A columnar portion is formed by etching parts of an active layer and a first reflective layer. In this etching process, the columnar portion is formed by etching the first reflective layer to a position of a semiconductor layer. For example, it is etched to a thickness of approximately 3 μm.

A light source includes a substrate with a first surface and an opposite second surface. An epitaxial layer is positioned on the first surface of the substrate. The light source also includes at least one light generator in the epitaxial layer positioned such that an optical signal transmitted thereby is directed toward the substrate. A diffuser is positioned on the second surface of the substrate, and at least one monitor photodetector is positioned in the epitaxial layer in an arrangement configured to receive a portion of the optical signal which is reflected by the diffuser. In one form, the light generator may include a vertical cavity surface emitting laser (VCSEL).

Provided are a vertical-cavity surface-emitting laser, a manufacturing method, a distance measuring device, and an electronic device. The vertical-cavity surface-emitting laser includes a lower electrode, a substrate, a lower Bragg reflector, an active area, a current limiting layer, an upper Bragg reflector, a protective layer, and an upper electrode. The upper electrode includes at least two sub-electrodes, the at least two sub-electrodes are electrically connected, and the at least two sub-electrodes define one or more light-exiting windows. Each sub-electrode is provided with a corresponding light-exiting window so that the luminous power is increased. Each sub-electrode defines the light-exiting window, and a plurality of sub-electrodes are electrically connected so that the distribution uniformity of the light spots is increased, and the quality of the laser beam is improved.

A vertical cavity surface emitting laser includes a gain layer configured to generate light; a distributed Bragg reflector below the gains layer; and a meta structure reflector above the gain layer and comprising a plurality of nano structures having a sub wavelength dimension.

A vertical cavity surface emitting laser (VCSEL) may include a substrate layer, epitaxial layers on the substrate layer, and angled reflectors configured to receive an optical beam emitted toward a bottom surface of the VCSEL and redirect the optical beam through an exit window in a top surface of the VCSEL. In some implementations, the angled reflectors may be formed in the substrate layer. Additionally, or alternatively, the VCSEL may include molded optics, where the molded optics include the angled reflectors. In some implementations, the exit window may include an integrated lens.

Disclosed is a single-photon source emitting light with controllable circular polarization direction. A pillar structure above a semiconductor substrate includes a semiconductor single-quantum-dot structure. A spin injection layer is arranged above the pillar structure. A pulsed voltage is applied between the spin injection layer and the semiconductor substrate to inject a spin-polarized single-carrier from the spin injection layer into the semiconductor single-quantum-dot structure. In response to the injected single-carrier, a single-quantum-dot emits a single-photon with a circular polarization direction corresponding to the spin direction of the injected single-carrier. The polarization controllable single-photon source allows to use magnetic or electrical means to modulate the circular polarization direction of single-photon. The modulation speed by electrical mean can reach up to GHz range.

A vertical cavity surface emitting laser includes a post provided at a major surface of a substrate and extending along a first axis intersecting the major surface of the substrate, and an electrode provided at an upper surface of the post and surrounding the first axis. The post includes a first distributed Bragg reflector, an active layer, a current confinement layer, and a second distributed Bragg reflector. The substrate, the first distributed Bragg reflector, the active layer, the current confinement layer, and the second distributed Bragg reflector are disposed in order in a direction of the first axis.

Disclosed is a VCSEL array with improved optical properties. According to one aspect of the present embodiment, a VCSEL array has improved output light characteristics by minimizing the effects of resistance, inductance, and capacitance inevitably caused in a package.

In one example, a vertical cavity surface emitting laser (VCSEL) may include an active region to produce light at a wavelength, an emission surface to emit the light at the wavelength, a first oxide region spaced apart from the active region by a distance of at least a half-wavelength of the wavelength, a first oxide aperture in the first oxide region, a second oxide region between the first oxide region and the second oxide region, and a second oxide aperture in the second oxide region. The emitted light may have a divergence angle that is based on the respective positions and thicknesses of the first oxide region and the second oxide region.

The embodiment relates to a light-emitting device in which a positional relationship between a modified refractive index region's gravity-center position and the associated lattice point differs from a conventional device, and a production method. In this device, a stacked body including a light-emitting portion and a phase modulation layer optically coupled to the light-emitting portion is on a substrate. The phase modulation layer includes a base layer and plural modified refractive index regions in the base layer. Each modified refractive index region's gravity-center position locates on a virtual straight line passing through a corresponding reference lattice point among lattice points of a virtual square lattice on the base layer's design plane. A distance between the reference lattice point and the modified refractive index region's gravity center along the virtual straight line is individually set such that this device outputs light forming an optical image.