H01L21/67138

Manufacturing method of semiconductor device, and semiconductor device
09673073 · 2017-06-06 · ·

Provided is a semiconductor device that suppresses the occurrence of defects due to photocorrosion. A method for manufacturing the semiconductor device includes the steps of: forming an insulating layer with a concave portion over a substrate; forming a conductive film over the insulating film and the inside of the concave portion; polishing and removing the conductive film positioned over the insulating layer; and cleaning the insulating layer in a light-shielded state. Between the step of polishing and the step of cleaning, or after the step of cleaning, the substrate SUB is moved by detecting the presence or absence of the substrate SUB in the light-shielded state using an infrared sensor.

BONDING APPARATUS AND METHOD OF ESTIMATING POSITION OF LANDING POINT OF BONDING TOOL
20170154864 · 2017-06-01 · ·

A bonding apparatus 10 having a diagonal optical system 30, the bonding apparatus moves a capillary 24 down to a first heightwise position to calculate a position A11 of a tip end portion of the capillary 24 and a position A12 of a tip end portion of the capillary in an image on an imaging plane of the diagonal optical system 30, and similarly moves the capillary 24 down to a further lower second heightwise position to calculate a position A21 of the tip end portion of the capillary 24 and a position A22 of the tip end portion of the capillary in the image on the imaging plane. The bonding apparatus then estimates the position of the landing point of the capillary 24 on a bonding target 8 based on positional data for the four calculated positions A11, A12, A21, and A22, the first heightwise position, and the second heightwise position. With this, it is possible to use the diagonal optical system in the bonding apparatus to further improve positional accuracy in the bonding process.

Methods and apparatus for uniformly metallization on substrates
09666426 · 2017-05-30 · ·

An apparatus for substrate metallization from electrolyte is provided. The apparatus comprises: an immersion cell containing metal salt electrolyte; at least one electrode connecting to at least one power supply; an electrically conductive substrate holder holding at least one substrate to expose a conductive side of the substrate to face the at least one electrode; an oscillating actuator for oscillating the substrate holder with an amplitude and a frequency; at least one ultrasonic device with an operating frequency and an intensity, disposed in the metallization apparatus; at least one ultrasonic power generator connecting to the ultrasonic device; at least one inlet for metal slat electrolyte feeding; and at least one outlet for metal salt electrolyte draining.

SOLAR CELL PANEL, AND APPARATUS AND METHOD FOR ATTACHING INTERCONNECTOR OF SOLAR CELL PANEL

Disclosed is a method for attaching an interconnector of a solar cell panel, including moving the interconnector, unwound from a winding roll, in a processing direction, and attaching the interconnector to a solar cell. In the moving, the interconnector, which is wound around the winding roll, is unwound so as to pass through one end of the winding roll in a longitudinal direction.

IMPROVED SURFACE PRE-TREATMENT FOR SEMICONDUCTOR DEVICE BONDING STRUCTURES AND METHODS OF FORMING THE SAME
20250125194 · 2025-04-17 ·

An embodiment semiconductor structure may include a first component having first electrical bonding structures formed within a first dielectric layer, a second component having second electrical bonding structures formed with a second dielectric layer, and an organic base layer formed between the first dielectric layer and the second dielectric layer. The organic base layer may include carbon chain structures such that the first dielectric layer is bonded to the second dielectric layer with bonds formed between the first dielectric layer, the organic base layer, and the second dielectric layer. The carbon chain structures may be characterized by a carbon number that is between 10 and 1000 and a hydrogen to carbon ratio H/C that is greater than 2 such that the organic base layer has a thickness that is 0.5 nm to 30 nm. The carbon chain structures may include functional groups that form bonds between the carbon chain structures.

Packaging structure radiating electromagnetic waves in horizontal direction and method making the same

The present disclosure provides an antenna packaging structure radiating electromagnetic waves in a horizontal direction parallel to the device plane and a method making the same. The method includes: providing a support substrate, and forming a separation layer; forming a rewiring layer on the separation layer; forming an antenna array layer on the rewiring layer, the antenna array layer is electrically connected to the metal wire layer; the antenna array layer includes a plurality of antennas which radiates e-m waves in a horizontal direction; each antennas comprises first metal sheets extending along a first direction and second metal sheets extending along a second direction, the first metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval, second metal sheets are arranged with sheets in parallel and spaced by an sheet-to-sheet interval; forming a molding material layer, which molds the antenna array layer.

Device for manufacturing side line, method of manufacturing side line and method of manufacturing display device

According to an aspect of the present disclosure, a device for manufacturing a side line includes a stage on which a substrate is loaded, a side guide configured to be disposed adjacent to a side portion of the substrate loaded on the stage, and a printing unit configured to print a conductive paste on the substrate.

PROCESSING EQUIPMENT
20250253172 · 2025-08-07 · ·

A processing equipment including a supply unit, a receiving unit, and a motion unit is provided. The supply unit has multiple supply sequences. Each of the supply sequences is provided with at least a first supply subset and a second supply subset. At least part of a first receiving subset is distributed in one receiving sequence. The motion unit is used to control a relative movement between the supply unit and the receiving unit, so that the first receiving subset and the second receiving subset are sequentially aligned with the first supply subset and the second supply subset of a supply sequence, and respectively define a first distribution pattern and a second distribution pattern on a supply surface of the supply unit. At least part of the first distribution pattern and at least part of the second distribution pattern are overlapped with each other in a direction.

APPARATUS, SYSTEM, AND METHOD OF PROVIDING A RAMPED INTERCONNECT FOR SEMICONDUCTOR FABRICATION
20250308956 · 2025-10-02 ·

The disclosure is and includes at least an apparatus, system and method for a ramped electrical interconnection for use in semiconductor fabrications. The apparatus, system and method includes at least a first semiconductor substrate having thereon a first electrical circuit comprising first electrical components; a second semiconductor substrate at least partially covering the first electrical circuit, and having thereon a second electrical circuit comprising second electrical components; a ramp formed through the second semiconductor substrate between at least one of the first electrical components and at least one of the second electrical components; and an additively manufactured conductive trace formed on the ramp to electrically connect the at least one first electrical component and the at least one second electrical component.

Electronic apparatus with polarization plate and manufacturing method thereof

An electronic apparatus includes: an electronic module; a display panel disposed on the electronic module and including a first display region and a second display region adjacent to the first display region, the second display region overlapping the electronic module; and a polarization plate disposed on the display panel and including a first polarization region overlapping the first display region and a second polarization region including a polarization part and a non-polarization part having higher light transmittance than the polarization part, the non-polarization part overlapping the second display region.