A storage apparatus, and a transporting device and a transporting method for a Front Opening Unified Pod (FOUP) are provided. The storage apparatus includes: at least two carrying bins configured to carry the FOUP; and a rotating component. The at least two carrying bins are connected to the rotating component at different positions of the rotating component. The rotating component is configured to change positions of the at least two carrying bins through rotation of the rotating component.

A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

The present application relates to a movable buffer, an automated material handling system and a corresponding overhead hoist transfer. The movable buffer includes: an inclined track including a first end and a second end opposite to each other, wherein the second end of the inclined track is higher than the first end of the inclined track; a storage tray connected to the inclined track, wherein the storage tray is provided with a space for accommodating a front opening unified pod, the storage tray is provided with at least one opening; and a transmission mechanism, wherein the upper surface of the transmission mechanism is connected to the lower surface of the overhead buffer, the lower surface of the transmission mechanism is connected to the inclined track, and the transmission mechanism is used for driving the storage tray to slide from the first end of the inclined track to the second end.

A fixing device that fixes a lower end portion of a suspension belt to a holding portion is provided with a shaft-like portion with an axial direction aligned with a horizontal direction; a fixing portion where the lower end portion of the suspension belt is fixed is provided on an outer circumferential surface of the shaft-like portion; a region of the outer circumferential surface on one side of a virtual vertical surface that runs through an axial center of the shaft-like portion is defined as a first region and a region of the outer circumferential surface on the other side of the virtual vertical surface is defined as a second region; the fixing portion is provided in the first region; and the suspension belt extending from the fixing portion is disposed running through a lowest portion of the outer circumferential surface and running along the second region and upward.

A semiconductor manufacturing apparatus, including a chip supply module used for providing a plurality of chips; a load plate supply module including a load plate and a load-plate motion platform used for holding the load plate; a chip transfer-loading module including a chip transfer-loading platform used for suctioning chips. The chip transfer-loading platform is used at a first position for transferring chips from the chip supply module. The chip transfer-loading platform carries the chips to a second position to bond the chips onto a load plate to form a bonding sheet. A packaging module is used for packaging the bonding plate on the load-plate motion platform to form a packaged chip.

Disclosed is an article transferring apparatus, including: a travel rail provided along a ceiling of a manufacturing line in which processing devices are continuously disposed; and a transferring unit device traveling on the travel rail and sending and receiving an article to and from a mounting place of the processing device, in which the transferring unit includes: a vehicle traveling along the travel rail; a vehicle main body connected to the vehicle and providing loading parts on which articles are loaded; a hoist module installed in the vehicle main body and capable of exchanging the article with the mounting place and each of the loading parts; and a horizontal moving member for horizontally moving the hoist module in the vehicle main body so that the hoist module is located on any one of the loading parts, and the loading parts have a straight arrangement in which articles are loaded in a line along a traveling direction of the vehicle or a rhombic arrangement in which articles are loaded in all directions around a central opening through which articles enter and exist.

An embodiment of the present disclosure aims to provide a logistics system capable of preventing congestion of transport vehicles in a specific section of a fabrication facility. According to the present disclosure, a logistics system in a fabrication facility includes a stocker equipment that is located near a central passage and stores an article, and a rail that provides a travel path of a transport vehicle that loads and unloads the article to the stocker equipment. The stocker equipment includes a load port disposed on a side opposite to the central passage and a rack that provides a space for storing the article. The rail includes a central rail formed along the central passage and a branch rail that is branched from the central passage and formed along the periphery of the load port.

Provided are an alignment jig, a side track buffer system including the same, and an alignment method using the same. The alignment jig includes a horizontal jig fixed to a bottom plate of a side track buffer to extend in a horizontal direction to a lower portion of the transfer rail, and a vertical jig fixed to the transfer rail to extend downward in a vertical direction so as to be adjacent to a top surface in the horizontal direction. A separation distance between an intersection point of the vertical jig and the horizontal jig and a central portion of the bottom plate is detected as a buffer separation distance, and a buffer frame is horizontally moved automatically or manually to allow the buffer separation distance to match a reference separation distance, so that the side track buffer is installed in an accurate position.