A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

A reticle pod is provided. The reticle pod includes a container and a fluid regulating module mounted to the container. The fluid regulating module includes a first cap, a second cap and a sealing film. The first cap and the second cap are connected to each other. A flowing path is formed between the first cap and the second cap for allowing a fluid passing through the fluid regulating module. The sealing film is positioned between the first cap and the second cap and configured for regulating a flow of the fluid passing through the flowing path.

There is provided a technique that includes at least one load port capable of mounting a substrate storage container that stores a substrate, a controller configured to be capable of performing: a switching control to switch a first function of using the at least one load port to load or unload the substrate storage container and a second function of mounting the substrate storage container on the at least one load port; and an erroneous operation prevention control to execute an erroneous operation prevention operation to the substrate storage container arranged on the at least one load port according to use modes associated with the first function and the second function; and a process chamber configured to process the substrate.

A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.

Cassette lid opening device for a semiconductor substrate processing apparatus comprising a housing, a door assembly, a transport mechanism, and at least one suspension. The housing has at least one wall with an associated wall opening. The door assembly comprises at least one door plate configured for substantially closing off the associated wall opening of the at least one wall. The transport mechanism includes a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall. The at least one suspension is arranged between the at least one door plate and the transport mechanism. The at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall.

An illustrative embodiment disclosed herein is an apparatus including a first loading tray configured to couple to a first wafer holding device holding a plurality of wafers. The first wafer holding device includes a first opening. The apparatus includes a second loading tray configured to couple to a second wafer holding device. The second wafer holding device includes a second opening. The apparatus includes a first motor coupled to the first loading tray and configured to rotate the first wafer holding device until the first opening faces the second opening to allow transfer of the plurality of wafers from the first wafer holding device to the second wafer holding device.

A position detection and determination device and a position calibration device and method are provided. The position detection and determination device includes a standard positioning pin position limiting component configured to limit standard position information of a positioning pin of a load port of a silicon wafer pod; a positioning pin position detecting component configured to detect real-time position information of the positioning pin of the load port of the silicon wafer pod; and a determining module configured to obtain the standard position information and the real-time position information, and determine whether the position of the positioning pin of the load port of the silicon wafer pod is accurate or not according to the standard position information and the real-time position information.