Patent classifications
H01L27/101
Stack of horizontally extending and vertically overlapping features, methods of forming circuitry components, and methods of forming an array of memory cells
A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures. Sacrificial material that is elevationally between the lines is at least partially removed in the primary and end portions laterally between the horizontally elongated openings. Other aspects and implementations are disclosed.
Capacitive units and methods of forming capacitive units
Some embodiments include a capacitive unit having two or more capacitive tiers. Each of the capacitive tiers has first electrode material arranged in a configuration having laterally-extending first segments and longitudinally-extending second segments. The first and second segments join at intersection-regions. The first electrode material of the first and second segments is configured as tubes. The capacitive tiers are together configured as a stack having a first side. The first electrode material caps the tubes along the first side. Capacitor dielectric material lines the tubes. Second electrode material extends into the lined tubes. Columns of the second electrode material extend vertically through the capacitive tiers and are joined with the second electrode material within the lined tubes. A conductive plate extends vertically along the first side of the stack and is directly against the first electrode material. Some embodiments include methods of forming integrated assemblies.
Array of Cross Point Memory Cells and Methods of Forming an Array of Cross Point Memory Cells
A method of forming an array of cross point memory cells comprises using two, and only two, masking steps to collectively pattern within the array spaced lower first lines, spaced upper second lines which cross the first lines, and individual programmable devices between the first lines and the second lines where such cross that have an upwardly open generally U-shape vertical cross-section of programmable material laterally between immediately adjacent of the first lines beneath individual of the upper second lines. Arrays of cross point memory cells independent of method of manufacture are disclosed.
CAPACITOR STRUCTURE WITH CORRELATED ERROR MITIGATION AND IMPROVED SYSTEMATIC MISMATCH IN TECHNOLOGIES WITH MULTIPLE PATTERNING
Capacitor arrays and methods of operating a digital to analog converter are described. In an embodiment, a capacitor array includes a unit capacitor (Cu) structure characterized by a unit capacitance value, a plurality of different super-unit capacitor structures, and a plurality of different sub-unit capacitor structures, each different sub-unit capacitor structure having a different capacitance defined by a division of the unit capacitance value.
ELECTROSTATIC PROTECTION CIRCUIT, ARRAY SUBSTRATE AND DISPLAY APPARATUS
There are provided an electrostatic protection circuit, an array substrate, and a display apparatus. The electrostatic protection circuit includes: at least one first transistor and at least one second transistor. Each of the first transistors has a gate and a second electrode both connected to an electrostatic protection line, and a first electrode connected to a signal line; and each of the second transistors has a gate and a second electrode both connected to the signal line, and a first electrode connected to the electrostatic protection line. One resistor is connected in series between a gate and a second electrode of at least one transistor in the electrostatic protection circuit.
THREE-DIMENSIONAL MEMORY DEVICE HAVING SEMICONDUCTOR PLUG FORMED USING BACKSIDE SUBSTRATE THINNING
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack including interleaved conductive layers and dielectric layers, a channel structure extending vertically through the memory stack, and a semiconductor layer above the memory stack. The channel structure includes a channel plug in a lower portion of the channel structure, a memory film along a sidewall of the channel structure, and a semiconductor channel over the memory film and in contact with the channel plug. The semiconductor layer includes a semiconductor plug above and in contact with the semiconductor channel.
Memory systems and memory writing methods
Memory devices and memory operational methods are described. One example memory system includes a common conductor and a plurality of memory cells coupled with the common conductor. The memory system additionally includes access circuitry configured to provide different ones of the memory cells into one of a plurality of different memory states at a plurality of different moments in time between first and second moments in time. The access circuitry is further configured to maintain the common conductor at a voltage potential, which corresponds to the one memory state, between the first and second moments in time to provide the memory cells into the one memory state.
Series MIM structures
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a lower interconnect layer disposed within a first inter-level dielectric (ILD) layer over a substrate. A plurality of MIM (metal-insulator-metal) structures are disposed within a second inter-level dielectric (ILD) layer over the lower interconnect layer. An upper interconnect layer is coupled to the plurality of MIM structures at first locations that are directly over second locations at which the lower interconnect layer is coupled to the plurality of MIM structures. One or both of the lower interconnect layer and the upper interconnect layer are comprised within a conductive path that electrically couples the plurality of MIM structures in a series connection.
CAPACITIVE ELECTRONIC CHIP COMPONENT
The disclosure concerns a capacitive component including a trench and, vertically in line with the trench, first portions of a first silicon oxide layer and first portions of second and third conductive layers including polysilicon or amorphous silicon, the first portion of the first layer being between and in contact with the first portions of the second and third layers.
METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICE HAVING CHANNEL STRUCTURES WITH NATIVE OXIDE LAYER
Embodiments of 3D memory device having channel structures with a native oxide layer and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A dielectric stack is formed on a substrate. The dielectric stack includes interleaved first dielectric layers and second dielectric layers on a substrate. An opening extending vertically through the dielectric stack is formed. A native oxide layer is formed along a sidewall of the opening. The native oxide layer includes native oxide of at least some of the first dielectric layers. A deposited oxide layer, a storage layer, a tunneling layer, and a semiconductor channel are subsequently formed in this order over the native oxide layer and along the sidewall of the opening. A memory stack includes interleaved conductor layers and the second dielectric layers is formed by replacing, with the conductor layers, the first dielectric layers in the dielectric stack.