An ion mobility separator comprises an RF-device for transversely confining ions in an ion region using: (a) a first set of electrodes arranged parallel to one another along a direction of ion travel to define a first transverse boundary of the ion region, and that are supplied with a first RF-voltage such that different phases of the first RF-voltage are applied to adjacent electrodes of the first set; and (b) a second set of electrodes arranged parallel to one another along said direction of ion travel to define a second transverse boundary of the ion region, and that are supplied with a second RF-voltage such that different phases of the second RF-voltage are applied to adjacent electrodes of the second set, the first and second transverse boundaries being substantially opposite each other in a transverse direction of the ion region and the first and second RF voltages having different frequencies.

An ion guide device includes a plurality of ring electrodes disposed in parallel, wherein each ring electrode includes at least 4 electrode units separated from each other, a channel for ion transmission is formed inside the plurality of ring electrodes, and an arrangement direction of the plurality of ring electrodes defines an axial direction of ion transmission; an radio-frequency voltage source, for applying out-of-phase radio-frequency voltages on the neighboring electrode units belonging to the same ring electrode, and applying in-phase radio frequency voltages on a neighboring electrode units along the axial direction, thereby forming an radio-frequency multipole field that confine ions in the ion guide device; and a direct-current voltage source, wherein the ions are transmitted off-axis and focused to a position closer to an inner surface of the ring electrode under a combined action of the radio-frequency voltage and the direct-current voltage.

A device includes a first surface, a second surface and a controller. The second surface is adjacent to the first surface. The first and the second surfaces define a first ion channel therebetween. The first ion channel extends along a first direction. The second surface includes a first plurality of electrodes including a first electrode and a second electrode spaced apart from the first electrode along a second direction lateral to the first direction. The first plurality of electrodes extends along the first direction. The first electrode is configured to receive a first voltage signal and generate at least a portion of a pseudopotential that inhibits ions in the first ion channel from approaching the second surface. The second plurality of electrodes is located between the first electrode and the second electrode and arranged along the first direction. The second plurality of electrodes are configured to receive a second voltage signal to generate a first traveling drive potential that travels along the first direction. The first traveling drive potential is configured to guide ions along the first ion channel. The device further includes a controller electrically coupled to the first and the second surface. The controller is configured to generate the first voltage signal and the second voltage signal.

Disclosed herein is an ion guide for guiding an ion beam along an ion path, said ion guide having a longitudinal axis which corresponds to said ion path. Said ion guide comprises a plurality of electrode plates which are arranged perpendicularly to the longitudinal axis, each electrode plate having an opening and being arranged such that said longitudinal axis extends through its respective opening, wherein said openings collectively define an ion guide volume. The ion guide extends or is configured to extend through a separation wall separating adjacent first and second pumping chambers. The ion guide has a first portion, in which gaps are formed between at least some of said electrode plates such that uncharged gas can escape from said ion guide volume, wherein said first portion is completely located in said first pumping chamber. A second portion, in which sealing elements are arranged between adjacent electrode plates, prevents neutral gas from escaping from that portion of the ion guide volume between adjacent electrode plates, said second portion extends at least from said separation wall into said second pumping chamber.

An ion guide generates a radio frequency (RF) field to radially confine ions to an ion beam along a guide axis as the ions are transmitted through the ion guide. The effective potential of the RF field has potential wells distributed along the guide axis. The RF field is constructed such that the potential wells move in an axial direction toward an exit end of the ion guide.

An ion guide or mass analyser is disclosed comprising a plurality of electrodes having apertures through which ions are transmitted in use. A pseudo-potential barrier is created at the exit of the ion guide or mass analyser. The amplitude or depth of the pseudo-potential barrier is inversely proportional to the mass to charge ratio of an ion. One or more transient DC voltages are applied to the electrodes of the ion guide or mass analyser in order to urge ions along the length of the ion guides or mass analyser. The amplitude of the transient DC voltage applied to the electrode may be increased with time so that ions are caused to be emitted from the ion guide or mass analyser in reverse order of their mass to charge ratio.

An ion beam irradiation apparatus is provided. The apparatus includes an ion source, a mass separator, and an energy filter. The mass separator sorts dopant ions having a specific mass number and valence from an ion beam extracted from the ion source, and outputs the dopant ions. The energy filter is formed to define a beam passing region for allowing the ion beam to pass therethrough, and configured to have a given filter potential in response to application of a voltage thereto to separate passable ions capable of passing through the beam passing region and non-passable ions incapable of passing through the beam passing region, from each other by a difference in ion energy. The given filter potential is set such that the dopant ions are included in the passable ions, and a portion of unwanted ions which cannot be separated from the dopant ions by the mass separator are included in the non-passable ions.

The invention “Ion Trap Array (ITA)” pertains generally to the field of ion storage and analysis technologies, and particularly to the ion storing apparatus and mass spectrometry instruments which separate ions by its character such as mass-to-charge ratio. The aim of this invention is providing an apparatus for ion storage and analysis comprising at least two or more rows of parallel placed electrode array wherein each electrode array includes at least two or more parallel bar-shaped electrodes, by applying different phase of alternating current voltages on different bar electrodes to create alternating electric fields inside the space between two parallel electrodes of different rows of electrode arrays, multiple linear ion trapping fields paralleled constructed in the space between the different rows of electrode arrays which are open to adjacent each other without a real barrier. This invention also provides a method for ion storage and analysis involving with the trapping, cooling and mass-selected analyzing of ions by this apparatus mentioned which constructs multiple conjoint linear ion trapping fields in the space between the different rows of electrode arrays.

A first multipole assembly includes a first plurality of rod electrodes arranged about an axis and configured to confine ions radially about the axis. A second multipole assembly disposed adjacent to the first multipole assembly includes a second plurality of rod electrodes arranged about the axis and configured to confine the ions radially about the axis. An orientation of the first multipole assembly about the axis is rotationally offset relative to an orientation of the second multipole assembly about the axis.

An ion guide includes electrodes elongated along an axis from an entrance end to an exit end and spaced around the axis to surround an interior. The electrodes have polygonal shapes with inside surfaces disposed at a radius from the axis and having an electrode width tangential to a circle inscribed by the electrodes. An aspect ratio of the electrode width to the radius varies along the axis. The electrodes are configured to generate a two-dimensional RF electrical field in the interior having a multipole composition comprising one or more lower-order multipole components and one or more higher-order multipole components and varying along the axis in accordance with the varying aspect ratio, and having an RF voltage amplitude that varies along the axis.