A chamber of a gas laser apparatus, the chamber configured to encapsulate a laser gas in an internal space, includes an anode disposed in the internal space and having a longitudinal direction along a predetermined direction; a cathode disposed in the internal space and including a base and a discharge section protruding from the base toward the anode, the cathode having a longitudinal direction along the predetermined direction, the cathode being separate from and facing the anode; a cathode-side cover disposed in the internal space, being separate from a portion of the base and the discharge section, and covering the base; and a cathode-side sound absorbing member provided in a gap between the portion of the base and the cathode-side cover.

A laser chamber of a gas laser device outputting laser light including a container filled with a laser gas; a first electrode extending in a first direction and arranged in the container; a second electrode arranged at a position closer to an inner wall of the container than the first electrode while extending in the first direction and facing the first electrode in a second direction orthogonal to the first direction; a fan causing the laser gas to flow through a discharge space between the first and second electrodes; an insulating guide arranged on a downstream side of the second electrode; and a vortex dividing member including structures extending in the first direction and arranged discretely along a direction in which the laser gas flows on a downstream side of the insulating guide, and dividing a vortex generated by a part of a flow of the laser gas.

A chamber apparatus for a laser configured to output laser light, the chamber apparatus including: a chamber; a first discharge electrode disposed in an internal space of the chamber and having a longitudinal direction aligned with an optical axis of the laser light; a second discharge electrode so disposed in the internal space that the second discharge electrode faces the first discharge electrode and has a longitudinal direction aligned with the optical axis of the laser light; a return member electrically connected to the chamber and further electrically connected to the second discharge electrode over a length from one end to the other end thereof in the longitudinal direction; and a support member fixed to the chamber and supporting the second discharge electrode, the second discharge electrode and the chamber being not electrically continuous with each other via the support member.

A laser chamber includes a cathode electrode including a cathode discharge surface extending in a first direction, an anode electrode including an anode discharge surface extending in the first direction, the anode discharge surface facing the cathode discharge surface in a second direction orthogonal to the first direction, a fan that circulates the laser gas to pass through a discharge space between the cathode electrode and the anode electrode in a third direction orthogonal to the first direction and the second direction, and a preionization electrode disposed on an upstream side of the laser gas. A cross-sectional shape of the cathode discharge surface cut along a plane orthogonal to the first direction is asymmetrical about an axis parallel to the second direction, and a cross-sectional shape of the anode discharge surface cut along the plane is symmetrical about the axis, in an initial state.

A chamber device includes: a chamber body; an anode extending along a Z direction; a cathode disposed in an internal space facing the anode, extending along the Z direction, and including a base part and a discharge part protruding from the base part toward the anode; a cathode-side cover part including a base facing part and covers a part of the base part; a cathode-side acoustic absorbing member disposed in a space between the cathode-side cover part and the base part; and an inclined part including an inclined surface disposed in a space closer to the base part than the base facing part in the V direction and closer to the discharge part than the base facing part in the H direction, broadening to an opposite side with respect to the discharge part as the inclined surface is closer to the base part along the V direction, and extending in the Z direction.

Discharge electrodes include a cathode and an anode. The anode is disposed to face the cathode in a discharge direction perpendicular to a longitudinal direction of the cathode, and includes an electrode base 1, and a coating layer that covers a portion of a surface of the electrode base. First corners in a cross section perpendicular to the longitudinal direction connect first straight sections formed of first side surfaces that are side surfaces of the electrode base to a first curved section formed of a first discharge surface that is a discharge surface of the electrode base. The first corners are closer to the cathode in the discharge direction than second corners connecting second straight sections formed of second side surfaces that are side surfaces of the coating layer to a second curved section formed of a second discharge surface that is a discharge surface of the coating layer.