Patent classifications
H01J35/186
X-RAY TUBE
An X-ray tube includes an electron gun unit, a target that generates X-rays, and a vacuum housing unit. The vacuum housing unit has a metal housing unit for supporting the target and a bulb unit formed of an insulating material and connected to the metal housing unit. The electron gun unit has a focusing electrode portion at an end portion on an emission side of the electrons, the focusing electrode portion having a tubular shape for focusing the emitted electrons. In the electron gun unit, at least a part of the focusing electrode portion is supported by the bulb unit so as to be located in the metal housing unit. When viewed from an X-ray generation position on the target, the focusing electrode portion blocks a line of sight from the X-ray generation position to the bulb unit.
X-RAY MACHINE
An x-ray apparatus includes a vacuum chamber that includes a window for exit of x-rays. Electrons are generated at a cathode within the vacuum chamber and accelerated toward a target anode associated with the window. An x-ray generating layer is included as a surface of the target anode to receive the electrons emitted by the cathode and to create x-rays. A blocking path blocks over 70% of the free electrons reaching said target anode from continuing on to exit through the window, while allowing x-rays leaving the x-ray generating layer to continue along the selectively blocking path to exit through the window. The x-ray apparatus is capable of operating at low voltage and relatively high power to reduce the necessary shielding and the corresponding weight of the apparatus yet allow more ready absorption of x-rays by items being irradiated.
Monochromatic x-ray imaging systems and methods
According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removeably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.
Nanoscale X-ray tomosynthesis for rapid analysis of integrated circuit (IC) dies
System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.
X-ray tube insulation, window, and focusing plate
X-ray transparent insulation can be sandwiched between an x-ray window and a ground plate. The x-ray transparent insulation can include aluminum nitride, boron nitride, or polyetherimide. The x-ray transparent insulation can include a curved side. The x-ray transparent insulation can be transparent to x-rays and resistant to x-ray damage, and can have high thermal conductivity. An x-ray window can have high thermal conductivity, high electrical conductivity, high melting point, low cost, and matched coefficient of thermal conductivity with the anode. The x-ray window can be made of tungsten. For consistent x-ray spot size and location, a focusing plate and a filament can be attached to a cathode with an open channel of the focusing plate aligned with a longitudinal dimension of the filament. Tabs of the focusing plate bordering the open channel can be bent to align with a location of the filament.
System and method for nanoscale X-ray imaging of biological specimen
System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.
X-ray generating tube, X-ray generating apparatus, and radiography system
The present disclosure provides a reliable X-ray generating tube that forms a focus with a stable size and shape. The X-ray generating tube includes an electron gun including an electron emitting portion, a plurality of grid electrodes, and an insulating support member that supports the plurality of grid electrodes. The electron gun includes a conductive section that hides the insulating support member to prevent the insulating support member from being directly viewed from an electron through path of electrons emitted from the electron emitting portion and passing through the grid electrodes.
Compact source for generating ionizing radiation, assembly comprising a plurality of sources and process for producing the source
A source for generating ionizing radiation and in particular x-rays, to an assembly includes a plurality of sources and to a process for producing the source. The source comprises: a vacuum chamber; a cathode that is able to emit an electron beam into the chamber; an anode that receives the electron beam and that comprises a target that is able to generate ionizing radiation from the energy received from the electron beam; an electrode that is placed in the vicinity of the cathode and that allows the electron beam to be focused; a stopper ensuring the seal tightness of the vacuum chamber; and a mechanical part that is made of dielectric and that forms a portion of the vacuum chamber; and the stopper is fastened to the mechanical part by means of a conductive brazing film that is used to electrically connect the electrode.
High dose output, through transmission and relective target X-ray system and methods of use
A high dose output, through transmission and reflective target x-ray tube and methods of use includes, in general an x-ray tube for accelerating electrons under a high voltage potential having an evacuated high voltage housing, a hemispherical shaped through and reflective transmission target anode disposed in said housing, a cathode structure to deflect the electrons toward the hemispherical anode disposed in said housing, a filament located in the geometric center of the anode hemisphere disposed in said housing, a power supply connected to said cathode to provide accelerating voltage to the electrons.
FLUID-COOLED COMPACT X-RAY TUBE AND SYSTEM INCLUDING THE SAME
A fluid-cooled compact x-ray system includes a compact x-ray tube and a coolant channel coupled thereto. The compact x-ray tube includes a tube housing defining a longitudinal axis, and an electron source in the tube housing and coaxial with the tube housing. The electron source is configured to generate an electron beam. The compact x-ray tube also includes an anode coaxial with the tube housing, the anode defining a plane perpendicular to the longitudinal axis and including a target material, and an electron focusing mechanism in the tube housing and configured to focus and accelerate the electron beam to the anode. The target material of the anode generates a high-energy x-ray beam as a result of bremsstrahlung interaction. The anode defines an interface between the tube housing and the coolant channel. The coolant channel includes a channel housing, and a coolant configured to dissipate heat from the anode.