A semiconductor device structure and a method for manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a semiconductor device structure (e.g., a sensor device structure), and method for manufacturing thereof, that comprises a three-dimensional package structure free of wire bonds, through silicon vias, and/or flip-chip bonding.

A chip packaging method begins by fixing a chip to the top side of a substrate. The chip is then encapsulated in an encapsulant. After that, the encapsulant is drilled from its top side in order to have a through hole adjacent to the chip. Lastly, an area extending between the chip and the through hole and the hole wall of the through hole are plated with an electrically conductive metal to enable electrical connection between the chip and the substrate through the electrically conductive metal. The chip packaging method solves the problems of the conventional wire bonding method, simplifies the packaging process, and provides the packaged chips with high transmission efficiency.

An electronic circuit device according to the present invention includes a base substrate having a wiring layer, at least one first electronic circuit element having a first surface fixed to the base substrate and having a connection part on a second surface opposed to the first surface, a re-distribution layer including a photosensitive resin layer, the photosensitive resin layer enclosing the first electronic circuit element on the base substrate and embedding a first wiring photo via, a second wiring photo via, and a wiring, the first wiring photo via electrically connected to the connection part of the first electronic circuit element, the second wiring photo via arranged at the outer periphery of the first electronic circuit element and electrically connected to a connection part of the wiring layer, the wiring arranged on the second surface and electrically connected to the first wiring photo via and the second wiring photo via.

An integrated circuit chip includes a front face having an electrical connection pad. An overmolded encapsulation block encapsulates the integrated circuit chip and includes a front layer at least partially covering a front face of the integrated circuit chip. A through-hole the encapsulation block is located above the electrical connection pad of the integrated circuit chip. A wall of the through-hole is covered with an inner metal layer that is joined to the front pad of the integrated circuit chip. A front metal layer covers a local zone of the front face of the front layer, with the front metal layer being joined to the inner metal layer to form an electrical connection. The inner metal layer and the front metal layer are attached or anchored to activated additive particles that are included in the material of the encapsulation block.

A fan-out packaging method employing a combined process includes: manufacturing at least two layers of basic circuit patterns on a substrate; manufacturing a galvanic isolation layer on one of the two layers of basic circuit patterns; manufacturing a fine circuit pattern on the galvanic isolation layer; using a bonding layer to bond an electronic component to the galvanic isolation layer, and using a patch material to establish an electrical connection between the electronic component and the fine circuit pattern; and using a packaging layer to package the electronic component, wherein the fine circuit pattern has a width less than widths of the basic circuit patterns. In the present disclosure, multiple layers of circuits are manufactured before installation and packaging of electronic components, thereby reducing the number of times an insulation material is to be heated, and broadening the range of available types of insulation materials.

Stitched die packaging techniques and structures are described in which reconstituted chips are formed using wafer reconstitution and die-stitching techniques. In an embodiment, a chip includes a reconstituted chip-level back end of the line (BEOL) build-up structure to connect a die set embedded in an inorganic gap fill material.

A semiconductor device including a first material layer adjacent to a second material layer, a first via passing through the first material layer and extending into the second material layer, and a second via extending into the first material layer, where along a common cross section parallel to an interface between the two material layers, the first via has a cross section larger than that of the second via.

A semiconductor device including a first material layer adjacent to a second material layer, a first via passing through the first material layer and extending into the second material layer, and a second via extending into the first material layer, where along a common cross section parallel to an interface between the two material layers, the first via has a cross section larger than that of the second via.

A package structure for a semiconductor device includes a first conductive layer, a second conductive layer, a first die, a second die, a plurality of first blind via pillars and a conductive structure. The first conductive layer has a first surface and a second surface. The first die and the second die respectively have an active surface and a back surface, which are disposed opposite to each other. There is a plurality of metal pads disposed on the active surface. The first die is attached to the first surface of the first conductive layer with its back surface, and the second die is attached to the second surface of the first conductive layer with its back surface. The first and second conductive layers, the first and second dies, the first blind hole pillars and conductive structure are covered by a dielectric material.

A method includes placing a first plurality of dies over a carrier. The first plurality of dies include at least a first logic die and a first memory die, placing a second plurality of dies over the first plurality of dies. The second plurality of dies are electrically coupled to the first plurality of dies, and include at least a second logic die and a second memory die. A third plurality of dies are placed over the second plurality of dies, and are electrically coupled to the first plurality of dies and the second plurality of dies. The third plurality of dies include at least a third logic die and a third memory die. The method further includes forming electrical connectors over and electrically coupling to the first plurality of dies, the second plurality of dies, and the third plurality of dies.