Patent classifications
H03H9/02858
Acoustic wave device
In an acoustic wave device, an interdigital transducer electrode is disposed on a piezoelectric substrate with a reverse velocity surface having an elliptic shape, and a dielectric film is disposed to cover the interdigital transducer electrode. Assuming an electrode density (%) of the interdigital transducer electrode to be y (%) and a wavelength-normalized film thickness 100h/λ (%) of the interdigital transducer electrode to be x (%), the wavelength-normalized film thickness x of the interdigital transducer electrode takes a value not less than x satisfying y=0.3452x.sup.2−6.0964x+36.262 depending on the electrode density of the interdigital transducer electrode.
ACOUSTIC WAVE DEVICE
An acoustic wave device includes an IDT electrode with an inclined IDT structure on a piezoelectric substrate. An intersection region, where a first electrode finger and a second electrode finger overlap each other when viewed in an acoustic wave propagation direction, includes a central region and first and second low acoustic velocity regions on both sides of the central region. The first and second low acoustic velocity regions have an asymmetric shape about a central axis extending in a length direction of the first and second electrode fingers.
Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a dense film above gap region of interdigital transducer electrodes
An acoustic wave device comprises a substrate including a piezoelectric material, interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes having gap regions, edge regions, and center regions, a first dielectric film having a lower surface disposed on the IDT electrodes and the surface of the substrate, and a material having a density greater than a density of the first dielectric film disposed above the gap regions of the IDT electrodes.
ACOUSTIC WAVE DEVICE
An acoustic wave device includes a piezoelectric substrate, and an IDT electrode on the piezoelectric substrate, and the IDT electrode includes an intersection region in which first and second electrode fingers overlap each other in an acoustic wave propagation direction, the intersection region includes a central region and first and second low acoustic velocity regions outside the central region on respective sides in an extending direction of the first and second electrode fingers, first and second busbars include first and second cavities, respectively, first and second inner busbar portions on one side of the first and second cavities, and first and second outer busbar portions on another side are connected by first and second connecting portions, and at least one of the first connecting portions and at least one of the second connecting portions are a first wide width connecting portion and a second wide width connecting portion having a width wider than that of each of remaining first and second connecting portions.
Acoustic wave device
An acoustic wave device includes a plurality of interdigital transducer electrodes, in a first interdigital transducer electrode, a first electrode finger includes a wide portion having a greater width in the second direction than a center portion. In the first interdigital transducer electrode, for the first electrode finger, a first distance that is a maximum distance in the second direction between a center line of the center portion in a first direction is shorter than a second distance that is a maximum distance in a second direction between the center line of the center portion and an outer edge, away from a second interdigital transducer electrode, of the wide portion.
ACOUSTIC WAVE DEVICE, WAFER, AND METHOD OF MANUFACTURING WAFER
An acoustic wave device includes a support substrate, a piezoelectric layer provided on the support substrate, at least a pair of comb-shaped electrodes provided on the piezoelectric layer, each of the comb-shaped electrodes including a plurality of electrode fingers, and an insulating layer provided between the support substrate and the piezoelectric layer, the insulating layer having, in at least a part thereof, a plurality of void regions of which extending directions are different from each other when viewed from a thickness direction of the support substrate, a width in the corresponding extending direction of each of the void regions being longer than a width in a direction orthogonal to the corresponding extending direction when viewed from the thickness direction of the support substrate.
ACOUSTIC WAVE DEVICE
An acoustic wave device includes a piezoelectric layer and electrodes including at least a pair of electrodes on a first main surface, facing each other in a second direction crossing a first direction, and adjacent to each other. At least three or more of the electrodes are arranged in the second direction. The electrodes include at least two electrodes having different film thicknesses from each other. The electrodes include at least two electrodes having the same or substantially the same film thickness and being adjacent to each other.
Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a gap hammer structure
An acoustic wave device comprises a substrate including a piezoelectric material, and interdigital transducer (IDT) electrodes disposed on a surface of the substrate. The IDT electrodes have gap regions, edge regions, and center regions. A maximum width of the IDT electrodes in the gap regions is greater than the maximum width of the IDT electrodes in the edge regions, thereby achieving a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, and the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions.
ELASTIC WAVE ELEMENT, FILTER ELEMENT, AND COMMUNICATION DEVICE
An elastic wave element having a piezoelectric substrate equipped with a first main surface, and an excitation electrode arranged on the first main surface and having multiple electrode fingers, wherein, in a cross-sectional view in the direction orthogonal to the first main surface, the width of the electrode fingers at a first height at a distance from the first main surface is greater than the width at a second height located closest to the first main surface.
ELECTROACOUSTIC TRANSDUCER WITH IMPROVED SUPPRESSION OF UNWANTED MODES
An improved electroacoustic transducer with an improved mode profile is provided. The transducer comprises a transversal velocity profile with a periodic structure and an edge structure flanking the periodic structure. The velocity profile also allows to suppress the SH wave mode. A dielectric material with a periodic structure contributes to the formation of the periodic structure of the velocity profile.