H01L29/94

METHOD OF OPERATING DECOUPLING SYSTEM, AND METHOD OF FABRICATING SAME
20230231554 · 2023-07-20 ·

A method (of decoupling from voltage variations in a first voltage drop between first and second reference voltage rails) includes: electrically coupling one or more components to form a decoupling capacitance (decap) circuit; electrically coupling one or more components to form a filtered biasing circuit; and making an unswitched series electrical coupling of the decap circuit and the filtered biasing circuit between the first and second reference voltage rails.

CONTACT STRUCTURES IN RC-NETWORK COMPONENTS
20230017133 · 2023-01-19 ·

RC-network components that include a substrate having a capacitor with a thin-film top electrode portion at a surface at one side of the substrate. The low ohmic semiconductor substrate is doped to contribute 5% or less to the resistance of the RC-network component. The resistance in series with the capacitor is controlled by providing a contact plate, spaced from the top electrode portion by an insulating layer, and a set of one or more bridging contacts in openings in the insulating layer. The bridging contacts electrically interconnect the top electrode portion and contact plate. Different resistance values can be set by appropriate selection of the number of bridging contacts. Temperature concentration at the periphery of the openings is reduced by providing reduced thickness portions in the insulating layer around the periphery of the openings.

ONE-TIME PROGRAMMABLE (OTP) MEMORY CELL AND FABRICATION METHOD THEREOF

A one-time programmable (OTP) memory cell includes a substrate having a first conductivity type and having an active area surrounded by an isolation region, a transistor disposed on the active area, and a capacitor disposed on the active area and electrically coupled to the transistor. The capacitor comprises a diffusion region of a second conductivity type in the substrate, a metallic film in direct contact with the active area, a capacitor dielectric layer on the metallic film, and a metal gate surrounded by the capacitor dielectric layer. The diffusion region and the metallic film constitute a capacitor bottom plate.

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING SAME
20230020650 · 2023-01-19 ·

Embodiments provide a semiconductor structure and a method for fabricating the same. The semiconductor structure includes: a substrate; bit lines positioned in the substrate, where each of the bit lines includes a conductive body and a dielectric layer, the conductive body includes a body portion and a plurality of contact portions, the body portion extend along a first direction, the contact portions protrude from a side surface of the body portion facing away from a bottom of the substrate, the contact portions are arranged at intervals along the first direction, and the dielectric layer covers side wall surfaces on left and right sides of the body portion along an extension direction; and transistors positioned on top surfaces of the contact portions facing away from the body portion, and extension directions of channels of the transistors are perpendicular to a plane where the substrate is positioned.

SEMICONDUCTOR STRUCTURE AND FORMATION METHOD THEREOF
20230020232 · 2023-01-19 ·

Embodiments provide a semiconductor structure and a formation method thereof. The semiconductor structure includes: a substrate provided with semiconductor pillars arranged at intervals, the semiconductor pillars including a first doped region, a channel region and a second doped region sequentially arranged along a direction distant from a surface of the substrate; and a plurality of word lines extending along a first direction and an insulating layer between adjacent word lines. Each word line surrounds the channel region of the semiconductor pillars arranged along the first direction, and along the direction distant from the surface of the substrate, a width of the insulating layer perpendicular to the first direction gradually decreases. The embodiments are at least advantageous to ensuring that the word lines have better continuity.

SEMICONDUCTOR STRUCTURE
20230012587 · 2023-01-19 ·

Embodiments relate to the field of semiconductors, and provide a semiconductor structure, including a substrate and connection lines. Structural cells arranged in an array are provided on the substrate, and include transistor groups arranged in a first direction, and the transistor groups include multi-layer transistors extending in a second direction. The first direction is perpendicular to the second direction, and both are parallel to a surface of the substrate. The structural cells further include bit lines extending in a third direction, the bit lines are electrically connected to the multi-layer transistors in the same transistor group, where the third direction is perpendicular to the surface of the substrate. The connection lines are connected to the bit lines in the structural cells in one-to-one correspondence, and one bit line in the structural cells arranged in the array is connected to the same connection line.

SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD
20230017450 · 2023-01-19 ·

Embodiments provide a semiconductor fabrication method. The method includes: providing a substrate including an active layer; and forming a bit line contact layer and a bit line extending along a first direction, two sides of the bit line contact layer being in contact with the active layer and the bit line. Forming the bit line includes: forming a bit line stack including a semiconductor layer and a conductive layer stacked in sequence, the semiconductor layer covering a surface of the substrate and a surface of the bit line contact layer; etching part of the bit line stack to form initial bit lines arranged at intervals, the initial bit lines including a plurality of conductive lines; performing oxidation treatment on the semiconductor layer exposed between adjacent conductive lines to form an oxide layer, the semiconductor layer not oxidized being used as a semiconductor connection layer; and removing the oxide layer.

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME, AND MEMORY
20230012817 · 2023-01-19 ·

A semiconductor structure and a method for manufacturing the same, and a memory are provided. The semiconductor structure includes: a substrate, a plurality of oxide pillars, a plurality of active pillars, a first insulating layer and a storage structure. The plurality of oxide pillars are on the substrate and arranged in an array along a first direction and a second direction. Both the first direction and the second direction are parallel to a surface of the substrate, and the first direction intersects with the second direction. The first insulating layer is in a gap between the oxide pillars. Each active pillar is on a top surface of a corresponding one of the oxide pillars. The storage structure covers at least part of a side wall of the active pillar.

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
20230017800 · 2023-01-19 ·

A semiconductor device includes a plurality of bit line structures formed to be spaced apart from each other over a semiconductor substrate, a first spacer formed on both sidewalls of each of the bit line structures, a lower plug formed between the bit line structures and in contact with the semiconductor substrate, an upper plug positioned over the lower plug and having a greater line width than the lower plug, a middle plug positioned between the lower plug and the upper plug and having a smaller line width than a line width of the lower plug, and a second spacer positioned between the middle plug and the first spacer, wherein the second spacer is thicker than the first spacer.

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME
20230018059 · 2023-01-19 · ·

Embodiments of the disclosure provide a semiconductor structure and a method for forming the same. The method includes: providing a semiconductor substrate including a plurality of active pillars arranged at intervals; etching the active pillar to form an annular groove, in which the annular groove does not expose a top surface and a bottom surface of the active pillar; and forming a first semiconductor layer in the annular groove to form the semiconductor structure; in which a band gap of the first semiconductor layer is smaller than a band gap of the active pillar.