Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

A cathode material for use in a high-pressure discharge lamp contains a matrix based on tungsten having a tungsten content of greater than or equal to 95% by weight, tungsten carbide, and oxides and/or predominantly oxidic phases of one or more emitter elements from the group of rare earth metals, Hf, and Zr. The cathode material additionally contains predominantly carbidic phases of the one or more emitter elements from the group of rare earth metals, Hf, and Zr. A high-pressure discharge lamp would contain such a cathode composed of the above cathode material.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

The short-arc discharge lamp includes a pair of electrodes arranged facing each other inside a light-emitting tube, the pair of electrodes made of a material containing tungsten; a coating formed on the first outer surface of at least one of the pair of electrodes, the coating made of a material containing ceramics; and tungsten particles adhered to a part of the second outer surface of the coating.

The invention relates to an electrode for a discharge lamp, wherein the electrode has a base body having an electrode plateau providing an end face of the electrode, wherein the base body is delimited by the electrode plateau in a longitudinal extension direction of the electrode. Furthermore, the electrode has a coating, arranged in at least a first region of the base body that is different from the electrode plateau, to increase an emission of heat. In addition, the electrode has an at least partially contiguous free region of the base body extending at least partly in the longitudinal extension direction as far as the electrode plateau, in which the coating for increasing the emission of heat is not arranged, and wherein the first region adjoins at least one section of the free region in the circumferential direction of the electrode.

A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

At least one of the electrodes of a discharge lamp, including at an interior of a main body of the electrode: a heat-transmitting substance of the melting point lower than that of a material which makes up the main body; and a regulating body that is made up of a material of the melting point higher than that of the heat-transmitting substance, that includes a blade which extends in the axial direction and in a radial direction perpendicular to the axial direction, and that regulates convection of the heat-transmitting substance. Surface roughness Rz of at least one of a region which is on an inner wall face of the main body and with which the regulating body makes contact and a region which is on a surface of the regulating body and with which the inner wall face makes contact is not greater than 1.52 μm.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.