An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.

In an embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, wherein the transmission window is configured to let through X-rays generated by the accelerated electrons, wherein the transmission window is located either in a straight extension of a line-of-flight of the accelerated electrons or off the line-of-flight and past the acceleration set-up, wherein the transmission window comprises a carbon carrier, and wherein the carbon carrier comprises sp2-hybridized carbon.

An x-ray apparatus includes a vacuum chamber that includes a window for exit of x-rays. Electrons are generated at a cathode within the vacuum chamber and accelerated toward a target anode associated with the window. An x-ray generating layer is included as a surface of the target anode to receive the electrons emitted by the cathode and to create x-rays. A blocking path blocks over 70% of the free electrons reaching said target anode from continuing on to exit through the window, while allowing x-rays leaving the x-ray generating layer to continue along the selectively blocking path to exit through the window. The x-ray apparatus is capable of operating at low voltage and relatively high power to reduce the necessary shielding and the corresponding weight of the apparatus yet allow more ready absorption of x-rays by items being irradiated.

A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.

An X-ray generation tube including a magnetic deflection portion configured to deflect an electron beam to reduce lines of magnetic force extending to the outside of the tube, where a subject is arranged, by placement of a magnetic shielding portion including a portion that is closer to an anode than the magnetic deflection portion in a tube axial direction and that is closer to the tube center axis than the magnetic deflection portion in a tube radial direction.

X-rays can be used for material identification. X-ray beam purity, target adhesion the x-ray window, and a robust hermetic seal of the x-ray window are useful. To achieve these objectives, a target 17 can be mounted by an adhesion-layer 16 on the x-ray window. The adhesion-layer 16 can include chromium. A sealing-layer 13 can seal the x-ray window to a flange 19. Material of the sealing-layer 13 can be different from material of the adhesion-layer 16. There can be a gap 21 between the flange 19 and the target 17. There can be a conductive-layer 18 on the x-ray window 14 in the gap 21. A thickness Ts of the adhesion-layer 16 between the sealing-layer 13 and the x-ray window 14 can be different than a thickness Tt of the adhesion-layer 16 between the target 17 and the x-ray window 14.

An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.

An X-ray generator capable of reliably reducing an X-ray focal spot size without depending on the focal spot size of an electron beam on a target. Providing, within the irradiation range of an electron beam B of a target laminated structure 3 comprising a target 2 and an X-ray irradiation window 1, a low X-ray absorptivity region 3a of localized low X-ray absorptivity in the irradiation direction of the electron beam B results in the suppression of emission to the outside of X-rays from among the X-rays generated as a result of the irradiation of the electron beam B onto the target 2 that are from regions other than the low X-ray absorptivity region 3a, and an X-ray focal spot of a size corresponding to the size of the low X-ray absorptivity region 3a is obtained regardless of the size of the irradiation region of the electron beam B.