A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.

In an embodiment a system includes: a wafer store comprising a wafer configured for processing by a semiconductor processing tool; a cart configured to transport the wafer from the wafer store along a predetermined path; a robotic arm, the robotic arm configured to: read wafer data from the wafer store, transport the wafer from the wafer store to the cart, send the wafer data to the cart, wherein the cart is configured to transport the wafer to a location in response to the wafer data.

An automated guided vehicle with a multistage loading structure includes a vehicle body, and a loader in the vehicle body and operative to load articles in a multistage manner. The loader has a loading unit that is positioned between the articles loaded in the multistage manner and separately loads the articles. The loading unit moves up and down.

A conveyance system for conveying a workpiece to each of a plurality of processing apparatuses includes a track extending over the plurality of processing apparatuses and fixed to the upper portions of the processing apparatuses; an automated conveying vehicle for traveling on the track, the automated conveying vehicle including a storage member having a housing space for housing the workpiece therein, a traveling member coupled from above to the storage member, a traveling mechanism mounted on the traveling member, a lifting and lowering mechanism mounted on the traveling member, for lifting and lowering the storage member while suspending the storage member from above, and a receiver for receiving control signals.

A transport vehicle system includes: a plurality of transport vehicles that transport articles; a main track, and a plurality of branch tracks branching off from the main track at different positions of the main track; and a controller that, with each of the branch tracks and a part of the main track taken as a reciprocation traveling track, causes each of the plurality of transport vehicles to reciprocate in the reciprocation traveling track and transport an article, and when a transport vehicle is placed on any of the reciprocation traveling tracks, the controller causes a transport vehicle that is reciprocating on a reciprocation traveling track in front of the reciprocation traveling track of placement destination in the extending direction, to retreat to the branch track in the reciprocation traveling track and thereafter causes passage of the transport vehicle to be placed through the main track in the reciprocation traveling track.

A conveyance system for conveying a workpiece to each of a plurality of processing apparatuses includes a track extending over the plurality of processing apparatuses and fixed to the upper portions of the processing apparatuses; an automated conveying vehicle for traveling on the track, the automated conveying vehicle including a storage member having a housing space for housing the workpiece therein, a traveling member coupled from above to the storage member, a traveling mechanism mounted on the traveling member, a lifting and lowering mechanism mounted on the traveling member, for lifting and lowering the storage member while suspending the storage member from above, and a receiver for receiving control signals.

Proposed are a transport vehicle which can prevent the risk of collision of the transport vehicle and minimize damage to parts of the transport vehicle in the event of the collision, and an article transport system including the transport vehicle. The transport vehicle for transporting an article in a manufacturing factory includes a driving unit which drives along a driving rail, and a hoist unit which is located under the driving unit and supports the article. The hoist unit includes a frame, and a pair of tail plates which is provided on a rear surface of the frame and protrudes rearward.

A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance tool including a first track and at least one maintenance crane on the first track, a rectangular zone overlapping with the load port, a plurality of first sensors on the first track and at corners of the rectangular zone configured to detect a location of the maintenance crane and generate a first location date, a transporting tool including a second track and a OHT vehicle on the second track, at least a second sensor on the OHT vehicle and configured to generate a second location data, at least a third sensor on the load port, and a control unit configured to receive the first location data and the second location data, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.