H01L28/86

Semiconductor device and manufacturing method thereof

A semiconductor device includes a capacitor. The capacitor includes a first electrode and a second electrode disposed in a first metal layer. The first electrode has a first end and a second end, and the first electrode has a spiral pattern extending outwards from the first end to the second end. The first electrode and the second electrode have a substantially equal spacing therebetween.

MEMORY CELL AND SEMICONDUCTOR MEMORY DEVICE WITH THE SAME
20220352169 · 2022-11-03 ·

Present invention relates to a semiconductor memory device. A semiconductor memory device according to the present invention may comprise: a memory cell array including a plurality of memory cells over a substrate, the plurality of memory cells repeatedly arranged in horizontal direction and a vertical direction, the horizontal direction parallel to a surface of the substrate, the vertical direction perpendicular to the surface of the substrate, a bit line coupled to the memory cells arranged in the vertical direction, and a word line coupled to the memory cells arranged in the horizontal direction, wherein each of the memory cells comprises a capacitor comprising a storage node and a plate node, and the plate nodes of the capacitors are coupled to each other in the vertical direction and are spaced apart from each other in the horizontal direction.

SEMICONDUCTOR MEMORY DEVICE

A semiconductor memory device includes a word line extending in a vertical direction, a semiconductor pattern having a ring-shaped horizontal cross-section that extends around the word line, a bit line disposed at a first end of the semiconductor pattern, and a capacitor structure disposed at second end of the semiconductor pattern. The capacitor structure includes a lower electrode layer electrically connected to the second end of the semiconductor pattern, having a ring-shaped horizontal cross-section, and including a connector extending in the vertical direction. A first segment extends in a horizontal direction from an upper end of the connector, and a second segment extends in the horizontal direction from a lower end of the connector. An upper electrode layer surrounded by the lower electrode layer, extends in the vertical direction, and a capacitor dielectric layer is between the lower electrode layer and the upper electrode layer.

FRINGE CAPACITOR ARRANGED BASED ON METAL LAYERS WITH A SELECTED ORIENTATION OF A PREFERRED DIRECTION

A fringe capacitor comprises a plurality of unidirectional metal layers, wherein an orientation of a preferred direction of each of the unidirectional metal layers is in a same direction. First fingers of the fringe capacitor are formed in a first layer of the unidirectional metal layers, the first fingers being interdigitated and having a direction parallel to the orientation of the preferred direction. Second fingers of the fringe capacitor are formed in a second layer of the unidirectional metal layers, the second fingers being interdigitated and having a direction parallel to the orientation of the preferred direction, the first layer and the second layer separated by at least a layer of not having the orientation of the preferred direction and not having fingers of the fringe capacitor

ETCH STOP AND PROTECTION LAYER FOR CAPACITOR PROCESSING IN ELECTROACOUSTIC DEVICES

Electroacoustic devices with a capacitive element and methods for fabricating such electroacoustic devices. An example method includes forming an acoustic device above a first region of a substrate, and forming a capacitive element above a second region of the substrate and adjacent to the acoustic device. The forming of the capacitive element may include forming a protective layer above the substrate where a first portion of the protective layer is above the second region of the substrate and a second portion of the protective layer is above the first region of the substrate, forming a dielectric region above the protective layer, and forming an electrode above the dielectric region. The dielectric region may include a different material than the protective layer.

Integrated Assemblies and Methods Forming Integrated Assemblies
20220344450 · 2022-10-27 · ·

Some embodiments include an integrated assembly having a laterally-extending container-shaped first capacitor electrode, and having a laterally-extending container-shaped second capacitor electrode laterally offset from the first capacitor electrode. Capacitor dielectric material lines interior surfaces and exterior surfaces of the container-shaped first and second capacitor electrodes. A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends along the lined interior and exterior surfaces of the first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.

Method for fabricating semiconductor memory device with buried capacitor and fin-like electrodes

A method for forming a semiconductor device is disclosed. A substrate having a semiconductor substrate, an insulator layer on the semiconductor substrate, and a silicon device layer on the insulator layer is provided. At least one capacitor cavity with corrugated sidewall surface is formed within the insulator layer between the semiconductor substrate and the silicon device layer. At least one buried capacitor is formed in the at least one capacitor cavity. The at least one buried capacitor comprises inner and outer electrodes with a capacitor dielectric layer therebetween. At least one transistor is formed on the substrate. The at least one transistor comprises a source region, a drain region, a channel region between the source region and the drain region, and a gate over the channel region. The source region is electrically connected to the inner electrode of the at least one buried capacitor.

Apparatus comprising compensation capacitors

An apparatus comprising first and second interconnections spaced apart from one another, an interlayer insulating material over the first and second interconnections, first and second contacts in the interlayer insulating material and spaced apart from one another, third and fourth interconnections over the interlayer insulating material and spaced apart from one another, and compensation capacitors in a capacitor region. The third interconnections are coupled with the first interconnections through the first contacts and the fourth interconnections are coupled with the second interconnections through the second contacts. The compensation capacitors comprise lower electrodes over the interlayer insulating material, dielectric materials over the lower electrodes, and upper electrodes over the dielectric materials. The lower electrodes comprise edge portions in contact with the second contacts. The third interconnections are elongated over the dielectric materials and are configured to provide elongated portions as the upper electrodes of the compensation capacitors. Related methods, memory devices, and electronic systems are disclosed.

CONFIGURABLE CAPACITOR

A capacitance device includes: a semiconductor substrate; a capacitor disposed on the semiconductor substrate and including first and second positive terminals and first and second negative terminals; a passivation layer formed over the capacitor, the first and second positive terminals and the first and second negative terminals, the passivation layer defining first and second openings over the first and second positive terminals, respectively, a third opening over the first negative terminal and a fourth opening over the second negative terminal; a first metallic bump disposed on the passivation layer and including first extending portions that extend through each of the first and second openings, electrically coupling the first and second positive terminals; and a second metallic bump disposed on the passivation layer and including second extending portions that extend through each of the third and fourth openings, electrically coupling the first and second negative terminals.

STRUCTURE AND METHOD FOR MULTIPLE BEOL K-VALUE DIELECTRIC
20230061546 · 2023-03-02 ·

An integrated circuit includes a plurality of transistors and an interlevel dielectric layer formed over the transistors. The interlevel dielectric layer includes a first region and a second region with a higher dielectric constant than the first region. The difference in dielectric constant is produced by curing the first region shielding the second region from the curing. Metal signal lines are formed in the first region. Metal-on-metal capacitors are formed in the second region.