Disclosed is a vertical device, an ESD protection device having the vertical device, and a method for manufacturing the vertical device. The vertical device includes a forward diode which is formed by a semiconductor substrate and an epitaxial semiconductor layer, and a reverse Schottky barrier between an anode metal and the epitaxial semiconductor layer. The vertical device has a vertical current path from a second electrode to a first electrode, and a lateral current distribution at least partially surrounded and limited by the reverse Schottky barrier. The reverse Schottky barrier reduces the parasitic capacitance of the diode at high voltages, thereby increasing the response speed of the ESD protection device at high voltages.

A monolithic, vertical, planar semiconductor structure with a number diodes having different intrinsic regions is described. The diodes have intrinsic regions of different thicknesses as compared to each other. In one example, the semiconductor structure includes an N-type silicon substrate, an intrinsic layer formed on the N-type silicon substrate, and a dielectric layer formed on the intrinsic layer. A number of openings are formed in the dielectric layer. Multiple anodes are sequentially formed into the intrinsic layer through the openings formed in the dielectric layer. For example, a first P-type region is formed through a first one the openings to a first depth into the intrinsic layer, and a second P-type region is formed through a second one of the openings to a second depth into the intrinsic layer. Additional P-type regions can be formed to other depths.

A diode pack comprises a plurality of diodes seated in an assembly within a housing. The diode pack also includes a plurality of radial studs extending from an axial end of the housing relative to an axis of rotation extending through the housing. Each of the radial studs is electrically connected to a respective diode within the assembly. The diode pack further includes a center stud captured within the housing between the assembly and the housing and along the axis of rotation. A method of making a diode pack includes forming a housing of an electrically insulate material, removing a portion of the housing along an axis of rotation of the housing, mounting a center stud in the housing where the portion was removed, and assembling an assembly of diodes into the housing.

A TVS circuit having a first diode with a cathode coupled to a first terminal and an anode coupled to a first node. A second diode has an anode coupled to a second node and a cathode coupled to a third node. A third diode is coupled between the first node and second node. A fourth diode is coupled between the first node and third node. A fifth diode is coupled between the second node and a second terminal. A sixth diode is coupled between the second terminal and the third node. A seventh diode can be coupled between the second terminal and an intermediate node between the fifth diode and sixth diode. The first diode is disposed on a first semiconductor die, while the second diode is disposed on a second semiconductor die. Alternatively, the first diode and second diode are disposed on a single semiconductor die.

Vertical etch heterolithic integrated circuit devices are described. A method of manufacturing NIP diodes is described in one example. A P-type substrate is provided, and an intrinsic layer is formed on the P-type substrate. An oxide layer is formed on the intrinsic layer, and one or more openings are formed in the oxide layer. One or more N-type regions are implanted in the intrinsic layer through the openings in the oxide layer. The N-type regions form cathodes of the NIP diodes. A dielectric layer deposited over the oxide layer is selectively etched away with the oxide layer to expose certain ranges of the intrinsic layer to define a geometry of the NIP diodes. The intrinsic layer and the P-type substrate are vertically etched away within the ranges to expose sidewalls of the intrinsic layer and the P-type substrate. The P-type substrate forms the anodes of the NIP diodes.

The present disclosure provides embodiments of semiconductor devices. A semiconductor device according to the present disclosure include an elongated semiconductor member surrounded by an isolation feature and extending lengthwise along a first direction, a first source/drain feature and a second source/drain feature over a top surface of the elongated semiconductor member, a vertical stack of channel members each extending lengthwise between the first source/drain feature and the second source/drain feature along the first direction, a gate structure wrapping around each of the channel members, an epitaxial layer deposited on the bottom surface of the elongated semiconductor member, a silicide layer disposed on the epitaxial layer, and a conductive layer disposed on the silicide layer.

A diode pack comprises a plurality of diodes seated in an assembly within a housing. The diode pack also includes a plurality of radial studs extending from an axial end of the housing relative to an axis of rotation extending through the housing. Each of the radial studs is electrically connected to a respective diode within the assembly. The diode pack further includes a center stud captured within the housing between the assembly and the housing and along the axis of rotation. A method of making a diode pack includes forming a housing of an electrically insulate material, removing a portion of the housing along an axis of rotation of the housing, mounting a center stud in the housing where the portion was removed, and assembling an assembly of diodes into the housing.

A number of diode limiter semiconductor structures are described. The diode limiters can include a hybrid arrangement of diodes with different intrinsic regions, all formed over the same semiconductor substrate. In one example, a diode limiter includes a first diode having a first doped region formed to a first depth into an intrinsic layer of a semiconductor structure, a second diode having a second doped region formed to a second depth into the intrinsic layer of the semiconductor structure, and at least one passive component. The first diode includes a first effective intrinsic region of a first thickness, the second diode includes a second effective intrinsic region of a second thickness. The first thickness is greater than the second thickness. The passive component is over the intrinsic layer and electrically coupled as part of the diode limiter.

A transient voltage suppressor (TVS) device includes a MOS-triggered silicon controlled rectifier (SCR) as the high-side steering diode and a silicon controlled rectifier (SCR) for the low-side steering diode. In one embodiment, the MOS-triggered SCR includes alternating p-type and n-type regions and a diode-connected MOS transistor integrated therein to trigger the silicon controlled rectifier to turn on. In one embodiment, the SCR of the low-side steering diode includes alternating p-type and n-type regions where the p-type region adjacent the n-type region forming the cathode terminal is not biased to any electrical potential.

An apparatus comprises a conductive structure, another conductive structure, and a laminate spacer structure interposed between the conductive structure and the another conductive structure in a first direction. The laminate spacer structure comprises a dielectric spacer structure, another dielectric spacer structure, and an additional dielectric spacer structure interposed between the dielectric spacer structure and the another dielectric spacer structure. The additional dielectric spacer structure comprises at least one dielectric material, and gas pockets dispersed within the at least one dielectric material. Additional apparatuses, memory devices, electronic systems, and a method of forming an apparatus are also described.