Embodiments disclosed herein generally include annealing chambers. The annealing chambers allow for high throughput without sacrificing wafer-to-wafer and within wafer uniformity. The annealing chamber includes a transport system, a substrate carrier, and a plurality of thermal sources. The transport system is magnetically coupled to the substrate carrier. The transport system moves the substrate carrier along a path. A substrate supported by the substrate carrier is annealed by the thermal sources. The annealing chamber described herein allows for a higher throughput of substrate (alternatively referred to as a wafer) annealing compared to furnace annealing chambers.

A pick-up device has a caves. A first magnetic force is capable of attracting micro-devices to move toward the caves of the pick-up device. The pick-up device is disposed on a pick-up roller, and the pick-up roller drives the caves of the pick-up device to move relative to the micro-devices. Given that the first magnetic force is provided, the pick-up device compresses the micro-devices, so that the micro-devices are fitted in place the micro-devices into the caves of the pick-up device, wherein a shape of the caves is the same as a shape of the micro-devices. The micro-devices are transferred from the caves of the pick-up device to a receiving device.

A method of transporting a plurality of sheet-like members containing a magnetic material includes a first step of placing one of the members on an endless belt, and a second step of releasing the member from a portion of the endless belt which is moved and folded back along a roller. The endless belt includes a first magnetic force generating portion that generates first magnetic force, and a second magnetic force generating portion that generates second magnetic force that is stronger than the first magnetic force. In the first step, the member is placed on the belt, such that a first portion of the member containing the magnetic material is located in the first magnetic force generating portion, and a second portion of the member containing the magnetic material and located rearward of the first portion in a conveying direction is located in the second magnetic force generating portion.

A transfer system used in a semiconductor manufacturing device in which a moving body having a magnet moves while being levitated from a floor by a magnetic force to transfer a substrate to a processing module for processing the substrate is provided. The transfer system comprises: a through-hole forming member having a through-hole formed in a vertical direction; a blocking member that blocks the through-hole to form the floor; a housing of which bottom wall serving as the floor and of which inside is evacuated to create a vacuum atmosphere in a moving area of the moving body that is formed on the floor; a plurality of electromagnets provided inside the floor to move the moving body; and magnetic sensors disposed inside the floor at positions overlapping the through-hole forming member and the blocking member in plan view, and configured to detect a magnetic force of the magnet.

Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber can include a first magnetic levitation track having a face-up orientation and a second magnetic levitation track spaced from the first magnetic levitation track and having a face-down orientation. The system can include substrate carriers that move along the first and second magnetic levitation tracks where each substrate carrier includes a magnet on a bottom portion to interact with a first magnetic field and a second magnet on a top portion to interact with a second magnetic field. The system also can include at least one lift pin assembly to move the substrate carriers in a vertical direction between the first and second magnetic levitation tracks.

A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.

There is provided a substrate processing system comprising: a plurality of modules including a processing chamber in which a substrate is held and processing is performed on the substrate; a transfer chamber to which the plurality of modules are connected; a substrate transfer device provided inside the transfer chamber, for transferring the substrate to the plurality of modules and taking out the substrate from the plurality of modules; and a controller. The substrate transfer device includes a first transfer unit and a second transfer unit, each of which places thereon the substrate and is linearly movable and swivelable independently and freely over a surface of the transfer chamber, and the controller controls the substrate transfer device such that a substrate replacement operation is performed from one module to another module among the plurality of modules by moving the first transfer unit and the second transfer unit concurrently in parallel.

The invention relates to a transport apparatus for transferring a sample between two devices. The transport apparatus comprises a transport tube provided with a carrier for holding a sample. The carrier is movable within said transport tube along a length thereof. The transport apparatus further comprises an actuator tube extending substantially next to said transport tube and which is provided with an actuator element that is movable within said actuator tube. Said actuator element comprises a first magnet part, and said sample carrier is provided with a second magnet part, wherein said first magnet part and said second magnet part are configured such that movement of the sample carrier through said transport tube is linked to movement of the magnetic actuator element through the actuator tube. In this way, movement of the magnetic actuator causes movement of the sample carrier, allowing safe, reliable and protected transport of the sample.

The disclosure relates to a conveyor device which is designed to simultaneously convey a plurality of payloads, in particular wafers. Each payload is paired with a transport body (mover) which can be moved and positioned in a floating manner over a surface of a stator, and the transport body is moved and positioned preferably with respect to all six degrees of freedom. The transport body and the paired payloads are received in a sealed transport chamber, the stator is arranged below the sealed transport chamber, the floor of the transport chamber is arranged above the surface of the stator and parallel thereto, and the housing of each transport body is likewise preferably sealed.

Disclosed is a transfer plate set. More particularly, the transfer plate set serves to guide a substrate transfer unit to move, the transfer plate set including a first plate part; and a second plate part inserted and fixed to the first plate part, wherein the first plate part includes a first base; a first guide member disposed on the first base; and a receiving part formed to be stepped on a side facing the second plate part, and wherein the second plate part includes a second base; a second guide member disposed on the second base; and an insertion part formed to protrude from a side facing the first plate part and provided to be inserted into the receiving part.