-collimator-aperture. Walls of the cavity can include the x-ray window, the inner-collimator, and the insulating-layer. The x-ray tube can have a light weight, can block x-rays in undesirable directions, and can shape the x-ray beam.

Provided are an on-chip miniature X-ray source and a method for manufacturing the same. The on-chip miniature X-ray source includes: an on-chip miniature electron source; a first insulating spacer provided on an electron-emitting side of the on-chip miniature electron source, where the first insulating spacer has a cavity structure; and an anode provided on the first insulating spacer, where a closed vacuum cavity is formed between the on-chip miniature electron source and the anode. The on-chip miniature X-ray source has the advantages of stable X-ray dose, low working requirements for vacuum, fast switch response, capability of integration and batch fabrication, and can be used in various types of small and portable X-ray detection, analysis and treatment devices.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.