The present invention provides a substrate processing apparatus that processes a substrate, the apparatus including a stage configured to hold and move the substrate, a conveying unit configured to hold and convey the substrate between conveying unit and the stage, an accumulation unit configured to accumulate control information concerning the stage and the conveying unit which is generated by processing the substrate, and a determination unit configured to determine a conveying procedure when conveying the substrate between the stage and the conveying unit by selecting one of a plurality of conveying procedures which can be set for the stage and the conveying unit based on control information accumulated in the accumulation unit.

The disclosure relates to a dimension measurement apparatus that reduces time required for dimension measurement and eliminates errors caused by an operator. Therefore, the dimension measurement apparatus uses a first image recognition model that extracts a boundary line between a processed structure and a background over the entire cross-sectional image and/or a boundary line of an interface between different kinds of materials, and a second image recognition that output information for dividing the boundary line extending over the entire cross-sectional image obtained from the first image recognition model for each unit pattern constituting a repetitive pattern, obtains coordinates of a plurality of feature points defined in advance for each unit pattern, and measures a dimension defined as a distance between two predetermined points of the plurality of feature points.

A traveling vehicle travels along a traveling path and includes a main body, a traveler to allow a main body to travel along the traveling path, an LED array provided at the main body to switch a display manner according to a state of the traveling vehicle, an imager to capture an image of the LED array at a traveling vehicle located ahead of the traveling vehicle, and a controller configured or programmed to acquire a state of the traveling vehicle ahead based on the display manner captured by the imager, and to control the traveler of the traveling vehicle based on the acquired state.

There is provided a substrate processing system, including: a plurality of substrate processing apparatuses; a first control part installed in each of the plurality of substrate processing apparatuses and configured to transmit a first apparatus data from each of the plurality of substrate processing apparatuses; a second control part configured to receive the first apparatus data from each of the plurality of substrate processing apparatuses, generate a priority data of each of the plurality of substrate processing apparatuses based on the first apparatus data, and transmit the priority data to the first control part; and a display part configured to display the priority data thereon.

Disclosed is a substrate treating apparatus including a coating module, an exposure module, a plurality of developing modules, and a transfer unit that performs transfer of a substrate between the modules. The plurality of developing modules include a plurality of post-exposure bake units that perform a bake process on a substrate on which an exposure process is completely performed in the exposure module. The substrate treating apparatus further includes a controller that controls the transfer of the substrate by the transfer unit. When transferring a substrate from the exposure module to the plurality of post-exposure bake units, the controller performs control to select a post-exposure bake unit in which the least delay time occurs, among the plurality of post-exposure bake units and to transfer the substrate to the selected post-exposure bake unit.

Provided are an interface apparatus for resolving congestion through a non-stop interface between a transporting device and a logistics automation storage device, and a container transporting system having the same. The interface apparatus includes a saddle for receiving a container from a container transporting device; and a circulating path for providing a route for transporting the container seated on the saddle to a container storage device, wherein the saddle receives the container while moving together with the container transporting device.

A wafer manufacturing system includes a wafer manufacturing device provided with a sensor; a host PC that is connected to the wafer manufacturing device via a data communication line; a logic controller that samples and stores an analog output signal of the sensor; and a relay PC that extracts tracking information transmitted on the data communication line for a wafer or a single crystal that is being processed by the wafer manufacturing device and sends the tracking information to the logic controller, and the logic controller stores a digital value of the analog output signal of the sensor in association with the tracking information that is sent from the relay PC.

Provided is a method, device, and program for determining a timing of removing a substrate from a cassette in substrate processing device, and substrate processing device. In the method, a tentative removal time point of each substrate is calculated by adding a transfer time to a tentative removal time point of the one previous substrate, wherein the transfer time is required from the start of an action of removing a substrate from the cassette to the end of an action of delivering the substrate to an exchanger.

A substrate processing system, includes: a measurement device configured to measure errors of substrates after the substrates are subjected to processing of a first process by a first processing apparatus; a transfer device configured to transfer the substrates between apparatuses including the first processing apparatus, a second processing apparatus that performs processing of a second process after the first process, and the measurement device; a map creating device configured to create an error map indicating a distribution of the errors on the substrates; and an evaluation device configured to calculate an evaluation value indicating a degree of importance of the errors based on the error map, wherein the evaluation device instructs the transfer device on a transfer destination of the substrates subjected to the first process according to a determination result as to whether or not the evaluation value is equal to or larger than a predetermined first threshold value.

In a case where the target article is transported between areas, a management control unit executes path setting control, a first area control unit executes first area transport control, a connection control unit executes connecting transport control, and a second area control unit executes second area transport control. With the path setting control, an overall path from a departure point to a destination point is set on the basis of transportation status information of a first area transport facility, a second area transport facility, and a plurality of connecting transport facilities. With the second area transport control, a partial path from a second transfer position of a target connecting transport facility to the destination point is set on the basis of transportation status information of the second area transport facility.