H01L21/67715

MAGNETIC TRANSFER APPARATUS AND FABRICATION METHOD OF THE SAME
20240222173 · 2024-07-04 ·

A magnetic transfer apparatus includes: a magnetomotive force source providing magnetic flux, a first magnetic flux distribution circuit connected to one end of the magnetomotive force source, having a single input terminal and a plurality of output terminals, and distributing the magnetic flux, and a second magnetic flux distribution circuit connected to the other end of the magnetomotive force source, having a single output terminal and a plurality of input terminals, and collecting the distributed magnetic flux. The output terminals of the first magnetic flux distribution circuit are disposed to be adjacent to each other to form a pair with the input terminals of the second magnetic flux distribution circuit.

Transport container and transfer method for stored object
10304712 · 2019-05-28 · ·

A transport container, in which a stored object is taken in and out through an opening on a side surface, includes a positioner that projects upward from an outside of a placement surface of the stored object on a storage portion where the stored object is placed, and a regulator movable between an advanced position, in which the regulator is advanced to above the stored object placed on the placement surface to regulate upward movement of the stored object, and a retracted position, in which the regulator is retracted from above the stored object to allow upward movement of the stored object.

Method and apparatus for improved direct transfer of semiconductor die

A system to effectuate improved transfer of semiconductor die. A first frame secures a first substrate having the semiconductor die. A second frame secures a second substrate adjacent the first substrate. A needle is disposed adjacent to the first frame. The needle includes: a longitudinal surface extending in a direction toward the second frame, and a base end having a cross-sectional dimension being based, at least in part, on a cross-sectional dimension of the semiconductor die. A needle actuator is operably connected to the needle and is configured to actuate the needle such that, during the transfer operation, when the first substrate is secured in the first frame and the second substrate is secured in the second frame, the needle presses the semiconductor die into contact with the second substrate so as to transfer the semiconductor die onto the second substrate.

METHOD AND APPARATUS FOR LIGHT DIFFUSION
20190139945 · 2019-05-09 ·

A display apparatus includes a substrate and a plurality of LEDs. Each LED is attached to the substrate via conductive pads on a side of the LED. A diffuser having light diffusing characteristics is aligned with the plurality LEDs against a surface of the substrate. The diffuser is aligned so as to nest around at least one LED of the plurality of LEDs.

Vehicle
20190122910 · 2019-04-25 ·

A vehicle includes one or more travel portions each configured to travel along a rail track, a travel controller configured to perform an image recognition to determine a shape of a portion of the rail track based on an image captured by an imaging device supported by the vehicle and to control the one or more travel portions based on a result of the image recognition, an information obtaining portion configured to obtain position information of each of a plurality of locations that the vehicle travels past as a result of traveling along the rail track, and to obtain the order in which the vehicle travels past such plurality of locations, and memory configured to store information obtained by the information obtaining portion.

SUBSTRATE TRANSFER DEVICE, TRANSFER METHOD AND PHOTOLITHOGRAPHY APPARATUS
20190109028 · 2019-04-11 ·

A substrate transfer device and method as well as a photolithography apparatus are disclosed. The device includes a motion platform and a plurality of transfer stages which are arranged side-by-side along a first direction are configured to transfer substrates in a second direction that is perpendicular to the first direction. The motion platform includes a base table and a plurality of motion tables in movable connection with the base table. Each of the transfer stages is connected to, and movable in the first direction with, a corresponding one of the motion tables. A pre-alignment assembly for pre-alignment and positional adjustments of the substrates is provided on the motion platform and on the transfer stages. When one of the transfer stages is unloading a first substrate, another one of the transfer stages receives a second substrate and effectuates its first- and second-directional pre-alignment with the aid of the pre-alignment assembly.

Apparatus for direct transfer of semiconductor devices with needle retraction support

An apparatus, for attaching a semiconductor device die to a circuit substrate, includes an elongated rod to press a holding substrate carrying the semiconductor device die into a position at which the semiconductor device die attaches to the circuit substrate; and a support including a base portion having a hole via which the elongated rod passes when actuated to press the holding substrate.

Method and apparatus for continuous substrate cassette loading

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module is disclosed that includes a loading station for two or more substrate cassettes, a first lane comprising a first conveyor that is substantially aligned with one of the two or more substrate cassettes and a conveyor system, a second lane comprising a second conveyor that is substantially aligned with another of the two or more substrate cassettes and positioned in a spaced-apart relation relative to the first lane, and a lateral transfer module positioned between the first lane and the second lane that is adapted to move substrates from the second lane to the first lane.

System and method for high throughput work-in-process buffer
10177020 · 2019-01-08 · ·

A buffer system for a semiconductor device fabrication tool includes one or more retractable shelves, one or more sliding assemblies positionable above the one or more load ports of the semiconductor device fabrication tool, and one or more lifting assemblies. The one or more retractable shelves are configured to support sealable containers. The one or more sliding assemblies are configured to receive the sealable containers and are further configured to transport the sealable containers to one or more positions beneath the one or more retractable shelves. The one or more lifting assemblies are configured to transport the sealable containers between any two of the group including one or more retractable shelves, the one or more sliding assemblies, and the one or more load ports.

APPARATUS FOR TRANSPORTATION OF A SUBSTRATE CARRIER IN A VACUUM CHAMBER, SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR TRANSPORTATION OF A SUBSTRATE CARRIER IN A VACUUM CHAMBER
20190006216 · 2019-01-03 ·

An apparatus for transportation of a substrate carrier in a vacuum chamber is provided. The apparatus includes a first track providing a first transportation path for the substrate carrier, and a transfer device configured for contactlessly moving the substrate carrier from a first position on the first track to one or more second positions away from the first track. The one or more second positions include at least one of a position on a second track and a process position for processing of a substrate. The transfer device includes at least one first magnet device configured to provide a magnetic force acting on the substrate carrier to contactlessly move the substrate carrier from the first position to the one or more second positions.