An optical element moving apparatus includes a first holder configured to hold a first optical element, a second holder configured to hold a second optical element and having an inclination that inclines with respect to a first direction in which the second holder approaches the first holder, a guide section configured to be capable of moving the second holder in a direction parallel to the first direction, and an elastic member disposed in a position which is located between the first holder and the second holder and through which a first plane passes, the first plane intersecting the inclination at right angles and being parallel to the first direction.

To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.

The present disclosure provides a dark cavity laser, including: a frequency stabilized laser output device configured to generate a laser light, and perform a frequency stabilized processing on the generated laser light to output it to the dark cavity laser device as a pump light of a gain medium of a dark cavity; and a dark cavity laser device including a main cavity, and a cavity of the main cavity is provided inside with a gas chamber of a gain medium of a dark cavity laser light, where the gain medium of the dark cavity laser light is alkali metal atoms; the dark cavity laser device is configured to receive the pump light, and form a polyatomic coherent stimulated radiation between transition levels of the alkali metal atoms in the gas chamber by a weak feedback of the main cavity to generate the dark cavity laser light.

The disclosure provides a high-frequency-reproducibility laser frequency stabilization method and device based on multi-point acquisition of laser tube temperature. The laser frequency stabilization device includes: a frequency stabilization control circuit. The frequency stabilization control circuit includes a polarizing beam splitter, an optical power conversion circuit, an A/D conversion circuit, a temperature measuring circuit, a microprocessor, a D/A converter and a heating film driver. The polarizing beam splitter is disposed outside any one of laser transmitting holes. The optical power conversion circuit is disposed on reflection and refraction optical paths of the polarizing beam splitter. The optical power conversion circuit, the A/D conversion circuit, the microprocessor, the D/A converter, the heating film driver and a plurality of groups of heating films are sequentially in one-way connection. Temperature sensors, the temperature measuring circuit and the microprocessor are sequentially in one-way connection. The method of the disclosure can increase the frequency reproducibility of a laser device from 10.sup.−8 to 10.sup.−9. The device of the disclosure can effectively avoid the drift of a final frequency stabilization temperature point.

A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a timing of a switch signal to be input to a corresponding switch.

A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a timing of a switch signal to be input to a corresponding switch.

A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.

A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.

A laser oscillation device includes a laser oscillation unit, which is a laser oscillation part that generates multiple first laser beams having different wavelengths from one another, multiple sensors having different sensitivity characteristics from one another each representing light-receiving sensitivity for the wavelengths of the multiple first laser beams, to each output first voltages dependent on outputs of the multiple first laser beams. The laser oscillation device includes a computing unit that corrects the multiple first voltages using the sensitivity characteristics of the multiple sensors, and controls the laser oscillation unit based on multiple second voltages which correspond to multiple first voltages obtained after the correction.

A laser oscillation device includes a laser oscillation unit, which is a laser oscillation part that generates multiple first laser beams having different wavelengths from one another, multiple sensors having different sensitivity characteristics from one another each representing light-receiving sensitivity for the wavelengths of the multiple first laser beams, to each output first voltages dependent on outputs of the multiple first laser beams. The laser oscillation device includes a computing unit that corrects the multiple first voltages using the sensitivity characteristics of the multiple sensors, and controls the laser oscillation unit based on multiple second voltages which correspond to multiple first voltages obtained after the correction.