Disclosed is a device for generating a laser radiation including a box and an electrode, the electrode including a column extending along an axial direction and a collar surrounding the column and having a first face perpendicular to the axial direction and a second face parallel to the first face, the second face facing the box. The generating device includes a ring having a third face bearing against the box, the ring defining a hole emerging on the third face and accommodating the collar, the hole being defined along the axial direction by a bearing face arranged in the ring, perpendicular to the axial direction and facing the box, the first face bearing against the bearing face.

An impedance matching circuit for a gas-laser excitation system includes a high-frequency connection line configured to be connected at a first connection point to a power source and at a second connection point to a gas-laser electrode. The impedance matching circuit is characterized in that an impedance of at least one section of the high-frequency connection line changes by a change to a configuration of the high-frequency connection line, in particular to at least one parameter of the high-frequency connection line in the at least one section.

The invention relates to a marking apparatus for marking an object with laser light, which apparatus comprises at least one gas laser for emitting at least one laser beam for marking the object. The at least one gas laser comprises a plurality of resonator tubes (12) for receiving a laser gas, a plurality of heat dissipaters (20) for dissipating heat from the resonator tubes (12) is provided, each resonator tube (12) is thermally connected to one of the heat dissipaters (20), and each heat dissipater (20) comprises microchannels for receiving a cooling fluid.

A dielectric electrode assembly, and a method (600) of manufacture thereof, including: a dielectric tube (226) having a cylindrical cross-section and a relative dielectric constant, .sub.2, the dielectric tube (226) filled with a gas having a relative dielectric constant, .sub.1; a structural dielectric (225) having a relative dielectric constant, .sub.3 surrounding the dielectric tube (226); metal electrodes (224) on opposite sides of the structural dielectric (225), the metal electrodes (224) having a flat cross-sectional geometry; and the structural dielectric (225) made from a material selected such that the relative dielectric constants of the structural dielectric (225), the dielectric tube (226), and the gas are interrelated and an approximately uniform electric field is generated within the dielectric tube (226) when power is applied to the metal electrodes (224).

In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.

Systems and techniques for multilayer electrode assemblies are generally described. In some examples, a multilayer electrode assembly may comprise a first dielectric material. In some examples, the first dielectric material may be shaped so as to form a channel defined by an interior surface. In various examples the multilayer electrode assemblies may comprise a first metal layer disposed adjacent to a first portion of the exterior surface of the first dielectric material. In various further examples, the multilayer electrode assemblies may comprise a second metal layer disposed adjacent to a second portion of the exterior surface of the first dielectric material. In some examples, the first metal layer may be disposed in a first spaced relationship with the second metal layer. In various examples, a substantially uniform electric field may be generated in the channel of the first dielectric material when a voltage is applied to the multilayer electrode assembly.

A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.

Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.

An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

A gas laser excitation system with an integrated impedance matching circuit, comprises a gas laser electrode, a high-frequency connection line connectable to the gas laser electrode and configured for transmission of high-frequency power to the gas laser electrode, and a shield configured to shield the high-frequency power to be transmitted. The shield is arranged between the high-frequency connection line and the gas laser electrode. The high-frequency connection line interacts with the gas laser electrode and/or the shield in such a way that the resulting impedance changes at least across a section of the high-frequency connection line.