In an article transport vehicle that is able to transport a plurality of types of articles, the efficiency of operations is improved in accordance with the type of article, while suppressing an increase in the size of the article transport vehicle. If a control device determines that an article held by a holding portion is a first-type article, the control device controls the transfer mechanism so as to cause the turning mechanism to perform a turning mechanism and cause a sliding mechanism to perform a sliding operation such that operation periods of these operations do not overlap. If the control device determines that the article held by the holding portion is a second-type article, the control device controls the transfer mechanism so as to perform the turning operation and the sliding operation such that the operation periods of these operations overlap.

Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

A first carriage is provided with a support rail that supports a main body, and is configured to travel together with a second carriage that includes the main body along the first path, in a supporting state that is a state of supporting the main body, using the support rail. In a state where the first carriage is located at a connection part of the first path, which is connected to the second path, the support rail is located on an extension line of the travel rail.

A travel path of an article transport facility provided with a plurality of article transport vehicles that travel along the travel path and transport articles, and a control device that controls operation of the article transport vehicles includes a path set in an inspection area for causing a target transport vehicle designated as an inspection target from among the plurality of article transport vehicles to travel along. The target transport vehicle includes a sensor that detects behavior of the target transport vehicle during travel. The control device controls the plurality of article transport vehicles such that only the one target transport vehicle is present in the inspection area, and causes the target transport vehicle to travel in the inspection area in an inspection travel pattern prescribed in advance.

A ceiling conveyance vehicle includes a traveling wheel to roll on a track including a first track and a second track and a main body below the track and coupled to the traveling wheel. The ceiling conveyance vehicle includes a direction changer to change between a first state in which the traveling wheel rolls on the first track and a second state in which the traveling wheel rolls on the second track, with an orientation of the main body with respect to the track maintained, an article holder capable of holding an article, a hoisting-and-lowering driver to hoist and lower the article holder, a lateral slider to slidingly move the hoisting-and-lowering driver in a horizontal, linear direction, and a first rotational driver to rotationally drive the lateral slider around a first perpendicular axis with respect to the main body.

The present application discloses a display panel conveying system and a conveying method. The display panel conveying system includes a cassette, a console, a crane, and a movable cassette conveying device, where the console has at least two sets.

A ceiling traveling vehicle includes a traveler to travel along a grid-shaped track, a main body coupled to the traveler and below the track, and a detector on a rear side of a center of the main body in a traveling direction of the traveler and below the main body to apply detection light forward in the traveling direction and downward and receive reflected light of the detection light to detect an obstacle.

A system for a semiconductor fabrication facility (FAB) and operation method thereof are provided. The system includes an orientation tool and a transporting tool configured to transport at least one customized part. The orientation tool includes a port configured to receive the workpiece, a sensor configured to detect an orientation of the workpiece received in the port and a rotation mechanism configured to turn the workpiece received in the port.

A crane monitoring system includes: a first detection apparatus configured to detect a position of a crane, to send a first detection signal when the crane is located above a Front Opening Unified Pod (FOUP) load port of a semiconductor device, and to send a second detection signal when the crane leaves a space above the FOUP load port; a processing apparatus configured to generate a start control signal responsive to receiving the first detection signal, and to generate a stop control signal responsive to receiving the second detection signal; and a second detection apparatus configured to start a detection of whether there is a foreign matter between the crane and the FOUP load port after receiving the start control signal, and to stop the detection after receiving the stop control signal.

In a control method, a controller obtains equipment specifying information that specifies an equipment to which a transportable object is to be delivered, and a transport carriage obtains carriage position information indicating the position of the transport carriage. Any one of the transport carriage, a specific communication device, and the controller calculates the distance between the transport carriage and the specific communication device based on delivery position information indicating the position of a specific equipment and the carriage position information, and determines whether the distance is not more than a predetermined distance. When the distance is not more than the predetermined distance, one of the transport carriage and the specific communication device transmits, wirelessly to the surroundings, a trigger signal to start wireless communication between the transport carriage and the specific equipment, and performs wireless communication to deliver the transportable object between the transport carriage and the specific equipment.