In one embodiment, a method for forming an alkali resistant coating includes forming a first oxide material above a substrate and forming a second oxide material above the first oxide material to form a multilayer dielectric coating, wherein the second oxide material is on a side of the multilayer dielectric coating for contacting an alkali. In another embodiment, a method for forming an alkali resistant coating includes forming two or more alternating layers of high and low refractive index oxide materials above a substrate, wherein an innermost layer of the two or more alternating layers is on an alkali-contacting side of the alkali resistant coating, and wherein the innermost layer of the two or more alternating layers comprises at least one of: alumina, zirconia, and hafnia.

The present disclosure relates to systems, methods, and computer readable media for modeling thermal effects within a multi-laser device. For example, systems described herein may include a plurality of laser devices that output energy streams having corresponding operating windows. One or more systems described herein may include a set of accumulators for tracking quantities of energy samples within operating windows and populating a queue representative of the tracked quantities. One or more systems described herein may additionally include filters and a summing module for determining temperature values for operating windows and synchronizing the temperature values with one another to determine an accurate system temperature for the multi-laser device. The features described herein facilitate synchronization of data for corresponding operating windows to provide an accurate determination of system temperature based on a combination of self-heating and crosstalk effects between multiple laser devices.

A method for forming in particular reflection-reducing nanostructures (5) on a preferably polished surface (3) of a crystalline, in particular ionic, substrate (1) for transmission of radiation in the FUV/VUV wavelength range. The method includes: providing a surface (3, 7), which surface is not oriented along a lattice plane having a minimum surface energy, on the substrate (1) or on a layer (6) applied to the substrate (1) by a coating method, in particular vacuum vapor deposition, and introducing an energy input (E) into the surface (7) for rearranging the surface (7) to form the nanostructures (5), wherein the energy input (E) is generated by irradiating the surface (7) with electromagnetic radiation (4). Also, an optical element for transmission of radiation in the FUV/VUV wavelength range.

An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

An optically pumped, flowing gas, alkali metal laser includes a gas passageway transporting an alkali metal vapor and a hydrocarbon buffer gas, and a laser propagation passageway intersects the gas passageway and forms a main cell at the intersection. A pump laser is directed into the main cell and produces a main laser beam in the laser propagation passageway. The flowing hydrocarbon buffer gas is disposed in the main cell with a density to induce spin-orbit relaxation in the alkali metal vapor. At least one window is disposed in the laser propagation passageway, and the window is protected from deposits of alkali metal or carbon by a heated leading edge in the laser propagation passageway that re-vaporizes alkali metal and returns it to the gas passageway via a convective gas flow. The window is further protected by a cold block that liquefies alkali metal and by a colder block that solidifies alkali metal in the laser propagation passageway.

A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.

A laser device is provided. The laser device includes: a laser tube having an opening in both ends thereof, and a fixing apparatus on at least one of the ends of the laser tube. The opening in at least one of the ends of the laser tube is sealed by the fixing apparatus. A movable assembly and a window are provided on the fixing apparatus. The window is movable relatively to the opening of the laser tube when being driven by the movable assembly, to change a transmission position of a laser light generated by the laser tube on the window.

An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

An optical member is provided with a substrate and a Cu-proof protective layer formed on or above the substrate.

Techniques and architecture are disclosed for preserving optical surfaces (e.g., windows, coatings, etc.) in a flowing gas amplifier laser system, such as a diode-pumped alkali laser (DPAL) system. In some instances, the disclosed techniques/architecture can be used, for example, to protect optical surfaces in a DPAL system from: (1) chemical attack by pump-bleached alkali vapor atoms and/or ions; and/or (2) fouling by adherence thereto of reaction products/soot produced in the DPAL. Also, in some instances, the disclosed techniques/architecture can be used to substantially match the geometry of the pumping volume with that of the lasing volume, thereby minimizing or otherwise reducing the effects of amplified spontaneous emission (ASE) on DPAL output power. Furthermore, in some cases, the disclosed techniques/architecture can be used to provide a DPAL system capable of producing a beam output power in the range of about 20 kW to 10 MW, or greater.