A radio frequency (RF) power generator adapted for coupling to a multi-station integrated circuit fabrication chamber may include an oscillator to provide a periodic signal and one or more preamplifiers each having an input port to receive a signal from the oscillator and having an output port to provide an amplified signal. The RF generator may additionally include one or more constant-gain amplifiers, each having an input port to receive a signal from the one or more preamplifiers, and an output port configured for coupling an amplified signal to an electrode for generating a plasma in an assigned station of the multi-station integrated circuit fabrication chamber.

A phased array element includes a transmit portion having a plurality of amplifier paths, each amplifier path having a driver amplifier and a power amplifier, a first transformer coupled to the power amplifier of a first amplifier path of the plurality of amplifier paths and a second transformer coupled to the power amplifier of a second amplifier path of the plurality of amplifier paths, a secondary winding of each of the first transformer and the second transformer coupled together by a common transformer segment, a transmit phase shifter Sswitchably coupled to the plurality of amplifier paths, a receive portion coupled to the second transformer, the receive portion having a receive path having a low noise amplifier (LNA), and a receive phase shifter coupled to the LNA.

Temperature compensation circuits and methods for adjusting one or more circuit parameters of a power amplifier (PA) to maintain approximately constant Gain versus time during pulsed operation sufficient to substantially offset self-heating of the PA. Some embodiments compensate for PA Gain “droop” due to self-heating using a Sample and Hold (S&H) circuit. The S&H circuit samples and holds an initial temperature of the PA at commencement of a pulse. Thereafter, the S&H circuit generates a continuous measurement that corresponds to the temperature of the PA during the remainder of the pulse. A Gain Control signal is generated that is a function of the difference between the initial temperature and the operating temperature of the PA as the PA self-heats for the duration of the pulse. The Gain Control signal is applied to one or more adjustable or tunable circuits within a PA to offset the Gain droop of the PA.

According to one aspect, an integrated circuit includes a power amplifier having a succession of at least two amplifier stages. The two amplifier stages include a first amplifier stage configured to receive a radio frequency signal as input and a last amplifier stage configured to deliver as an output of an amplified radio frequency signal. The power amplifier further includes a safety circuit with a control circuit configured to compare the amplified radio frequency signal voltage with a threshold voltage. The safety circuit further comprises a gain reduction circuit configured to reduce a bias voltage of an upstream amplifier stage of the last amplifier stage when the amplified radio frequency signal voltage is greater than the threshold voltage.

This application discloses example multi-phase-based Doherty power amplifier control methods and apparatus An example method includes obtaining a baseband signal and generating two vector signals based on the baseband signal, where the two vector signals each include a phase signal and amplitude signal, and the two vector signals are non-orthogonal signals. Amplitude control signals of a target power amplifier are obtained based on quantization encoding of amplitude signals of the two vector signals, where the target power amplifier includes a main and power amplifier, and the main and auxiliary power amplifier each include a plurality of working cells. Phase control signals of the target power amplifier are obtained based on phase signals of the two vector signals. Based on the phase control signals and the amplitude control signals, a plurality of working cells in the main power amplifier and the auxiliary power amplifier to output power signals are controlled.

The present disclosure provides a device and a method for adjusting envelope signals for use by an envelope tracking (ET) enabled power amplifier. The device comprises: a controller configured to calculate a difference between a first amplitude of a first envelope signal received at a first time instance and second amplitude of a second envelope signal received at a second time instance; compare the difference with a predetermined threshold; and adjust an output envelope signal corresponding to the first envelope signal in response to determining that the difference is greater than or equal to the predetermined threshold, such that the output envelope signal is adjusted step-by-step from the second envelope signal to the first envelope signal with each amplitude step being less than or equal to a predetermined amplitude step.

Disclosed herein are methods for use in operating signal amplifiers that provide impedance adjustments for different gain modes. The impedance adjustments are configured to result in a constant real impedance for an input signal at the amplifier. Some of the disclosed methods adjust impedance using switchable inductors to compensate for changes in impedance with changing gain modes. Some of the disclosed methods adjust a device size to compensate for changes in impedance with changing gain modes. By providing impedance adjustments, the amplifiers reduce losses and improve performance by improving impedance matching over a range of gain modes.

A power amplifier module includes a first amplifier circuit that amplifies a radio frequency signal with a first gain corresponding to a first control signal to generate a first amplified signal; a second amplifier circuit that amplifies the first amplified signal with a second gain corresponding to a second control signal to generate a second amplified signal; and a control unit that generates the first control signal and the second control signal. The second control signal is a control signal for increasing a power-supply voltage for the second amplifier circuit as a peak-to-average power ratio of the radio frequency signal increases. The first control signal is a control signal for controlling the first gain of the first amplifier circuit so that a variation in the second gain involved in a variation in the power-supply voltage for the second amplifier circuit is compensated for.

The present disclosure relates to devices and methods for detecting and preventing occurrence of a saturation state in a power amplifier. A power amplifier module can include a power amplifier including a cascode transistor pair. The cascode transistor pair can include a first transistor and a second transistor. The power amplifier module can include a current comparator configured to compare a first base current of the first transistor and a second base current of the second transistor to obtain a comparison value. The power amplifier module can include a saturation controller configured to supply a reference signal to an impedance matching network based on the comparison value. The impedance matching network can be configured to modify a load impedance of a load line in electrical communication with the power amplifier based at least in part on the reference signal.

A system for power amplifier control includes a processor, a memory in communication with the processor, wherein the processor and the memory are configured to simultaneously provide input signal strength of each of a plurality of power amplifiers in a millimeter wave (mmW) phased array system, determine an average input signal strength of the plurality of power amplifiers based on the provided input signal strengths using an analog-to-digital converter (ADC), determine a voltage headroom for the plurality of power amplifiers based on the determined average input signal strength, estimate a power backoff value based on the voltage headroom, and determine a gain control value based on the estimated power backoff value.