A storage apparatus, and a transporting device and a transporting method for a Front Opening Unified Pod (FOUP) are provided. The storage apparatus includes: at least two carrying bins configured to carry the FOUP; and a rotating component. The at least two carrying bins are connected to the rotating component at different positions of the rotating component. The rotating component is configured to change positions of the at least two carrying bins through rotation of the rotating component.

A storage system includes a storage device and a transfer device. The storage device includes a guide bar, a plurality of upper shelves connected to the guide bar, the plurality of upper shelves storing a material to be transferred, a plurality of lower shelves disposed under the plurality of upper shelves, the plurality of lower shelves storing the material, a plurality of guides connected to the plurality of upper shelves, and a shelf returning device connected to a selected upper shelf from among the plurality of upper shelves. The transfer device includes a body, a drive module attached to the body, the drive module moving the transfer device to be adjacent to the storage device, a handling module attached to the body, the handling module handling the material, and a shelf moving module attached to the body or the handling module, the shelf moving module contacting a selected guide from among the plurality of guides.

A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

An overhead hoist transfer system and an overhead hoist transfer. The overhead hoist transfer system includes a plurality of lower rails, a plurality of upper rail sets, and a plurality of overhead hoist transfers. The overhead hoist transfer includes a moving kit and a frame. The moving kit includes a control module, a drive wheel set, and a plurality of upper guide wheels. The control module controls the upper guide wheels to move between an upper position and a lower position. Before the overhead hoist transfer makes a turn along the lower rail and the upper rail set, the control module controls the upper guide wheels to move to the upper position or the lower position. When the plurality of upper guide wheels abut against the adjacent upper rail set, the overhead hoist transfer turns along the upper rail set.

The present application relates to a movable buffer, an automated material handling system and a corresponding overhead hoist transfer. The movable buffer includes: an inclined track including a first end and a second end opposite to each other, wherein the second end of the inclined track is higher than the first end of the inclined track; a storage tray connected to the inclined track, wherein the storage tray is provided with a space for accommodating a front opening unified pod, the storage tray is provided with at least one opening; and a transmission mechanism, wherein the upper surface of the transmission mechanism is connected to the lower surface of the overhead buffer, the lower surface of the transmission mechanism is connected to the inclined track, and the transmission mechanism is used for driving the storage tray to slide from the first end of the inclined track to the second end.

Embodiments of the disclosure provide a system and method for adjusting an oxygen content in an FOUP. The system for adjusting the oxygen content in the FOUP includes an inflating assembly, the FOUP, a controller and a detecting assembly; the inflating assembly is connected with a gas inlet of the FOUP and configured to input an inert gas to the FOUP; the detecting assembly is connected with a gas outlet of the FOUP and configured to detect the oxygen content of the gas in the FOUP; and the inflating assembly and the detecting assembly are both connected with the controller, and the controller is configured to adjust a flow of the inert gas input from the inflating assembly to the FOUP according to the oxygen content detected by the detecting assembly.

A semiconductor fabrication facility including raceways on a ceiling of a structural construction and extending in one direction, a vehicle rail assembly coupled to the raceways, outer jig rails on outer sidewalls of the raceways and adjacent to the vehicle rail assembly, and an outer jig on the outer jig rails and configured to allow the vehicle rail assembly to move along the outer jig rails may be provided.

A dynamic routing method and apparatus for an Overhead Hoist Transport (OHT) system are disclosed. The present disclosure in some embodiments provides a dynamic routing method for an OHT system, including generating a Q table of records of at least one Q value which is a time for a vehicle to move through an edge between two adjacent nodes to a node other than the two adjacent nodes, measuring a transit time of the vehicle when assigned a destination node and passing a transit edge between a current node and next node, extracting target edges to be updated according to the transit time from a plurality of edges, and differentially updating Q values for the target edges according to distances to the transit edge partially based on the transit time, the Q values for the target edges being time values for the vehicle to move through the target edges to the destination node.