Patent classifications
H01L2924/1579
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; a second level including a second single crystal layer, the second level including second transistors; and a third level including a third single crystal layer, the third level including third transistors, where the second level overlays the first level, where the second level is bonded to the first level, where the third level is bonded to the second level, where the bonded includes oxide to oxide bonds, where the bonded includes metal to metal bonds, where the second level includes a first array of first memory cells, and where the third level includes a second array of second memory cells.
Methods for producing a 3D semiconductor memory device and structure
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits including first single crystal transistors; forming at least one second level above the first level; performing a first etch step including etching first holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching second holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the etching first holes includes performing a lithography step aligned to the first alignment marks.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including single crystal first transistors, and a first metal layer, where the first level is overlaid by a first isolation layer; a second level including second transistors, where the first isolation layer is overlaid by the second level, and where the second level is overlaid by a second isolation layer; a third level including single crystal third transistors, where the second isolation layer is overlaid by the third level, where the third level is overlaid by a third isolation layer, where the third level is bonded to the second isolation layer, where the bonded includes at least one oxide to oxide bond, and where the bonded includes at least one metal to metal bond.
METHODS FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits including first single crystal transistors; forming at least one second level above the first level; performing a first etch step including etching first holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching second holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the etching first holes includes performing a lithography step aligned to the first alignment marks.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device including: a first level including a first single crystal layer and first single crystal transistors; a first metal layer interconnecting the first single crystal transistors; second transistors disposed atop of the first single crystal transistors; third transistors disposed atop of the second transistors; fourth transistors disposed atop of the third transistors; where the fourth transistors include replacement gates, being processed to replace a non-metal gate material with a metal based gate, and where a distance from at least one of the fourth transistors to at least one of the second transistors is less than 1 micron.
METHODS FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer and control circuits; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source, and a drain having a same doping type.
3D SEMICONDUCTOR DEVICE AND STRUCTURE
A 3D semiconductor device, the device comprising: a first level comprising a single crystal layer, first transistors and a first metal layer; memory control circuits comprising said first transistors; a second level disposed above said first level, said second level comprising second transistors; a third level disposed above said second level, said third level comprising a plurality of third transistors; wherein said third transistors are aligned to said first transistors with a less than 40 nm alignment error, wherein said second level comprises a plurality of first memory cells, wherein said third level comprises a plurality of second memory cells, wherein one of said second transistors is at least partially self-aligned to at least one of said third transistors, being processed following a same lithography step, wherein at least one of said second memory cells comprises at least one of said third transistors, wherein said memory cells comprise a NAND non-volatile memory type.
Silicon interposer sandwich structure for ESD, EMC, and EMC shielding and protection
A interposer sandwich structure comprises a top interposer and a bottom interposer enclosing an integrated circuit electronic device that includes means for attaching the device to the bottom interposer, and an interconnection structure connecting the top interposer to the bottom interposer. The top interposer may also be directly connected to a chip carrier in addition to the bottom interposer. The structure provides shielding and protection of the device against Electrostatic Discharge (ESD), Electromagnetic Interference (EMI), and Electromagnetic Conductivity (EMC) in miniaturized 3D packaging.
PHOTORELAY
A photorelay of an embodiment includes a polyimide substrate having a first surface and a second surface on an opposite side of the polyimide substrate from the first surface, the polyimide substrate having a thickness equal to or more than 10 μm and equal to or less than 120 μm, an input terminal provided on the second surface, an output terminal provided on the second surface, a light receiving element provided on the first surface, a light emitting element provided on the light receiving element, and a MOSFET provided on the first surface.
3D semiconductor device and structure with NAND logic
A 3D semiconductor device, the device including: a first level including a single crystal layer and a plurality of first transistors; a first metal layer including interconnects between the plurality of first transistors, where the interconnects between the plurality of first transistors includes forming a plurality of logic gates; a plurality of second transistors atop at least a portion of the first metal layer, where at least six of the plurality of first transistors are connected in series forming at least a portion of a NAND logic structure, where the plurality of second transistors are vertically oriented transistors, and where the plurality of second transistors are at least partially directly atop of the NAND logic structure; and a second metal layer atop at least a portion of the plurality of second transistors, where the second metal layer is aligned to the first metal layer with less than 150 nm misalignment, and where at least one of the second transistors is a junction-less transistor.