Patent classifications
H01S3/1312
Planar waveguides with enhanced support and/or cooling features for high-power laser systems
This disclosure provides planar waveguides with enhanced support and/or cooling. One or more endcaps could be disposed between coating/cladding layers at one or more ends of a core region, where the core region is doped with at least one active ion species and each endcap is not doped with any active ion species that creates substantial absorption at pump and signal wavelengths. A core region could include at least one crystal or crystalline material, and at least one cladding layer could include at least one glass. Different types of coolers could be disposed on or adjacent to different coating/cladding layers. Side claddings could be disposed on opposite sides of a planar waveguide, where the opposite sides represent longer sides of the waveguide. Endcaps and one or more coolers could be sealed to a housing, and coolant can flow through a substantially linear passageway along a length of the waveguide. One side of a planar waveguide could be uncooled.
Optical power monitor device and optical power monitor method
An optical power monitor device includes a first optical fiber, including a core and a cladding surrounding the core and being at least one of an incidence-side optical fiber and a launch-side optical fiber connected to each other at a connection point, which is constituted by a curve portion and a linear portion between the curve portion and the connection point, a low refractive index layer that is provided in at least a portion of the linear portion on an outer side of the cladding and has a refractive index lower than a refractive index of the cladding, and a first optical detector that is provided at a position close to at least the curve portion.
Planar waveguides with enhanced support and/or cooling features for high-power laser systems
This disclosure provides planar waveguides with enhanced support and/or cooling. One or more endcaps could be disposed between coating/cladding layers at one or more ends of a core region, where the core region is doped with at least one active ion species and each endcap is not doped with any active ion species that creates substantial absorption at pump and signal wavelengths. A core region could include at least one crystal or crystalline material, and at least one cladding layer could include at least one glass. Different types of coolers could be disposed on or adjacent to different coating/cladding layers. Side claddings could be disposed on opposite sides of a planar waveguide, where the opposite sides represent longer sides of the waveguide. Endcaps and one or more coolers could be sealed to a housing, and coolant can flow through a substantially linear passageway along a length of the waveguide. One side of a planar waveguide could be uncooled.
System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources
A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
LASER APPARATUS, EUV LIGHT GENERATING SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.
LASER SYSTEMS AND RELATED METHODS
A MOPA laser system that includes a seed laser configured to output pulsed laser light, an amplifier configured to receive and amplify the pulsed laser light emitted by the seed laser; and a pump laser configured to deliver a pump laser beam to both the seed laser and the amplifier and a variable attenuator configured to eliminate missing Q-switched pulses.
LASER BURST LOGGING SYSTEMS AND METHODS
A burst logging system logs and transmits to a local or remote computing system event data related to errors in and or potential failures of laser system components. The system further provides for capturing data at different rates from different sensors, synchronization of data capture associated with system events and the possibility for aggregation of data from multiple systems, which can in turn be leveraged to predict and or remediate future system events.
Laser apparatus including heat transfer device for releasing heat inside housing to the outside
A laser apparatus includes a heat transfer device having a cooling fin at a temperature lower than that of a heat radiation jacket, and a cooling fan. A controller controls the cooling fan so as to be stopped when temperature detected by a temperature sensor is lower than a temperature reference value and humidity detected by a humidity sensor is higher than a humidity reference value. The controller controls the cooling fan so as to be driven when temperature detected by the temperature sensor is higher than the temperature reference value and humidity detected by the humidity sensor is lower than the humidity reference value.
HIGH-GAIN SINGLE PLANAR WAVEGUIDE (PWG) AMPLIFIER LASER SYSTEM
A system includes a master oscillator configured to generate a first optical beam and a beam controller configured to modify the first optical beam. The system also includes a PWG amplifier configured to receive the modified first optical beam and generate a second optical beam having a higher power than the first optical beam. The second optical beam has a power of at least about ten kilowatts. The PWG amplifier includes a single laser gain medium configured to generate the second optical beam. The system further includes a feedback loop configured to control the master oscillator, PWG amplifier, and beam controller. The feedback loop includes a laser controller. The laser controller may be configured to process wavefront information or power in bucket information associated with the second optical beam to control an adaptive optic or perform a back-propagation algorithm to provide wavefront correction at an output of the PWG amplifier.
Laser systems and related methods
A MOPA laser system that includes a seed laser configured to output pulsed laser light, an amplifier configured to receive and amplify the pulsed laser light emitted by the seed laser; and a pump laser configured to deliver a pump laser beam to both the seed laser and the amplifier and a variable attenuator configured to eliminate missing Q-switched pulses.