A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

An article transport facility includes a transport vehicle and a controller, and the transport vehicle includes: a drive unit; a speed detector configured to detect a traveling speed; and a distance detector configured to detect an inter-vehicle distance, which is a distance to another transport vehicle. The controller is configured to (i) refer to at least one target speed that is set in advance according to the inter-vehicle distance, and (ii) perform an inter-vehicle adjustment control to control the drive unit in such a manner as to cause the traveling speed to approach the at least one target speed, based on the traveling speed and the inter-vehicle distance, the at least one target speed includes an accelerating target speed and a decelerating target speed, and the accelerating target speed is lower than the decelerating target speed for each inter-vehicle distance.

An article transport apparatus includes a traveling portion configured to travel along a rail portion and a mounting portion configured to have a structure suspended under a traveling portion to mount articles thereon, in particular, the rail portion includes a plurality of first straight rails extending in a first direction while being arranged parallel to each other at first intervals, a plurality of second straight rails extending in a second direction perpendicular to the first direction while being arranged parallel to each other at second intervals, and a connecting rail configured to connect between the first straight rails and the second straight rails, which perpendicularly face each other, so that the traveling portion travels between the first straight rails and the second straight rails perpendicularly facing each other.

A determination section determines that a transport vehicle entered a curved zone from a straight zone based on a front-rear rotation speed difference between the rotation speed of a first rear wheel and a second rear wheel and the rotation speed of at least either a first or second front wheel. A measurement section measures a distance-to-curve, which is the distance that the transport vehicle travels from when a detector detects a detection target until when the determination section determines that the transport vehicle entered the curved zone from the straight zone. If the detector detects a curve ahead detection target while curve ahead information is stored in a storage section, a travel control section executes speed change control before or when the transport vehicle enters the curved zone.

A control system executes preliminary biasing processing including controlling a guide wheel drive unit to bias a guide wheel in a direction from a first position toward a second position while the guide wheel is at the first position and is in contact with a first-side surface of a branch guide portion from a first side in a width direction before entering a switching area, and allows the guide wheel to pass through the switching area while executing the preliminary biasing processing.

A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.

A rail-guided vehicle system connecting between vertically-spaced floors includes a descending rail to enable a travel vehicle to move downward. The descending rail has a helical structure and includes a rail in a first section where energy is generated when a brake included in the travel vehicle works and a rail in a second section where energy that has been generated when a travel vehicle traveled in the first section is consumed.

A rail-guided cart system includes a traveling rail and a traveling cart to travel along the traveling rail. The rail-guided cart system includes a measurement sensor and a diagnosis processor. The measurement sensor is fixed with respect to the traveling rail to measure vibration or sound. The diagnosis processor diagnoses a condition of the traveling cart that passed through a measurement point on the traveling rail corresponding to a location of the measurement sensor. based on measurement data measured by the measurement sensor.

Embodiments of mechanisms for charging a gas into a cassette pod are provided. A method for charging a gas into a cassette pod includes loading at least one semiconductor wafer into a housing of the cassette pod after the at least one semiconductor wafer is processed by a processing apparatus. The method also includes removing the cassette pod from the processing apparatus by a transporting apparatus to a predetermined destination. The method further includes charging a gas into an enclosure in the housing of the cassette pod from a gas supply assembly disposed on the housing.