This invention describes algorithmic and computational approaches to optimize the design and performance of microresonator based ultra-low noise lasers including a reflector or filter comprised of multiple (≧3) microresonator rings with different ring radii coupled together through bus waveguides. The enhanced reflector/filter design optimization provides more control over the key parameters, including the suppression ratio of unwanted modes over both a wide wavelength range (supporting wide wavelength tunability) and over the narrow range around the laser wavelength (improving laser singlemode and noise performance), while also enabling the design of specific reflector/filter bandwidth and effective length (delay), supporting the design of an ultra-low noise laser with specific operating performance parameters.

A radiation system for controlling pulses of radiation comprising an optical element configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, an actuator configured to actuate the optical element according to a control signal received from a controller, the control signal at least partially depending on a reference pulse repetition rate of the radiation system and, a processor configured to receive pulse information from the controller and use the pulse information to determine an adjustment to the control signal. The radiation system may be used to improve an accuracy of a lithographic apparatus operating in a multi-focal imaging mode.

A narrow band laser apparatus may include: a laser resonator; a pair of discharge electrodes; a power supply; a first wavelength measurement device configured to output a first measurement result; a second wavelength measurement device configured to output a second measurement result; and a control unit. The control unit calibrates the first measurement result, based on a difference between the second measurement result derived when the control unit controls the power supply to apply a pulsed voltage to the pair of discharge electrodes with a first repetition frequency and the second measurement result derived when the control unit controls the power supply to apply the pulsed voltage to the pair of discharge electrodes with a second repetition frequency, the second repetition frequency being higher than the first repetition frequency.

Coupled-cavity vertical cavity surface emitting lasers (VCSELs) are provided by the present disclosure. The coupled-cavity VCSEL can comprise a VCSEL having a first mirror, a gain medium disposed above the first mirror, and a second mirror disposed above the gain medium, wherein a first cavity is formed by the first mirror and the second mirror. A second cavity is optically coupled to the VCSEL and configured to reflect light emitted from the VCSEL back into the first cavity of the VCSEL. In some embodiments, the second cavity can be an external cavity optically coupled to the VCSEL through a coupling component. In some embodiments, the second cavity can be integrated with the VCSEL to form a monolithic coupled-cavity VCSEL. A feedback circuit can control operation of the coupled-cavity VCSEL so the output comprises a target high frequency signal.

A multiple frequency comb source apparatus (100) for simultaneously creating a first laser pulse sequence representing a first frequency comb (1) and at least one further laser pulse sequence representing at least one further frequency comb (2), wherein at least two of the first and at least one further pulse sequences have different repetition frequencies, comprises a laser resonator device (10) comprising multiple resonator mirrors including first end mirrors EM.sub.1,OC.sub.1 providing a first laser resonator (11), a laser gain medium (21, 22) being arranged in the laser resonator device (10), and a pump device (30) being arranged for pumping the laser gain medium (21), wherein the laser resonator device (10) is configured for creating the first and at least one further laser pulse sequences by pumping and passively mode-locking the laser gain medium (21), the resonator minors of the laser resonator device (10) include further end minors EM.sub.2, OC.sub.2 providing at least one further laser resonator (12), the first laser resonator (11) and the at least one further laser resonator (12) share the laser gain medium (21), resonator modes of the first laser resonator (11) and the at least one further laser resonator (12) are displaced relative to each other, wherein the resonator modes are located in the laser gain medium (21) at separate beam path spots, and at least one of the first and further end minors EM.sub.1, EM.sub.2, OC.sub.1, OC.sub.2 is adjustable so that the repetition frequency of at least one of the first and at least one further laser pulse sequences can be set independently from the repetition frequency of the other one of the first and at least one further laser pulse sequences. Furthermore, a spectroscopic measuring method, a spectroscopy apparatus and a multiple frequency comb generation method are described.

An optical system can lock a wavelength of a tunable laser to a specified wavelength of a temperature-insensitive spectral profile of a spectral filter. In some examples, the spectral filter, such as a Fabry-Perot filter, can have a temperature-insensitive peak wavelength and increasing attenuation at wavelengths away from the peak wavelength. The spectral filter can spectrally filter the laser light to form filtered laser light. A detector can detect at least a fraction of the filtered laser light. Circuitry coupled to the detector and the laser can tune the tunable laser to set a signal from the detector to a specified value corresponding to a specified wavelength in the spectral profile, and thereby adjust the selectable wavelength of the tunable laser to match the specified wavelength. In some examples, the optical system can include a polarization rotator, and can use polarization to separate incident light from return light.

An optical system can lock a wavelength of a tunable laser to a specified wavelength of a temperature-insensitive spectral profile of a spectral filter. In some examples, the spectral filter, such as a Fabry-Perot filter, can have a temperature-insensitive peak wavelength and increasing attenuation at wavelengths away from the peak wavelength. The spectral filter can spectrally filter the laser light to form filtered laser light. A detector can detect at least a fraction of the filtered laser light. Circuitry coupled to the detector and the laser can tune the tunable laser to set a signal from the detector to a specified value corresponding to a specified wavelength in the spectral profile, and thereby adjust the selectable wavelength of the tunable laser to match the specified wavelength. In some examples, the optical system can include a polarization rotator, and can use polarization to separate incident light from return light.

The present disclosure provides embodiments for stabilizing simultaneously N lasers using an optical resonator. A distance between two mirrors forming the optical resonator is adjusted to a stabilization length. More specifically, at the stabilization length, there is, for each of N respective mutually different predetermined frequencies, a resonant frequency of the optical resonator for which the difference between the predetermined frequency and the said resonant frequency is smaller than a predetermined target value. Light from each of the N lasers is fed to the optical resonator and, thereby, N respective error signals are generated. Based on the N error signals, the N lasers are stabilized simultaneously.

The present disclosure provides embodiments for stabilizing simultaneously N lasers using an optical resonator. A distance between two mirrors forming the optical resonator is adjusted to a stabilization length. More specifically, at the stabilization length, there is, for each of N respective mutually different predetermined frequencies, a resonant frequency of the optical resonator for which the difference between the predetermined frequency and the said resonant frequency is smaller than a predetermined target value. Light from each of the N lasers is fed to the optical resonator and, thereby, N respective error signals are generated. Based on the N error signals, the N lasers are stabilized simultaneously.

A laser stabilization system and method are provided. The laser stabilization system includes: a laser configured to produce a laser light signal at a target frequency; a phase modulator configured to apply a phase modulation to the laser light signal to produce a phase modulated laser light signal; a stable optical resonator configured to receive the phase modulated laser light signal and return a light signal; a light detection system configured to receive the light signal from the stable optical resonator and produce an amplitude modulated electrical signal based on the light signal; and a digital domain circuit configured to generate a control signal based on the amplitude modulated electrical signal.