Patent classifications
H01S3/1302
Method and laser system for generating output laser pulses with an optical component with temperature-dependent power efficiency and associated computer program product
A method for generating output laser pulses from input laser pulses includes causing the input laser pulses to temporally successively pass through an optical component with temperature-dependent power efficiency. The optical component is heated by the passing of the input laser pulses. The input laser pulses emerge from the optical component as output laser pulses. The method further includes calculating a current temperature or a current temperature difference of the optical component, or a temperature-dependent current parameter based on all preceding input laser pulses or output laser pulses that have contributed to the heating of the optical component, and setting a power of a current input laser pulse based on the calculated current temperature, or the calculated current temperature difference, or the calculated current parameter, so that an associated output laser pulse has a pulse energy that deviates from a predefined pulse energy by less than 5%.
Nonlinear optical system for generating or amplifying light pulses by N-wave mixing, including a fast modulating device
Disclosed is a nonlinear optical system for generating or amplifying light pulses by N-wave mixing, including a nonlinear optical medium suitable for receiving at least one first light pulse and one second light pulse. The system includes a fast modulation device for modulating a time delay between the second light pulse and the first pulse light in the nonlinear optical medium, the time delay modulation device being placed upstream of the nonlinear optical medium, and the time delay modulation device being modulated at least between a first delay value and a second delay value, so as to modulate the generation or amplification of a light pulse by N-wave mixing of the at least one first light pulse et one second light pulse in the nonlinear optical medium.
GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUS
A gas laser amplifier includes a housing, discharge electrode pairs, and an optical resonator. The housing includes an entrance window that allows entry of a first laser beam from outside and an exit window that allows exit of the first laser beam amplified. Each of the discharge electrode pairs excites a laser gas supplied between discharge electrodes facing each other in the housing. The optical resonator causes a second laser beam to oscillate with a gain of the excited laser gas in a non-incident state where the first laser beam from outside the housing does not enter the housing through the entrance window. In an incident state where the first laser beam enters the housing through the entrance window, the optical resonator suspends the oscillation of the second laser beam.
OPTICAL AMPLIFIER
An optical amplifier of the present disclosure includes an optical resonator that includes an amplification fiber capable of amplifying signal light having one or more propagation modes and resonates at least one propagation mode of the signal light amplified by the amplification fiber; an excitation light source that outputs excitation light for exciting the amplification fiber; and a multiplexer that multiplexes the signal light and the excitation light, in which the optical resonator includes a gain clamp setting unit which sets gain clamp for at least one propagation mode out of a plurality of propagation modes resonating in the optical resonator.
INTEGRATED COMPONENT FOR AN OPTICAL AMPLIFIER
An optical device may include a package having a first port for receiving signal light, a source for providing pump light, a combiner for combining the signal light and the pump light into combined light, a second port for sending the combined light, a third port for receiving amplified light, and a free-space optical system for filtering amplified signal light from the amplified light, and a fourth port for sending the amplified signal light. The free-space optical system may include beam shaping optics that enlarge a beam size of the amplified light prior to the filtering.
OPTICAL AMPLIFIER AND CONTROL METHOD THEREFOR
To solve the problem that the power consumption of optical amplifiers is not optimized over the life time of an amplifier, the optical amplifier includes a gain medium for amplifying a plurality of optical channels, the gain medium including a plurality of cores through which the plurality of optical channels to propagate respectively and a cladding area surrounding the plurality of cores, a monitor that monitors the temperature of the optical amplifier and producing a monitoring result, a first light source that emits a first light beam to excite the cladding area, a second light source that emits a plurality of second light beams to excite each of the plurality of cores individually, and a controller that controls the first light source and the second light source based on the produced monitoring result.
LASER DEVICE, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
A laser device includes at least one amplification unit configured to amplify laser light emitted from a laser oscillator, and an amplification control unit configured to control the amplification unit. The amplification unit includes an incident-side optical adjustment unit including a wavefront adjustment unit configured to adjust a wavefront of the laser light and a first direction adjustment unit configured to adjust an optical axis thereof, an amplifier configured to amplify the laser light, an emission-side optical adjustment unit including a second direction adjustment unit configured to adjust an optical axis of the laser light, and a measurement unit configured to measure the laser light and acquire information on at least one of an optical axis, a wavefront and energy of the laser light. The amplification control unit controls the incident-side optical adjustment unit and/or the emission-side optical adjustment unit, based on a measurement result of the measurement unit.
Method For Realizing Precise Target Gain Control For Hybrid Fibre Amplifier, And Hybrid Fibre Amplifier
A method for realizing precise gain control for a hybrid fibre amplifier, and a hybrid fibre amplifier, in which by an erbium-doped fibre amplifier firstly outputting a constant power, a comparable source signal optical power is provided for a raman fibre amplifier of a next stage. A feedback for the gain control may be formed by comparing a source signal optical power calculated after starting pumping of the Raman fibre amplifier and a source signal optical power detected after pumping stops, thereby greatly improving gain control precision of the Raman fibre amplifier. Moreover, the erbium-doped fibre amplifier parts of all the hybrid fibre amplifiers may simultaneously output a constant optical power, and the Raman amplifier parts of all the hybrid fibre amplifiers may simultaneously start calibration, so that the time for starting operation of the entire system may be improved greatly.
PULSE LASER SYSTEM THAT IS TEMPORALLY VARIABLE IN TERMS OF RHYTHM AND/OR AMPLITUDE
Disclosed is a laser system including a source, for generating a source signal, and an optical amplifier system. The laser system includes a pulse selection or variation device configured to select or vary the source signal so as to form a main signal composed of one or more light pulses. The main signal is temporally variable in terms of rhythm and/or amplitude. The laser system is configured to inject the main signal and a secondary signal into the optical amplifier system. The secondary signal is varied on the basis of the temporal variation in terms of rhythm and/or amplitude of the main signal so as to stabilize the power stored in the optical amplifier system in a time-dependent manner, and the laser system is configured to spatially separate the amplified main signal from the amplified secondary signal.
NONLINEAR OPTICAL SYSTEM FOR GENERATING OR AMPLIFYING LIGHT PULSES BY N-WAVE MIXING, INCLUDING A FAST MODULATING DEVICE
Disclosed is a nonlinear optical system for generating or amplifying light pulses by N-wave mixing, including a nonlinear optical medium suitable for receiving at least one first light pulse and one second light pulse. The system includes a fast modulation device for modulating a time delay between the second light pulse and the first pulse light in the nonlinear optical medium, the time delay modulation device being placed upstream of the nonlinear optical medium, and the time delay modulation device being modulated at least between a first delay value and a second delay value, so as to modulate the generation or amplification of a light pulse by N-wave mixing of the at least one first light pulse et one second light pulse in the nonlinear optical medium.