A temporary storage system includes a travel rail having first rails and second rails, the first rails and the second rails being disposed in a grid pattern on a same plane and disposed to surround a transfer port for receiving an article in a two-dimensional view; a vehicle having a travel part and a transfer part including an elevator; and storages each configured to store the article, in which the travel rail is disposed such that the vehicle is accessible to a stop position where the transfer part is disposed immediately above the transfer port from a side with the storage for the transfer port and the vehicle is accessible to another stop position where the transfer part is disposed immediately above the storage.

A transport system includes a transport vehicle that transports an article, and a transport controller that controls the transport vehicle based on a host transport instruction received from a host controller. The transport controller includes a transport instructor which, in accordance with a host transport instruction, provides the transport vehicle with a transport instruction to transport an article at a pickup point to an unloading point, an overwriting processor which, in accordance with a host cancellation instruction to cancel the host transport instruction received from the host controller, overwrites the transport instruction provided to the transport vehicle with a move instruction which instructs to travel to a predetermined position and not to unload at the predetermined position, and provides the overwritten instruction to the transport vehicle, and a completion reporter which, upon the overwriting processor completing the overwriting, transmits to the host controller a cancellation completion report indicating the completion of the host cancellation instruction.

A transport system includes first and second intrabay overhead tracks, first and second interbay overhead tracks, first and second storages, first and second delivery ports, first and second cranes including first and second runners that run along the first and second intrabay overhead tracks, respectively, first and second masts, and first and second transferors, and an overhead transport vehicle including a runner that runs along the first and second intrabay overhead tracks, a holder, a lifting driver, and a lateral extender.

A stocker is disposed above a processing device and includes: a plurality of shelves provided in multiple stages in an up-down direction, to place articles thereon; and a crane to place an article on the shelves or take out an article placed on the shelves. The shelves include: a carry-in/out port used for an overhead transport vehicle to place an article thereon; and storage shelves used for the crane to place an article thereon. The carry-in/out port has a vertical dimension that allows a grip of the overhead transport vehicle to place the article from above. More storage shelves are provided than the carry-in/out port and are provided to have a smaller vertical dimension than that of the carry-in/out port. The crane places an article on the carry-in/out port onto the storage shelves or place an article on the storage shelves onto the carry-in/out port by a transfer device.

A transport system includes a track, transport vehicles, an area controller, buffers, and a host controller. The area controller, when a number of the transport vehicles present within a control area is a predetermined number and when receiving a first transport command to convey an article from a transfer port to a transport destination outside the control area from the host controller, stores the first transport command and transmits a report that the first transport command is not able to be assigned to the transport vehicle to the host controller. The host controller, when receiving the report, when the buffer is present, transmits a command to delete the stored first transport command to the area controller, generates a second transport command to convey the article from the transfer port to the buffer, and transmits the second transport command to the area controller.

A transport system includes: an image capturer included in a transport vehicle; a positional deviation detector that detects a positional deviation between a pre-correction position at a time when the article is placed on a reference transfer destination and a reference placement position; a corresponding relationship calculator that finds a pixel deviation between a pre-correction image and a post-correction image and calculates an actual deviation amount per unit pixel, the pre-correction image being captured at an initial position of the transport vehicle by the image capturer, and the post-correction image being captured by the image capturer at a position of the transport vehicle deviated by the positional deviation; and the correction amount calculator that finds a pixel deviation between the post-correction image and a transfer destination image captured of another transfer destination and calculates a correction amount from the pixel deviation and the actual deviation amount per unit pixel.

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

A conveyance system for conveying a workpiece to each of a plurality of processing apparatuses includes a conveyance passage disposed in a space directly above one processing apparatus of the plurality of processing apparatuses, an automated conveying vehicle for traveling on the conveyance passage, the automated conveying vehicle including a workpiece storage member having a housing space for housing a workpiece therein, a traveling member having a storage space for storing the workpiece storage member therein, a traveling mechanism mounted on the traveling member, a lifting and lowering mechanism disposed in the traveling member for lifting and lowering the workpiece storage member while suspending the workpiece storage member from above, and a receiver for receiving control signals.

A conveyance system for conveying a workpiece to each of a plurality of processing apparatuses includes a conveyance passage, an automated conveying vehicle for travelling on the conveyance passage, the automated conveying vehicle including a workpiece storage member, travelling mechanisms, and a receiver, a stock unit including a storage member holding base and a receiver, and a storage member conveying unit for conveying the workpiece storage member between a region of the conveyance passage above the stock unit and the storage member holding base or between a region of the conveyance passage above the processing apparatus and the inside of the processing apparatus.

A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.