A technique enabling a stable resist pattern forming process, when substrate processing apparatuses that perform a resist coating process separately from a developing process. A wafer having been heated after a resist coating process in a first substrate processing apparatus is also heated before an exposure process in a second substrate processing apparatus. Thus, even when amine in an atmosphere adheres to the wafer while it is being transported from the first substrate processing apparatus to the second substrate processing apparatus, the amine scatters by the heating process. At least one of a heating time and a heating temperature is adjusted based on a substrate rest time which includes a period of time between a time point at which a FOUP 10 is unloaded from the first substrate processing apparatus and a time point at which the FOUP 10 is loaded into the second substrate processing apparatus.

A method comprises transporting semiconductor devices between a global system and a local system, wherein an input terminal of the local system is connected to the global system, and wherein the global system comprises a plurality of stockers and a global transportation system connected to the stockers and the local system comprises a first service area, an internal buffer, a second service area and a plurality of lithography apparatuses and transporting a semiconductor device from the first service area to a lithography apparatus in the second service area.

A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.

A storage system includes an overhead stocker including an overhead crane track, shelving in which tiers of storages to accommodate articles therein are arranged vertically, and a crane to travel along the overhead crane track and transfer an article between the tiers of storages, an overhead transport vehicle system to perform receiving or delivering of an article from or to a predetermined transfer destination, and a transporter to vertically transport an article between the overhead stocker and the overhead transport vehicle system, the overhead transport vehicle system being provided below a lower end of the overhead stocker.

Article transport vehicles have, as operation states, a first state of traveling toward a transport destination that is a destination set for receiving an article or delivering an article, and a second state in which a transport destination has not been set. A controller divides the entirety of a travelable route into a plurality of set areas and executes imbalance reduction control to arrange standby transport vehicles such that imbalance of the densities of standby transport vehicles present in the areas is within a predetermined range, the standby transport vehicles being article transport vehicles in the second state.

An apparatus in an overhead transport system is provided. The apparatus includes a hanger feature configured to be hung from a ceiling, a plate-like structure having a top surface and a bottom surface, the bottom surface being rotatably coupled to the hanger feature, and at least one pair of rail members mechanically coupled to the bottom surface of the plate-like structure by way of a plurality of yoke members.

A holder includes a holder body, a holding part supported in a manner movable in a first direction relative to the holder body, and a holding part driver that drives the holding part. The holding part includes a supported portion supported by the holder body, a base extending downward from the supported portion, and an extension extending from the base in the first direction. The extension includes, on an upper surface of the extension, a mount area on which the lower surface of the handle is placeable. The extension includes a protrusion located opposite to the base across the mount area in the first direction. The protrusion protrudes upward from the mount area.

A reference cost and a variable cost are included in a link cost for setting a set route for causing a setting vehicle to travel to a destination on a travelable route. A controller obtains an adjusted variable cost by adjusting a variable cost using a priority adjustment value set higher as a priority for arriving more quickly at a destination decreases, determines a link cost for each link in a candidate route, which is a candidate for a set route for a setting vehicle, based on the adjusted variable cost and the reference cost, obtains a route cost for each candidate route based on the link costs, and sets the set route based on the route costs of the candidate routes.

A traveling vehicle travels along a traveling path and includes a main body, a traveler to allow a main body to travel along the traveling path, an LED array provided at the main body to switch a display manner according to a state of the traveling vehicle, an imager to capture an image of the LED array at a traveling vehicle located ahead of the traveling vehicle, and a controller configured or programmed to acquire a state of the traveling vehicle ahead based on the display manner captured by the imager, and to control the traveler of the traveling vehicle based on the acquired state.

An article transport vehicle that travels along a traveling path is provided with an obstacle sensor that detects an obstacle that exists in a detection area, and a control unit that controls the traveling speed of the article transport vehicle based on detection information of the obstacle sensor. A non-detection area where detection of the obstacle by the obstacle sensor is not performed is set within the detectable area of the obstacle sensor, and a situation in which the non-detection area exists on a detection line that joins a part of the detection area and the obstacle sensor is defined as a specific situation. The control unit, in the specific situation, and a situation where an undetectable area in which it is not possible to detect the obstacle exists in the detection area because a shield exists in the non-detection area, reduces the speed of the article transport vehicle to a second traveling speed slower than the first traveling speed.