A fireproof shutter includes a frame having an opening through which a transport rail for movement of a transport vehicle passes, the opening being divided into an upper opening and a lower opening based on the transport rail, an upper door mounted on the frame and configured to open and close the upper opening, and a lower door mounted on the frame and configured to open and close the lower opening.

The present application discloses a display panel conveying system and a conveying method. The display panel conveying system includes a cassette, a console, a crane, and a movable cassette conveying device, where the console has at least two sets.

A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber.

A high density, controlled integrated circuits factory having process modules occupying approximately two-thirds of the factory floor space with the remaining one-third of the factory floor space being used for servicing the process modules and for loading and unloading wafers to and from the process modules. A subfloor is provided below the factory floor to allow service lifts to travel across the factory. Service lifts can be raised to the factory floor level to service process modules. Overhead lines are also provided over the process modules to transport service items as well as wafers across the factory.

A wafer transport device is moved on a transport rail, and stopped above a load port having a top surface. A light beam is projected onto the top surface of the load port, and image of the top surface is and the light beam is captured. A position of the hoist unit of the wafer transport device is aligned with respect to a position of the load port according to the image. The hoist unit is lowered toward the load port.

A control unit that controls a transport apparatus executes selection control to select one accommodation portion as a selected accommodation portion, movement control to control the transport apparatus so as to move a transport support portion to a corresponding position, determination control to determine whether or not a detection target portion is detected by a detecting portion, transfer control to control the transport apparatus so as to transfer an article from the transport support portion to an accommodation support member, and update setting control to set the selected accommodation portion and related accommodation portions as prohibited accommodation portions if it is determined, in the determination control, that the detection target portion is not detected, and after the update setting control, the control unit again executes the selection control to newly select a selected accommodation portion, and executes the movement control so as to move the transport support portion to a corresponding position corresponding to the newly selected accommodation portion.

A first storage section includes a first support portion that supports an article and a movable support portion that movably supports the first support portion in the path width direction. A second storage section includes a second support portion whose position in a path width direction relative to a movement path is fixed, and supports the article. A space occupied by the article in a state of being supported by the second support portion is a target space, a position at which the first support portion overlaps the target space in an up-down view along an up-down direction is an overlapping position, and a position that is adjacent to a first side relative to the overlapping position and at which the first support portion does not overlap the target space in the up-down view is a non-overlapping position.

Provided is a transport vehicle system SYS1 in which: an overhead transport vehicle includes a main body, a holder, a lift driver, and a lateral extender; a port pitch P is less than the overall length VL of the overhead transport vehicle in an extending direction D; and a first portion, which is raised or lowered by the lift driver moved in a lateral direction by a lateral extender, of an overhead transport vehicle stopped at a first position P1 on a first track for transferring an article W to a first transfer location S1 is offset in the extending direction D from a second portion, which is moved in a lateral direction by means of the drive of a lateral extender, of an overhead transport vehicle stopped at a second position P2 on the second track for transferring an article W to a second transfer location S2.

A traveling vehicle system in which a traveling vehicle travels along a traveling track including a rail body to accommodate a traveling unit of the traveling vehicle and extending along a traveling path of the traveling vehicle and a power feeder positioned along an extending direction of the rail body to supply electricity to the traveling unit, includes a working track that is continuous with the traveling track and includes an opening exposing at least a portion of the traveling unit and does not have the power feeder, and a mover to move the traveling vehicle along the working track.

A transport apparatus includes a transport rail extending along a predetermined path, a transport vehicle configured to be movable along the transport rail to transport a material, and a brake unit mounted on the transport vehicle to be adjacent to the transport rail and configured to apply an eddy current braking force to the transport vehicle.