A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.

Disclosed are systems, devices and methods for providing electrostatic discharge (ESD) protection for integrated circuits. In some implementations, first and second conductors with ohmic contacts on an intrinsic semiconductor region can function similar to an x-i-y type diode, where each of x and y can be n-type or p-type. Such a diode can be configured to turn on under selected conditions such as an ESD event. Such a structure can be configured so as to provide an effective ESD protection while providing little or substantially nil effect on radio-frequency (RF) operating properties of a device.

A method of making a semiconductor device includes depositing a dielectric layer over a conductive pad using a first deposition process. The method further includes depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD). The first deposition process is different from HDPCVD. A thickness of the dielectric layer is sufficient to prevent charges generated by depositing the first passivation layer from reaching the conductive pad.

A transient voltage suppressor (TVS) apparatus includes a plurality of input/output (I/O) pins, a plurality of ground pins, and a substrate. The substrate includes a plurality of division parts and a carrier part. The carrier part carries a chip. The division parts are disposed between each of the I/O pins and the ground pins. The chip is electrically connected to the I/O pins and the ground pins, and the division parts are electrically insulated from the I/O pins and the ground pins.

A transient voltage suppressor (TVS) apparatus includes a plurality of input/output (I/O) pins, a plurality of ground pins, and a substrate. The substrate includes a plurality of division parts and a carrier part. The carrier part carries a chip. The division parts are disposed between each of the I/O pins and the ground pins. The chip is electrically connected to the I/O pins and the ground pins, and the division parts are electrically insulated from the I/O pins and the ground pins.

A circuit device includes a first pad and a second pad that are disposed in a first pad disposition region along a first side; a third pad and a fourth pad that are disposed in a second pad disposition region along a second side which faces the first side; and a first to fourth electrostatic protection circuits that are disposed in a circuit disposition region between the first pad disposition region and the second pad disposition region and are connected to the first to fourth pads.

In a process, at least one circuit element is formed in a substrate. A conductive layer is formed over the substrate and in electrical contact with the at least one circuit element. Electrostatic charges are discharged from the substrate via the conductive layer.

A semiconductor device includes: a semiconductor substrate; a via structure passing through the semiconductor substrate; a first diode including a first impurity zone doped with a first conductivity-type impurity and a second impurity zone doped with a second conductivity-type impurity; and a second diode including a third impurity zone doped with the first conductivity-type impurity and a fourth impurity zone doped with the second conductivity-type impurity, wherein the second conductivity-type impurity is different from the first conductivity-type impurity, and wherein at least one of the first impurity zone, the second impurity zone, the third impurity zone, and the fourth impurity zone overlaps with a keep-out zone of the via structure.

A method for manufacturing an electronic device includes: providing a semiconductor carrier including first and second vertically integrated electronic structures laterally spaced apart from each other, an electrical connection layer disposed over a first side of the semiconductor carrier and electrically connecting the first and second vertically integrated electronic structures with each other; mounting the semiconductor carrier on a support carrier with the first side of the semiconductor carrier facing the support carrier; thinning the semiconductor carrier from a second side opposite the first side; and removing material of the semiconductor carrier in a separation region between the first and second vertically integrated electronic structures to separate a first semiconductor region of the first vertically integrated electronic structure from a second semiconductor region of the second vertically integrated electronic structure with the first and second vertically integrated electronic structures remaining electrically connected with each other via the electrical connection layer.

An integrated circuit device including a semiconductor substrate, a first bonding pad structure, a second bonding pad structure, a third bonding pad structure, a first internal bonding wire, and a second internal bonding wire is provided. The first bonding pad structure is disposed on a surface of the semiconductor substrate and exposed outside of the semiconductor substrate. The second bonding pad structure is disposed on the surface of the semiconductor substrate and exposed outside of the semiconductor substrate. The third bonding pad structure is disposed on the surface of the semiconductor substrate and exposed outside of the semiconductor substrate. The first bonding pad structure is electrically coupled to the third bonding pad structure via the first internal bonding wire. The third bonding pad structure is electrically coupled to the second bonding pad structure via the second internal bonding wire.