A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

Systems and methods for reducing contamination of one or more arc lamps are provided. One example implementation is directed to a millisecond anneal system. The millisecond anneal system includes a processing chamber for thermally treating a substrate using a millisecond anneal process. The system further includes one or more arc lamps. Each of the one or more arc lamps is coupled to a water loop for circulating water through the arc lamp during operation of the arc lamp. The system includes a reagent injection source configured to introduce a reagent, such as nitrogen gas, into water circulating through the arc lamp during operation of the arc lamp.

A cathode material for use in a high-pressure discharge lamp contains a matrix based on tungsten having a tungsten content of greater than or equal to 95% by weight, tungsten carbide, and oxides and/or predominantly oxidic phases of one or more emitter elements from the group of rare earth metals, Hf, and Zr. The cathode material additionally contains predominantly carbidic phases of the one or more emitter elements from the group of rare earth metals, Hf, and Zr. A high-pressure discharge lamp would contain such a cathode composed of the above cathode material.

A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

It is an object to provide a tungsten alloy exhibiting characteristics equal to or higher in characteristics than those of a thorium-containing tungsten alloy, without using thorium which is a radioactive material, and a discharge lamp, a transmitting tube, and a magnetron using the tungsten alloy. According to the present invention, a tungsten alloy includes 0.1 to 5 wt % of Zr in terms of ZrC.

An electrode arrangement for a discharge lamp is provided, including an electrode unit including an electrode and an electrode plate, and a conductive connection unit for coupling to an energy source. The connection unit includes a connection unit plate. The arrangement includes a cylinder composed of a nonconductive material, said cylinder arranged between the electrode plate and the connection unit plate, and at least one conduction film which is arranged on an outer side of the cylinder and extends from the connection unit plate as far as the electrode plate and connects the connection unit plate and the electrode plate to one another. The arrangement includes a cap-shaped and integrally embodied protective film arranged on the electrode plate or connection unit plate, such that the film covers a plate side facing away from the cylinder and an outer lateral surface of the electrode plate or of the connection unit plate.

The invention relates to an electrode for a discharge lamp, wherein the electrode has a base body having an electrode plateau providing an end face of the electrode, wherein the base body is delimited by the electrode plateau in a longitudinal extension direction of the electrode. Furthermore, the electrode has a coating, arranged in at least a first region of the base body that is different from the electrode plateau, to increase an emission of heat. In addition, the electrode has an at least partially contiguous free region of the base body extending at least partly in the longitudinal extension direction as far as the electrode plateau, in which the coating for increasing the emission of heat is not arranged, and wherein the first region adjoins at least one section of the free region in the circumferential direction of the electrode.

Systems and methods for reducing contamination of one or more arc lamps are provided. One example implementation is directed to a millisecond anneal system. The millisecond anneal system includes a processing chamber for thermally treating a substrate using a millisecond anneal process. The system further includes one or more arc lamps. Each of the one or more arc lamps is coupled to a water loop for circulating water through the arc lamp during operation of the arc lamp. The system includes a reagent injection source configured to introduce a reagent, such as nitrogen gas, into water circulating through the arc lamp during operation of the arc lamp.

A high-pressure discharge lamp includes a cathode body composed of a cathode made of tungsten or tungsten alloy and a lead rod inserted in a lead rod insertion hole of the cathode. The cathode has a carbonized layer made of tungsten carbide (W.sub.2C) formed on a surface thereof exposed to a discharge space (except for a tip portion thereof) and on an inner surface of the lead rod insertion hole. The carbonized layer contains carbon in an amount of 0.44 g/cc to 0.53 g/cc.

A high-pressure discharge lamp includes a cathode body composed of a cathode made of tungsten or tungsten alloy and a lead rod inserted in a lead rod insertion hole of the cathode. The cathode has a carbonized layer made of tungsten carbide (W.sub.2C) formed on a surface thereof exposed to a discharge space (except for a tip portion thereof) and on an inner surface of the lead rod insertion hole. The carbonized layer contains carbon in an amount of 0.44 g/cc to 0.53 g/cc.