A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.

Apparatus and methods for automatically handling die carriers are disclosed. In one example, a disclosed apparatus includes: at least one load port each configured for loading a die carrier operable to hold a plurality of dies; and an interface tool coupled to the at least one load port and a semiconductor processing unit. The interface tool comprises: a first robotic arm configured for transporting the die carrier from the at least one load port to the interface tool, and a second robotic arm configured for transporting the die carrier from the interface tool to the semiconductor processing unit for processing at least one die in the die carrier.

An article transport vehicle includes a travel body; a holding device that holds an article; and a lift device that is on the travel body, and that raises and lowers the holding device with respect to the travel body. The holding device includes: a connection portion connected to the lift device and an article support portion that supports the article; an elastic support mechanism that is between the article support portion and the connection portion, and that supports the article support portion against the connection portion while being elastic in a vertical direction, and a guide mechanism that guides the article support portion in the vertical direction with respect to the connection portion. The guide mechanism allows the article support portion to move parallel with the vertical direction with respect to the connection portion and restricts swinging of the article support portion with respect to the connection portion.

A transfer system includes a carrier and a storage shelf. The carrier transfers an object along a transfer path on or suspended from a ceiling. The storage shelf is disposed along the transfer path and stores the object transferred by the carrier. The storage shelf includes a placement portion having the object placed thereon. The placement portion moves up and down with respect to a transfer position Tat which the object is transferred between the placement portion and the carrier.

Proposed is a transport vehicle including a traveling unit being moved along a first direction, a slide unit being driven for sliding in a second direction vertical to the first direction, a hand unit ascending and descending by a hoist combined with the slide unit and gripping the goods, and a control unit controlling driving of the traveling unit for traveling or driving of the slide unit for sliding, wherein the control unit applies a filter signal to an initial slide control signal for driving for sliding and controls driving of the hand unit for sliding through a drive control signal for sliding to which the filter signal is applied, and the filter signal includes a plurality of impulse signals and an interval between the impulse signals is determined as a value corresponding to a length of the hoist in linear interpolation on pre-stored period values on a per-hoist-length basis.

A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

An apparatus for handling wafer carriers in a semiconductor fabrication facility (FAB) is disclosed. In one example, the apparatus includes: a table configured to receive a wafer carrier having a first door and operable to hold a plurality of wafers; an opening mechanism configured to open the first door of the wafer carrier; and a door storage space configured to store the first door. The apparatus may be either located on a floor of the FAB or physically coupled to a ceiling of the FAB.

A storage system includes an overhead stocker having a first overhead track, a rack including a plurality of storages arranged vertically, and a crane that travels along the first overhead track and delivers and receives an article to and from the storages; and an overhead transport vehicle system having a second overhead track provided below a lower end of the overhead stocker, and an overhead transport vehicle that travels along the second overhead track and delivers and receives an article to and from a predetermined transfer destination, wherein the first overhead track has an elevating track capable of supporting and lowering the crane that is stopped traveling at a portion deviated from the second overhead track in planar view.