Various embodiments of the present application are directed towards a pad with high strength and bondability. In some embodiments, an integrated chip comprises a substrate, an interconnect structure, a pad, and a conductive structure. The interconnect structure adjoins the substrate and comprises wires and vias. The wires and the vias are stacked between the pad and the substrate. The conductive structure (e.g., a wire bond) extends through the substrate to the pad. By arranging the wires and the vias between the pad and the substrate, the pad may be inset into a passivation layer of the interconnect structure and the passivation layer may absorb stress on the pad. Further, the pad may contact the wires and the vias at a top wire level. A thickness of the top wire level may exceed a thickness of other wire levels, whereby the top wire level may be more tolerant to stress.

Various embodiments of the present application are directed towards a pad with high strength and bondability. In some embodiments, an integrated chip comprises a substrate, an interconnect structure, a pad, and a conductive structure. The interconnect structure adjoins the substrate and comprises wires and vias. The wires and the vias are stacked between the pad and the substrate. The conductive structure (e.g., a wire bond) extends through the substrate to the pad. By arranging the wires and the vias between the pad and the substrate, the pad may be inset into a passivation layer of the interconnect structure and the passivation layer may absorb stress on the pad. Further, the pad may contact the wires and the vias at a top wire level. A thickness of the top wire level may exceed a thickness of other wire levels, whereby the top wire level may be more tolerant to stress.

The nonvolatile memory device includes a substrate including a first surface and a second surface opposite to the first surface in a first direction; a common source line on the first surface of the substrate; a plurality of word lines stacked on the common source line; a first insulating pattern spaced apart from the plurality of word lines in a second direction crossing the first direction, and in the substrate; an insulating layer on the second surface of the substrate; a first contact plug penetrating the first insulating pattern and extending in the first direction; a second contact plug penetrating the insulating layer, extending in the first direction, and connected to the first contact plug; an upper bonding metal connected to the first contact plug and connected to a circuit element; and a first input/output pad connected to the second contact plug and electrically connected to the circuit element.

The nonvolatile memory device includes a substrate including a first surface and a second surface opposite to the first surface in a first direction; a common source line on the first surface of the substrate; a plurality of word lines stacked on the common source line; a first insulating pattern spaced apart from the plurality of word lines in a second direction crossing the first direction, and in the substrate; an insulating layer on the second surface of the substrate; a first contact plug penetrating the first insulating pattern and extending in the first direction; a second contact plug penetrating the insulating layer, extending in the first direction, and connected to the first contact plug; an upper bonding metal connected to the first contact plug and connected to a circuit element; and a first input/output pad connected to the second contact plug and electrically connected to the circuit element.

A method includes depositing a first dielectric layer covering an electrical connector, depositing a second dielectric layer over the first dielectric layer, and performing a first etching process to etch-through the second dielectric layer and the first dielectric layer. An opening is formed in the first dielectric layer and the second dielectric layer to reveal the electrical connector. A second etching process is performed to laterally etch the first dielectric layer and the second dielectric layer. An isolation layer is deposited to extend into the opening. The isolation layer has a vertical portion and a first horizontal portion in the opening, and a second horizontal portion overlapping the second dielectric layer. An anisotropic etching process is performed on the isolation layer, with the vertical portion of the isolation layer being left in the opening.

A stack package includes first and second sub-chip stacks stacked on a package substrate and bonding wires. The first sub-chip stack includes first and second sub-chips. The first sub-chip has a first surface on which a first common pad is disposed. The second sub-chip has a third surface on which a second common pad is disposed. The third surface is bonded to the first surface such that the second common pad is bonded to the first common pad. The second sub-chip includes a fourth surface opposite to the second common pad and a through hole extending from the fourth surface to reveal the second common pad. The bonding wire is connected to the second common pad via the through hole and electrically connects both of the first and second common pads to the package substrate.

A stack package includes first and second sub-chip stacks stacked on a package substrate and bonding wires. The first sub-chip stack includes first and second sub-chips. The first sub-chip has a first surface on which a first common pad is disposed. The second sub-chip has a third surface on which a second common pad is disposed. The third surface is bonded to the first surface such that the second common pad is bonded to the first common pad. The second sub-chip includes a fourth surface opposite to the second common pad and a through hole extending from the fourth surface to reveal the second common pad. The bonding wire is connected to the second common pad via the through hole and electrically connects both of the first and second common pads to the package substrate.

A bonded structure is disclosed. The bonded structure can include a first semiconductor element having a first front side and a first back side opposite the first front side. The bonded structure can include a second semiconductor element having a second front side and a second back side opposite the second front side, the first front side of the first semiconductor element directly bonded to the second front side of the second semiconductor element along a bond interface without an adhesive. The bonded structure can include security circuitry extending across the bond interface, the security circuitry electrically connected to the first and second semiconductor elements.

A bonded structure is disclosed. The bonded structure can include a first semiconductor element having a first front side and a first back side opposite the first front side. The bonded structure can include a second semiconductor element having a second front side and a second back side opposite the second front side, the first front side of the first semiconductor element directly bonded to the second front side of the second semiconductor element along a bond interface without an adhesive. The bonded structure can include security circuitry extending across the bond interface, the security circuitry electrically connected to the first and second semiconductor elements.

There is provided a semiconductor module including: a base for semiconductor cooling; a stacked substrate provided above the base; a semiconductor chip provided above the stacked substrate; a coating layer provided on an upper surface of the semiconductor chip; and a sealing resin for sealing the semiconductor chip, in which the base is in contact with the sealing resin.