A substrate processing tool includes a wafer transport assembly that includes a first wafer transport module and extends along a longitudinal axis of the substrate processing tool. A plurality of process modules includes a first process module and a second process module arranged on opposite sides of the longitudinal axis of the substrate processing tool. Outer sides of the first wafer transport module are coupled to the first and second process modules, respectively. A service tunnel defined below the wafer transport assembly extends along the longitudinal axis from a front end of the substrate processing tool to a rear end of the substrate processing tool below the wafer transport assembly.

A travelling vehicle system includes travelling vehicles and a controller. The controller includes a storage that stores a last permitted travelling vehicle, to which a passage permission is transmitted lastly and the passage permission for which is not canceled, for each direction in a branching section or a merging section included in a blocking area, stores a last canceled travelling vehicle, the passage permission for which is canceled lastly, for each direction in the blocking area, and stores the travelling vehicle, to which the passage permission in a same direction in the blocking area is transmitted lastly, as a forward travelling vehicle of a travelling vehicle waiting for the permission to pass through the blocking area at the time of transmission of the passage permission to the passage-permission waiting travelling vehicle, and a determiner that determines whether to give passage permission to the travelling vehicle waiting for the permission.

A semiconductor wafer cassette warehouse transportation structure system includes a wafer cassette lift transportation structure body, a wafer cassette frame structure body, an arm structure body, an arm gripping wafer cassette structure body, and a wafer cassette warehouse structure body. The suspension support rods are suspended on a ceiling. The wafer cassette lift transportation structure body lifts the wafer cassettes to the inlet and outlet. The arm structure body grips the wafer cassettes and puts same on the tracks so that the wafer cassettes can be transported to the wafer cassette warehouse structure body to be precisely accessed. The system saves space and facilitates the access of the wafer cassettes because the wafer cassettes are stored on the wafer cassette warehouse structure body suspended on the ceiling.

The present invention provides various aspects for processing multiple types of substrates within cleanspace fabricators or for processing multiple or single types of substrates in multiple types of cleanspace environments particularly to form hardware based encryption devices and hardware based encryption equipped communication devices. In some embodiments, a collocated composite cleanspace fabricator may be capable of processing semiconductor devices into integrated circuits and then performing assembly operations to result in product in packaged form. Customized smart devices, smart phones and touchscreen devices may be fabricated in examples of a cleanspace fabricator. The assembly processing may include steps to form hardware based encryption.

A method includes: generating a contaminant distribution map by sampling an environment of a cleanroom; selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database; comparing parameters of the first fabrication tool against process utility information in a second database; and when the parameters are consistent with the process utility information, taking at least one action. The one action may include moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map; turning on a fan of the cleaning tool; stopping pod transit to the first fabrication tool; or halting production by the first fabrication tool.

A deviation amount is a difference between a first error that occurs when an article is placed on a first transfer destination by a first transport vehicle and a second error that occurs when the article is placed on a second transfer destination by the first transport vehicle. An nth error that occurs when the article is placed on an nth transfer destination other than the first transfer destination and the second transfer destination is acquired. In an mth transport vehicle other than the first transport vehicle, a stop position of an mth traveling body is corrected by the nth error and an mth-1 error occurring when the article is placed on the first reference platform, or by the nth error and an mth-2 error as well as the deviation amount, the mth-2 error occurring when the article is placed on the second reference platform.

A conveyance system includes a traveling area and a suspension traveling vehicle. The traveling area includes a grid area and a linear area. In the grid area, since first tracks are disposed side by side and second tracks are disposed side by side so that the first tracks and the second tracks intersect, the grid area includes unit blocks of the same shape or substantially the same shape surrounded by the first tracks and the second tracks. Both the first tracks and the second tracks surrounding the unit blocks are provided with an interstice that allows a supporting body to pass, and the interstice is perpendicular or substantially perpendicular to a longitudinal direction of each track. A traveling direction is the same or substantially the same as the first direction or the second direction in the linear area, and the interstice perpendicular or substantially perpendicular to the traveling direction is not provided in the linear area.

The efficiency of transporting articles is improved by smoothly delivering and receiving the articles between overhead transport vehicles traveling on different tracks. A transport system includes a first overhead transport vehicle that travels on a first overhead track; a second overhead transport vehicle that travels on a second overhead track and a third overhead track; and a first placement portion and a second placement portion that allow articles to be delivered and received between the first overhead transport vehicle and the second overhead transport vehicle. At least one of the first overhead transport vehicle, the second overhead transport vehicle, the first placement portion, and the second placement portion is provided with a rotator that rotates an article around a vertical axis.

A method of controlling a transport vehicle in an article transport system in a production factory includes checking tasks for transporting articles, searching for routes for the respective tasks for a plurality of transport vehicles, calculating expected power consumption for the respective tasks of the transport vehicles, and assigning the tasks to the transport vehicles based on the expected power consumption for the respective tasks and remaining power of the transport vehicles.

An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.