Patent classifications
H01L21/12
Method of manufacturing display panel
The disclosure provides a method of manufacturing a display panel, including: sequentially forming a buffer layer, an oxide semiconductor layer, and a photoresist layer on a substrate; removing the photoresist layer corresponding to a gate defining region to obtain a photoresist section; forming a first metal layer on the photoresist layer and the oxide semiconductor layer which is not covered by the photoresist layer; and peeling off the photoresist section to remove the first metal layer on the photoresist section, wherein the first metal layer which corresponds to the gate defining region remains to obtain a gate.
Atomic layer deposition bonding for heterogeneous integration of photonics and electronics
Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al.sub.2O.sub.3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.
Array substrate and display device
An array substrate and a display device including the array substrate are provided. The array substrate includes: an upper electrode layer on a base substrate and including a first upper electrode strip and a second upper electrode strip; a lower electrode layer between the base substrate and the upper electrode layer. The lower electrode layer includes a portion that does not overlap the first upper electrode strip and the second upper electrode strip in a direction perpendicular to an upper surface of the base substrate. The array substrate includes a pixel electrode strip and a common electrode strip which are in a same layer and both correspond to a region between the first upper electrode strip and the second upper electrode strip.
SEMICONDUCTOR DEVICES INCLUDING A SUPPORT PATTERN ON A LOWER ELECTRODE STRUCTURE
Semiconductor devices are provided. A semiconductor device includes a first portion of a lower electrode structure on a substrate. The semiconductor device includes a first support pattern being in contact with a first portion of a sidewall of the first portion of the lower electrode structure. The semiconductor device includes a second portion of the lower electrode structure on a second portion of the sidewall of the first portion of the lower electrode structure. The semiconductor device includes an upper electrode on the second portion of the lower electrode structure and on the first support pattern. Moreover, the semiconductor device includes a dielectric layer between the upper electrode and the second portion of the lower electrode structure.
SEMICONDUCTOR DEVICES INCLUDING A SUPPORT PATTERN ON A LOWER ELECTRODE STRUCTURE
Semiconductor devices are provided. A semiconductor device includes a first portion of a lower electrode structure on a substrate. The semiconductor device includes a first support pattern being in contact with a first portion of a sidewall of the first portion of the lower electrode structure. The semiconductor device includes a second portion of the lower electrode structure on a second portion of the sidewall of the first portion of the lower electrode structure. The semiconductor device includes an upper electrode on the second portion of the lower electrode structure and on the first support pattern. Moreover, the semiconductor device includes a dielectric layer between the upper electrode and the second portion of the lower electrode structure.
Array substrate and manufacturing method thereof, display device
An array substrate including a plurality of terminals, a first conductive layer and a second conductive layer, wherein the first conductive layer and the second conductive layer include an insulating layer therebetween, wherein a plurality of first electrode plates and a plurality of second electrode plates are formed in the first conductive layer and the second conductive layer, respectively, the first electrode plates and the second electrode plates are opposite to each other to constitute a capacitor structure, the terminals are provided in the same layer as the first conductive layer or the second conductive layer, or the terminals are provided in the same layer as a third conductive layer between the first conductive layer and the second conductive layer. A method of manufacturing an array substrate and a display device is provided.
Light irradiation type heat treatment method and heat treatment apparatus
A front surface of a semiconductor wafer is momentarily heated by irradiation with a flash of light from flash lamps. An upper radiation thermometer and a high-speed radiation thermometer unit measure a temperature of the front surface of the semiconductor wafer after the irradiation with the flash of light. The temperature data are sequentially accumulated, so that a temperature profile is acquired. An analyzer determines the highest measurement temperature of the semiconductor wafer subjected to the flash irradiation from the temperature profile to calculate a jump distance of the semiconductor wafer from a susceptor, based on the highest measurement temperature. If the calculated jump distance is greater than a predetermined threshold value, there is a high probability that the semiconductor wafer is significantly out of position, so that the transport of the semiconductor wafer to the outside is stopped.
Method of manufacture of a structure and structure
A method of manufacture of a structure includes obtaining or producing a functional electronics assembly including at least a first substrate, at least one electronics component on the first substrate, and at least one connection portion, providing the functional electronics assembly on a first substrate film, wherein the functional electronics assembly is connected to the first substrate film via the at least one connection portion, and providing first material to at least partly embed the at least one electronics component into the first material. The first substrate film is adapted to include a recess defining a volume, and the at least one electronics component is arranged at least partly in the volume.
ARRAY SUBSTRATE AND DISPLAY DEVICE
An array substrate and a display device including the array substrate are provided. The array substrate includes: an upper electrode layer on a base substrate and including a first upper electrode strip and a second upper electrode strip; a lower electrode layer between the base substrate and the upper electrode layer. The lower electrode layer includes a portion that does not overlap the first upper electrode strip and the second upper electrode strip in a direction perpendicular to an upper surface of the base substrate. The array substrate includes a pixel electrode strip and a common electrode strip which are in a same layer and both correspond to a region between the first upper electrode strip and the second upper electrode strip.
Semiconductor devices including a support pattern on a lower electrode structure
Semiconductor devices are provided. A semiconductor device includes a first portion of a lower electrode structure on a substrate. The semiconductor device includes a first support pattern being in contact with a first portion of a sidewall of the first portion of the lower electrode structure. The semiconductor device includes a second portion of the lower electrode structure on a second portion of the sidewall of the first portion of the lower electrode structure. The semiconductor device includes an upper electrode on the second portion of the lower electrode structure and on the first support pattern. Moreover, the semiconductor device includes a dielectric layer between the upper electrode and the second portion of the lower electrode structure.