An apparatus including a frame, an optical sensor connected to the frame, and an environment separation barrier. The frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing. The optical sensor comprises a camera. The environment separation barrier is configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.

A stator includes layers of coated conductor. The coating is insulative and provides electrical isolation of adjacent conductor layers. The multiple layers of coated conductor form a stator core, and the stator includes magnet assemblies that sandwich the stator core. The conductor layers stack in a direction orthogonal to a plane of the magnet assemblies. The conductor layers have a rectangular cross section.

A field modulated doubly salient motor and a design method for a distribution of salient pole teeth thereof are provided. The motor includes a stator and a mover, wherein the stator includes a stator core, two sets of windings, and two sets of permanent magnets. Each of the stator teeth is split into two field winding teeth, and each of the field winding teeth is split into two salient pole teeth. The two sets of windings are respectively armature windings and field windings, wherein the armature windings are wound around stator teeth, and the field windings are wound around adjacent field winding teeth that are split from different stator teeth. The two sets of tangentially magnetized permanent magnets are respectively placed on openings and bottoms of field winding slots, and permanent magnets placed in the same slot or at the same positions of adjacent slots have opposite polarities.

A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.

A permanent field magnet is disposed between two armatures parallel to each other, and includes a first field magnet section facing a first armature of the two armatures, and a second field magnet section facing a second armature of the two armatures that is different from the first armature. The first field magnet section includes a first main magnet that generates a magnetic field for the first armature and a first auxiliary magnet that increases magnetic flux of a magnetic pole of the first main magnet. The second field magnet section includes a second main magnet that generates a magnetic field for the second armature and a second auxiliary magnet that increases magnetic flux of a magnetic pole of the second main magnet. The first main magnet and the second main magnet, or the first auxiliary magnet and the second auxiliary magnet, are permanent magnets magnetized in the same direction.

A linear actuator for pumping comprising a stator having an inner opening, a shaft having a plurality of permanent magnets spaced linearly in the axial direction, the shaft disposed in the stator opening and configured to reciprocate linearly in the axial direction relative to the stator, the stator comprising a first stator assembly having a plurality of pole sections spaced linearly in the axial direction and a plurality of coils disposed therebetween, a second stator assembly having a plurality of pole sections spaced linearly in the axial direction and a plurality of coils disposed therebetween, a bearing assembly positioned axially between the first stator assembly and the second stator assembly, and the bearing assembly having a width that is a function of the spacing of the plurality of pole sections of the first stator assembly and the second assembly and the spacing of the plurality of permanent magnets of the shaft.

A linear drive unit and a machine tool having the linear drive unit, capable of being applied to various applications, while taking into consideration the balance between the thrust force and the cogging of a linear motor. The linear drive unit has a magnetic gap changing mechanism which is configured to change a magnitude of a magnetic gap between a coil and a magnet, by displacing at least one of the coil and the magnet so that the coil and the magnet approach or are separated from each other.

A method for positioning a substage (9), supported by a main stage (5), relative to a reference object, the substage moveable in a direction (7) between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems (119, 121), each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.

A field modulated doubly salient motor and a design method for a distribution of salient pole teeth thereof are provided. The motor includes a stator and a mover, wherein the stator includes a stator core, two sets of windings, and two sets of permanent magnets. Each of the stator teeth is split into two field winding teeth, and each of the field winding teeth is split into two salient pole teeth. The two sets of windings are respectively armature windings and field windings, wherein the armature windings are wound around. stator teeth, and the field windings are wound around adjacent field winding teeth that are split from different stator teeth. The two sets of tangentially magnetized permanent magnets are respectively placed on openings and bottoms of field winding slots, and permanent magnets placed in the same slot or at the same positions of adjacent slots have opposite polarities.

A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.