A semiconductor device includes a first substrate, a first insulating film provided on the first substrate, and a first plug provided in the first insulating film. The device further includes a first layer provided on the first insulating film and a first metal layer provided on the first plug in the first layer and electrically connected to the first plug. The device further includes a second metal layer including a first portion provided in the first layer and a second portion provided on the first layer and electrically connected to the first metal layer.

A semiconductor device includes a first substrate, a first insulating film provided on the first substrate, and a first plug provided in the first insulating film. The device further includes a first layer provided on the first insulating film and a first metal layer provided on the first plug in the first layer and electrically connected to the first plug. The device further includes a second metal layer including a first portion provided in the first layer and a second portion provided on the first layer and electrically connected to the first metal layer.

A semiconductor device includes a protective layer, a redistribution pattern, a pad pattern and an insulating polymer layer. The protective layer may be formed on a substrate. The redistribution pattern may be formed on the protective layer. An upper surface of the redistribution may be substantially flat. The pad pattern may be formed directly on the redistribution pattern. An upper surface of the pad pattern may be substantially flat. The insulating polymer layer may be formed on the redistribution pattern and the pad pattern. An upper surface of the insulating polymer layer may be lower than the upper surface of the pad pattern.

A semiconductor device includes a protective layer, a redistribution pattern, a pad pattern and an insulating polymer layer. The protective layer may be formed on a substrate. The redistribution pattern may be formed on the protective layer. An upper surface of the redistribution may be substantially flat. The pad pattern may be formed directly on the redistribution pattern. An upper surface of the pad pattern may be substantially flat. The insulating polymer layer may be formed on the redistribution pattern and the pad pattern. An upper surface of the insulating polymer layer may be lower than the upper surface of the pad pattern.

A semiconductor device of an embodiment includes a first chip having a memory cell array, and a second chip having a control circuit. The first chip includes a substrate, a pad, a first structural body, and a second structural body. The substrate is arranged on the side opposite to a joined face of the first chip joined to the second chip, and includes a first face, a second face, and an opening extending from the second face to the first face in a first region. The memory cell array is provided between the first face and the opposed joined face. The pad is provided in the opening. The first structural body is provided between the first face and the joined face, and is electrically connected to the pad. The second structural body is provided between the first face and the joined face in the first region.

A semiconductor device of an embodiment includes a first chip having a memory cell array, and a second chip having a control circuit. The first chip includes a substrate, a pad, a first structural body, and a second structural body. The substrate is arranged on the side opposite to a joined face of the first chip joined to the second chip, and includes a first face, a second face, and an opening extending from the second face to the first face in a first region. The memory cell array is provided between the first face and the opposed joined face. The pad is provided in the opening. The first structural body is provided between the first face and the joined face, and is electrically connected to the pad. The second structural body is provided between the first face and the joined face in the first region.

A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.

A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.

A semiconductor device includes: a semiconductor element that includes an element main body having an element main surface and an element back surface facing opposite sides to each other in a thickness direction, and a first electrode arranged on the element main surface; an insulator that has an annular shape overlapping an outer peripheral edge of the first electrode when viewed in the thickness direction and is arranged over the first electrode and the element main surface; a first metal layer arranged over the first electrode and the insulator; and a second metal layer laminated on the first metal layer and overlapping both the first electrode and the insulator when viewed in the thickness direction.

A bonded assembly includes a first semiconductor die and a second semiconductor die. The first semiconductor die includes first metallic bonding pads embedded in first dielectric material layers, the second semiconductor die includes second metallic bonding pads embedded in second dielectric material layers, the first metallic bonding pads are bonded to a respective one of the second metallic bonding pads; and each of the first metallic bonding pads includes a corrosion barrier layer containing an alloy of a primary bonding metal and at least one corrosion-suppressing element that is different from the primary bonding metal.