A storage apparatus, and a transporting device and a transporting method for a Front Opening Unified Pod (FOUP) are provided. The storage apparatus includes: at least two carrying bins configured to carry the FOUP; and a rotating component. The at least two carrying bins are connected to the rotating component at different positions of the rotating component. The rotating component is configured to change positions of the at least two carrying bins through rotation of the rotating component.

A processing apparatus includes a wafer cassette table, a wafer carrying-out mechanism, a wafer table, a frame housing unit, a frame carrying-out mechanism, a frame table, a tape sticking unit, a tape-attached frame conveying mechanism, a tape pressure bonding unit, a frame unit carrying-out mechanism, a reinforcing part removing unit, a ring-free unit carrying-out mechanism, and a frame cassette table. The wafer carrying-out mechanism includes a Bernoulli chuck mechanism that jets gas to the back surface of the wafer and generates a negative pressure. The gas jetted by the Bernoulli chuck mechanism is inert gas. The wafer carrying-out mechanism jets the inert gas from the Bernoulli chuck mechanism to suppress oxidation of the back surface of the wafer when the wafer is carried out.

A system includes a robot configured to transfer either one of a substrate and an edge ring within a substrate processing system, a substrate aligner configured to adjust a rotational position of either one of the substrate or the edge ring relative to an end effector of the robot, and a carrier plate configured to support the edge ring. The robot is configured to retrieve the carrier plate with the end effector, retrieve the edge ring using the carrier plate supported on the end effector, and transfer the carrier plate and the edge ring to the substrate aligner.

A storage system includes a storage device and a transfer device. The storage device includes a guide bar, a plurality of upper shelves connected to the guide bar, the plurality of upper shelves storing a material to be transferred, a plurality of lower shelves disposed under the plurality of upper shelves, the plurality of lower shelves storing the material, a plurality of guides connected to the plurality of upper shelves, and a shelf returning device connected to a selected upper shelf from among the plurality of upper shelves. The transfer device includes a body, a drive module attached to the body, the drive module moving the transfer device to be adjacent to the storage device, a handling module attached to the body, the handling module handling the material, and a shelf moving module attached to the body or the handling module, the shelf moving module contacting a selected guide from among the plurality of guides.

A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.

A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

An overhead hoist transfer system and an overhead hoist transfer. The overhead hoist transfer system includes a plurality of lower rails, a plurality of upper rail sets, and a plurality of overhead hoist transfers. The overhead hoist transfer includes a moving kit and a frame. The moving kit includes a control module, a drive wheel set, and a plurality of upper guide wheels. The control module controls the upper guide wheels to move between an upper position and a lower position. Before the overhead hoist transfer makes a turn along the lower rail and the upper rail set, the control module controls the upper guide wheels to move to the upper position or the lower position. When the plurality of upper guide wheels abut against the adjacent upper rail set, the overhead hoist transfer turns along the upper rail set.