Patent classifications
H01L2224/80143
METHODS OF PATTERNING A WAFER SUBSTRATE
Embodiments of the present disclosure provide for patterned substrates and methods of forming a patterned substrate, particularly a self-assembly pattern on a surface of a substrate, such as a host substrate, subsequently used in a chip to wafer (C2W) direct bonding process. In one embodiment, a method of patterning a substrate includes depositing a first material layer on a surface of a substrate, depositing a resist layer on the first material layer, patterning the resist layer to form a plurality of openings therethrough, transferring the pattern in the resist layer to the first material layer to form a plurality of self-assembly regions each comprising a hydrophilic assembly surface, and removing the resist layer to expose one or more hydrophobic bounding surfaces. Herein, the first material layer comprises a hydrophobic material.
Light emitting element and display device including the same and method for manufacturing display device
Provided is a light emitting element according to embodiments which includes a body including a semiconductor layer and an active layer, and a ligand including a head portion bonded to a surface of the body, an end portion spaced apart from the body, and having a positive or a negative charge, and a chain portion connecting the head portion and the end portion.
Method for direct bonding with self-alignment using ultrasound
A method for direct bonding an electronic chip onto a substrate or another electronic chip, the method including: carrying out a hydrophilic treatment of a portion of, a surface of the electronic chip and of a portion of a surface of the substrate or of the other electronic chip; depositing an aqueous fluid on the portion of the surface of the substrate or of the second electronic chip; depositing the portion of the surface of the electronic chip on the aqueous fluid; drying the aqueous fluid until the portion of the surface of the electronic chip is rigidly connected to the portion of the surface of the substrate or of the other electronic chip: and during at least part of the drying of the aqueous fluid, emitting ultrasound into the aqueous fluid through the substrate or the other electronic chip.
AUTOMATIC REGISTRATION BETWEEN CIRCUIT DIES AND INTERCONNECTS
- Ankit Mahajan ,
- Mikhail L. Pekurovsky ,
- Matthew S. Stay ,
- Daniel J. Theis ,
- Ann M. Gillman ,
- Shawn C. Dodds ,
- Thomas J. Metzler ,
- Matthew R.D. Smith ,
- Roger W. Barton ,
- Joseph E. Hernandez ,
- Saagar A. Shah ,
- Kara A. Meyers ,
- James Zhu ,
- Teresa M. Goeddel ,
- Lyudmila A. Pekurovsky ,
- Jonathan W. Kemling ,
- Jeremy K. Larsen ,
- Jessica Chiu ,
- Kayla C. Niccum
Processes for automatic registration between a solid circuit die and electrically conductive interconnects, and articles or devices made by the same are provided. The solid circuit die is disposed on a substrate with contact pads aligned with channels on the substrate. Electrically conductive traces are formed by flowing a conductive liquid in the channels toward the contact pads to obtain the automatic registration.
METHOD AND DEVICE FOR BONDING OF CHIPS
A method and device for bonding chips onto a substrate or onto further chips. The chips are bonded onto the substrate or the further chips by means of a direct bond.
Device for bonding chips
A method and device for bonding chips onto a substrate or onto further chips. The chips are bonded onto the substrate or the further chips by means of a direct bond using a bond head having a first surface configured to couple to a chip that is to be bonded, and a second surface fixed to and disposed opposite the first surface. A first spring element having a first spring constant and a second spring element having a second spring constant are coupled to the second surface, where the first spring constant is different from the second spring constant.
METHOD FOR TRANSFERRING MICRO DEVICE
A method for transferring a micro device is provided. The method includes: preparing a carrier substrate with the micro device thereon, wherein an adhesive layer is between and in contact with the carrier substrate and the micro device; picking up the micro-device from the carrier substrate by a transfer head; forming a liquid layer on a receiving substrate; and placing the micro device over the receiving substrate by the transfer head such that the micro device is in contact with the liquid layer and is gripped by a capillary force; and moving the transfer head away from the receiving substrate such that the micro device is detached from the transfer head and is stuck to the receiving substrate.
METHOD FOR TRANSFERRING MICRO DEVICE
A method for transferring a micro device is provided. The method includes: preparing a carrier substrate with the micro device thereon, wherein an adhesive layer is present between and in contact with the carrier substrate and the micro device; picking up the micro-device from the carrier substrate by a transfer head; forming a liquid layer on a receiving substrate; and placing the micro device over the receiving substrate so that the micro device is in contact with the liquid layer and is gripped by a capillary force.
METHOD FOR TRANSFERRING MICRO DEVICE
A method for transferring a micro device includes: preparing a carrier substrate with the micro device thereon in which an adhesive layer is present between and in contact with the carrier substrate and the micro device; picking up the micro-device from the carrier substrate by a transfer head comprising a force-adjustable glue layer thereon; forming a liquid layer on a receiving substrate; reducing the grip force of the force-adjustable glue layer of the transfer head to be smaller than a force attaching the micro device to the receiving substrate; placing the micro device over the receiving substrate such that the micro device is in contact with the liquid layer and is gripped by a capillary force; and moving the transfer head away from the receiving substrate such that the micro device is detached from the transfer head and is stuck to the receiving substrate.
Three-dimensional memory device containing self-aligned interlocking bonded structure and method of making the same
A first substrate has a first mesa structure that protrudes from a first bonding-side planar surface. A first metal pad structure is embedded within the first mesa structure. A second substrate has a first recess cavity that is recessed from a second bonding-side planar surface. A second metal pad structure is located at a recessed region of the first recess cavity. The first bonding-side planar surface and the second bonding-side planar surface are brought into physical contact with each other, while the first mesa structure is disposed within a volume of the first recess cavity by self-alignment. A gap is provided between the first metal pad structure and the second metal pad structure within a volume of the first recess cavity. A metal connection pad is formed by selectively growing a third metallic material from the first metal pad structure and the second metal pad structure.